Scanning Kelvin Probe Microscope analysis of Nano-scale Patterning formed by Atomic Force Microscopy in Silicon Carbide (원자힘현미경을 이용한 탄화규소 미세 패터닝의 Scanning Kelvin Probe Microscopy 분석)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 한국전기전자재료학회 2009년도 추계학술대회 논문집
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- pp.32-32
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- 2009