• 센서학회지
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• 제14권5호
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• pp.302-307
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• 2005

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown and verified the sinusoidal approximation algorithm that estimates past and coming fringe values. Real-time signal processing program was developed and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below $0.36{\sim}8.6$ nm in the displacement range of $0{\sim}300{\mu}m$ was obtained. The nano-positioner with a piezoelectric actuator and the EFPI sensor system was designed and tested. The positioner successfully reached to the desired destination within 1 nm accuracy.

• Journal of Mechanical Science and Technology
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• 제20권10호
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• pp.1702-1715
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• 2006

The increasing use of nano-positioners in a wide variety of laboratory and industrial applications has created a need for nano-mechatronics education in all engineering disciplines. The subject of nano-mechatronics is broad and interdisciplinary. This article focuses on the way nano-mechatronics is taught in department of mechanical engineering at Korea Advanced Institute of Science and Technology (KAIST). As one model of nano-positioning systems, design and experimental methodology is presented in this article. For design phase, the stiffness and resonant frequencies are found analytically and verified by using a commercial finite element analysis program. Next, for experimental phase, various tests are performed to access the performances of the designed nano-positioner, for example, sine-tracking, multi-step response and travel-range check etc. Finally, the definition of 'separation frequency' is described and some comments are discussed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.94-99
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• 2005

Though the technology on the ultra-precise machining has been developed intensively, the high speed and high precision for large machining range is still very hard to achieve. The linear motor system fur the universal machining center is proper fur high speed and high precision, but it has drawback of sensitivity to disturbance. In this research, two degrees of freedom controller based on the zero phase error tracking controller (ZPETC) and disturbance observer are proposed to improve the tracking performance and dynamic stiffness of linear motor system. The proposed controller is verified in simulations and experiments on a nano-positioner system, and the experimental result shows that the tracking performance improved. In addition, the PID optimization method is proposed for the commercialized controller such as the PMAC based system. The tracking as well as impedance is included in the cost function of optimization.