• Title/Summary/Keyword: nanodot

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Self- and Artificially-Controlled ZnO Nanostructures by MOCVD (MOCVD을 이용하여 자발적 및 인위적으로 제어된 산화아연 나노구조)

  • Kim, Sang-Woo;Fujita, Shizuo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.11a
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    • pp.9-10
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    • 2005

  • We report on the fabrication and characterization of self- and artificially-controlled ZnO nanostructures have been investigated to establish nanostructure blocks for ZnO-based nanoscale device application. Systematic realization of self- and artificially-controlled ZnO nanostructures on $SiO_2/Si$ substrates was proposed and successfully demonstrated utilizing metalorganic chemical vapor deposition (MOCVD) in addition with a focused ion beam (FIB) technique. Widely well-aligned two-dimensional ZnO nanodot arrays ($4{\sim}10^4$ nanodots of 130-nm diameter and 9-nm height over $150{\sim}150{\mu}m^2$ with a period of 750 nm) have been realized by MOCVD on $SiO_2/Si$ substrates patterned by FIB. A low-magnification FIB nanopatterning mode allowed the periodical nanopatterning of the substrates over a large area in a short processing time. Ga atoms incorporated into the surface areas of FIB-patterned nanoholes during FIB engraving were found to play an important role in the artificial control of ZnO, resulting in the production of ZnO nanodot arrays on the FIB-nanopatterned areas. The nanodots evolved into dot clusters and rods with increasing MOCVD growth time.

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Fabrication of Hexagonally Assembled Gold Nonodots Based on Anodization of Aluminum (알루미늄 양극산화를 이용한 육각구조로 규칙적으로 배열된 금 나노구조 제조)

  • Lee, Joon Ho;Lee, Han Sub;Choi, Jinsub
    • Applied Chemistry for Engineering
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    • v.20 no.2
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    • pp.191-194
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    • 2009

  • Porous alumina prepared by anodization has been widely studied since it shows very regular nanostructures at inexpensive prices. In this article, porous alumina is obtained by anodization of aluminum in the oxalic acid. After the first formed oxide is selectively removed from the aluminum substrate, the hexagonal nanostructures on the fresh aluminum are converted to nanodots by the second anodization in boric acid. Nanodots are arrayed in the convex of the hexagonal nanostructures. The optimization condition for the fabrication of nanodots with a height of 20 nm is investigated in detail. Subsequently, a gold film is deposited on the nanodots, resulting in the formation of gold nanodots arrays which are probably interesting substrate for biosensor applications.

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