• Title/Summary/Keyword: multimode polymeric waveguides

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Fabrication of Multimode Polymeric Waveguides by Hot Embossing Process: Effect of Sidewall Roughness on Insertion Loss

  • Yoon, Keun Byoung
    • Macromolecular Research
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    • v.12 no.5
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    • pp.437-442
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    • 2004
  • We have fabricated a polymeric waveguide by using a hot embossing technique and have investigated its propagation loss. The replication of waveguide channels through the use of a hot embossing technique is of interest as a single-step process that could deliver surface roughnesses far smaller than the wavelength. We have evaluated experimentally that the sidewall roughness has a dominant effect on insertion losses of the multimode polymeric waveguide. The propagation loss of the waveguide decreased dramatically upon decreasing the sidewall roughness of the channel. We have confirmed that the preparation of waveguides having nanometer-scale sidewall roughness and 0.1 dB/cm propagation loss is possible when using the hot embossing technique.

Low-Cost Fabrication of Multimode Optical Waveguides for Optical Interconnects (광 연결을 위한 저가형 멀티모드 광 도파로의 제작)

  • 이병탁;권민석;윤준보;신상영
    • Proceedings of the IEEK Conference
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    • 1999.06a
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    • pp.315-318
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    • 1999
  • As low-cost optical waveguides of optical interconnects, we fabricate multimode optical waveguides using a molding process The core size of a optical waveguide is 47 ${\mu}{\textrm}{m}$ $\times$ 41 ${\mu}{\textrm}{m}$. We use the photoresist AZ9260 as a master, polydimethyl-siloxane (PDMS) as a mold. In transferring process to polymeric material, we employ a modified micro-transfer molding process. All processes are simple and low-cost.

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Low-Loss Polymeric Waveguides Having Large Cores Fabricated by Hot Embossing and Micro-contact Printing Techniques

  • Yoon, Keun Byoung
    • Macromolecular Research
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    • v.12 no.5
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    • pp.474-477
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    • 2004
  • We present simple, low-cost methods for the fabrication of polymeric waveguides that have large core sizes for use as optical interconnects. We have used both hot embossing and micro-contact printing techniques for the fabrication of multimode waveguides using the same materials. Rectangular and large-core (60${\times}$60 $\mu\textrm{m}$$^2$) channels were readily prepared when using these methods. The dimensions of the embossed and printed channels were the same as those of the pattern on the original master. The polymeric waveguides that we fabricated with large core sizes exhibited a low propagation loss of 0.1 dB/cm at 850 nm, which indicates that hot embossing and micro-contact printing are suitable techniques for the fabrication of optical waveguides having large-core.

Fabrication of polymeric optical waveguides for parallel optical interconnection using hot embossing technique (Hot Embossing기술을 이용한 병렬 광접속용 고분자 광도파로 제작)

  • 최춘기;김병철;한상필;안승호;정명영
    • Korean Journal of Optics and Photonics
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    • v.13 no.3
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    • pp.223-227
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    • 2002
  • Polymeric multi-mode optical waveguides were fabricated for parallel optical interconnection. Waveguide structures were molded by a Ni mold master using a hot embossing technique. The Ni mold master was manufactured by LIGA process. Multimode optical waveguides with a 48$\times$47 ${\mu}{\textrm}{m}$$^2$cross-section were produced by a simple two-step process. The propagation losses of the multimode waveguide measured at 0.85 ${\mu}{\textrm}{m}$ and 1.3 ${\mu}{\textrm}{m}$ wavelengths were 0.38 dB/cm and 0.66 dB/cm, respectively.

Vertical Coupling of Polymeric Double-Layered Waveguides Using a Stepped MMI Coupler

  • Lee, Jong-Moo;Ahn, Joon-Tae;Cho, Doo-Hee;Ju, Jung-Jin;Lee, Myung-Hyun;Kim, Kyong-Hon
    • ETRI Journal
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    • v.25 no.2
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    • pp.81-88
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    • 2003
  • We designed a multimode interference (MMI) coupler to use in vertical coupling of double layered polymeric waveguides and analyzed the coupling characteristics by comparing our experimental and simulation results. We found that our proposed new structure, a stepped MMI coupler, is effective in vertical coupling between waveguide layers with a short length of MMI and has a high tolerance for the variation in the structure of an MMI coupler that can be induced as errors in the fabrication process.

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Atomic Layer Deposition Method for Polymeric Optical Waveguide Fabrication (원자층 증착 방법을 이용한 폴리머 광도파로 제작)

  • Eun-Su Lee;Kwon-Wook Chun;Jinung Jin;Ye-Jun Jung;Min-Cheol Oh
    • Korean Journal of Optics and Photonics
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    • v.35 no.4
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    • pp.175-183
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    • 2024
  • Research into optical signal processing using photonic integrated circuits (PICs) has been actively pursued in various fields, including optical communication, optical sensors, and quantum optics. Among the materials used in PIC fabrication, polymers have attracted significant interest due to their unique characteristics. To fabricate polymer-based PICs, establishing an accurate manufacturing process for the cross-sectional structure of an optical waveguide is crucial. For stable device performance and high yield in mass production, a process with high reproducibility and a wide tolerance for variation is necessary. This study proposes an efficient method for fabricating polymer optical-waveguide devices by introducing the atomic layer deposition (ALD) process. Compared to conventional photoresist or metal-film deposition methods, the ALD process enables more precise fabrication of the optical waveguide's core structure. Polyimide optical waveguides with a core size of 1.8 × 1.6 ㎛2 are fabricated using the ALD process, and their propagation losses are measured. Additionally, a multimode interference (MMI) optical-waveguide power-splitter device is fabricated and characterized. Throughout the fabrication, no cracking issues are observed in the etching-mask layer, the vertical profiles of the waveguide patterns are excellent, and the propagation loss is below 1.5 dB/cm. These results confirm that the ALD process is a suitable method for the mass production of high-quality polymer photonic devices.