• 제목/요약/키워드: multiple displacement magnification mechanism

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초정밀 나노 스테이지에서의 다중 변위 확대 기구 해석 (Analysis of Multiple Displacement Magnification Mechanism in Ultraprecision Nano Stage)

  • 민경석;최우천
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1273-1276
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    • 2005
  • A displacement magnification mechanism is usually employed in a nano-positioning stage to achieve a large stage motion. A lever mechanism is the most widely used displacement magnifying mechanism. For more large stage motion, double or multiple lever mechanisms can be used. In this case, a more accurate analysis model is needed. This study proposes a more reasonable analysis model for a multiple lever mechanism based on the single lever mechanism model. This paper describes that the high equivalent stiffness of the lever is the most important factor reducing the magnification ratio of the lever mechanism through increasing the deflection of the link and including the axial displacement of the pivot.

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