• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1871-1874
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• 2005

The direct write FIB technology has several advantages over contemporary micro-machining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}m$. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1x10^{-7}$ torr. This paper presents the discussion and results of CAE of the 2 axes stages. we have estimated the stable static and dynamic characteristics for dual servo system. Therefore the 2 axes stages developed and future work are introduced at the end of the paper.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.87.2-87.2
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• 2016

As an era of nano science approaches, the understanding on the shape and optical properties of various materials in a nanoscale range is getting important more seriously than ever. Accordingly the development of high spatial-temporal-spectral resolution measurement tools for characterization of nanomaterials/structures is highly required. Generally, the various properties of sample can be measured independently, e.g. to observe the structural property of sample, we use the scanning electron microscopy or atomic force microscopy, and to observe optical property, we have to use another independent measurement tool such as photoluminescence spectroscopy or Raman spectroscopy. In the case of nano-materials, however, it is very difficult to find out the same position of sample at every different measurement processes, and the condition of sample can be changed by the influence of first measurement. The tip enhanced Raman scattering(TERS), which can simultaneously measure the two or more information of sample with nanoscale spatial resolution, is one of solutions of this problem. In this talk, I will present our recent nano Raman scattering data of graphene that measured by TERS and optimized tip fabrication method for efficient experiment.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.472-477
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modem products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of mastless fabrication. Therefore, the application of focused ion beam(FIB) technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few ${\mu}{\textrm}{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and l0nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about 1$\times$10$^{-5}$ pa. This paper presents the concept of nano stages and the discussion of the material treatment for ultra tush vacuum.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.515-516
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• 2006

A THz near-field microscope(THz NFM) is developed by a combination of THz time-domain spectroscopy and AFM(Atomic Force Microscopy). We have observed 80nm lateral resolution, demonstrating that the THz NFM technique has a great potential as a important probing tool for the analysis of the biological and semiconductor nanostructures.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2003년도 제24회 학술발표회 초록집
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• pp.183-183
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• 2003

• 한국정밀공학회지
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• 제22권6호
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• pp.7-14
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• 2005

• 한국정밀공학회지
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• 제27권8호
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• pp.84-90
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• 2010

In focused ion beam (FIB) fabrication processes the ion beam intensity with Gaussian profile has a drawback for high resolution machining. In this paper, the fabrication method to modify the beam profile at substrate using silt mask is proposed to increase the machining resolution at high current. Slit mask is utilized to block the part of beam and transmit only high intensity portion. A nano manipulator is utilized to handle the silt mask. Geometrical analysis on fabricated profile through silt mask was conducted. By utilizing proposed method, improvement of machining resolution was achieved.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1751-1752
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• 2008

The heterodyne laser interferometer has a nano-meter scale resolution. However, the unwanted nonlinearity error caused from frequency-mixing limits the ultra-precise resolution. In this paper, we propose a recursive WLS algorithm to improve the resolution of heterodyne laser interferometer. Some experimental results show an effectiveness of the recursive WLS algorithm in nano-meter scale resolution.

• Journal of the Optical Society of Korea
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• 제9권1호
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• pp.26-31
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• 2005

We describe the design and the implementation of video-rate reflection confocal scanning microscopy (CSM) using an acousto-optical deflector (AOD) for the fast horizontal scan and a galvanometer mirror (GM) for the slow vertical scan. Design parameters of the optical system are determined for optimal resolution and contrast. The OSLO simulations show that the performances of CSM are not changed with deflection angle and the wavefront errors of the system are less than 0.012λ. To evaluate the performances of designed CSM, we do a series of tests, measuring lateral and axial resolution, real time image acquisition. Due to a higher axial resolution compared with conventional microscopy, CSM can detect the surface of sub-micrometer features. We detect 138㎚ line shape pattern with a video-rate (30 frm/sec). And 10㎚ axial resolution is archived. The lateral resolution of the topographic images will be further enhanced by differential confocal microscopy (DCM) method and computational algorithms.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1518-1521
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• 2005

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its usage in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries This paper focus to apply the sputtering technology accumulated by experiments to 3d structure fabrication with high resolution. Therefore some verifications and discussions of the characteristics of FIB sputtering results according to focal length were described in this paper. And we suggested the definition of rectangular pattern profile and made the verifications of sputtering results based on definition of it.