• 제목/요약/키워드: multilayer films

검색결과 383건 처리시간 0.022초

RF/DC 마그네트론 스퍼터로 제조한 NiInZnO/Ag/NiInZnO 다층박막의 Ag 금속 삽입층 두께 변화에 따른 특성 연구 (A Study on the Characteristics of NiInZnO/Ag/NiInZnO Multilayer Thin Films Deposited by RF/DC Magnetron Sputter According to the Thickness of Ag Insertion Layer)

  • 김남호;김은미;허기석;여인선
    • 전기학회논문지
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    • 제65권12호
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    • pp.2014-2018
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    • 2016
  • Transparent, conductive electrode films, showing the particular characteristics of good conductivity and high transparency, are of considerable research interest because of their potential for use in opto-electronic applications, such as smart window, photovoltaic cells and flat panel displays. Multilayer transparent electrodes, having a much lower electrical resistance than widely-used transparent conducting oxide electrodes, were prepared by using RF/DC magnetron sputtering system. The multilayer structure consisted of three layers, [NiInZnO(NIZO)/Ag/NIZO]. The optical and electrical properties of the multilayered NIZO/Ag/NIZO structure were investigated in relation to the thickness of each layer. The optical and electrical characteristics of multilayer structures have been investigated as a function of the Ag and NIZO film thickness. High-quality transparent conductive films have been obtained, with sheet resistance of $9.8{\Omega}/sq$ for Ag film thickness of 8 nm. Also the multilayer films of inserted Ag 8 nm thickness showed a high optical transmittance above 93% in the visible range. The electrical and optical properties of the new multilayer films were mainly dependent on the thickness of Ag insertion layer.

Heat-induced coarsening of layer-by-layer assembled mixed Au and Pd nanoparticles

  • Shon, Young-Seok;Shon, Dayeon Judy;Truong, Van;Gavia, Diego J.;Torrico, Raul;Abate, Yohannes
    • Advances in nano research
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    • 제2권1호
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    • pp.57-67
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    • 2014
  • This article shows the coarsening behavior of nanoparticle multilayers during heat treatments which produce larger metallic nanostructures with varying shapes and sizes on glass slides. Nanoparticle multilayer films are initially constructed via the layer-by-layer self-assembly of small and monodispersed gold and/or palladium nanoparticles with different compositions (gold only, palladium only, or both gold and palladium) and assembly orders (compounding layers of gold layers over palladium layers or vice versa). Upon heating the slides at $600^{\circ}C$, the surface nanoparticles undergo coalescence becoming larger nanostructured metallic films. UV-Vis results show a clear reliance of the layering sequence on the optical properties of these metal films, which demonstrates an importance of the outmost (top) layers in each nanoparticle multilayer films. Topographic surface features show that the heat treatments of nanoparticle multilayer films result in the nucleation of nanoparticles and the formation of metallic cluster structures. The results confirm that different composition and layering sequence of nanoparticle multilayer films clearly affect the coalescence behavior of nanoparticles during heat treatments.

Polyimide Multilayer Thin Films Prepared via Spin Coating from Poly(amic acid) and Poly(amic acid) Ammonium Salt

  • Ha, You-Ri;Choi, Myeon-Cheon;Jo, Nam-Ju;Kim, Il;Ha, Chang-Sik;Han, Dong-Hee;Han, Se-Won;Han, Mi-Jeong
    • Macromolecular Research
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    • 제16권8호
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    • pp.725-733
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    • 2008
  • Polyimide (PI) multilayer thin films were prepared by spin-coating from a poly(amic acid) (PAA) and poly(amic acid) ammonium salt (PAAS). PI was prepared from pyromellitic dianhydride (PMDA) and 4,4'-oxydianiline (ODA) PAA. Different compositions of PAAS were prepared by incorporating triethylamine (TEA) into PMDA-ODA PAA in dimethylacetamide. PI multilayer thin films were spin-coated from PMDA-ODA PAA and PAAS. The PAAS comprising cationic and anionic moieties were spherical with a particle size of $20{\sim}40\;nm$. Some particles showed layers with ammonium salts, despite poor ordering. Too much salt obstructed the interaction between the polymer chains and caused phase separation. A small amount of salt did not affect the interactions of the interlayer structure but did interrupt the stacking between chains. Thermogravimetric analysis (TGA) showed that the average decomposition temperature of the thin films was $611^{\circ}C$. All the films showed almost single-step, thermal decomposition behavior. The nanostructure of the multilayer thin films was confirmed by X -ray reflectivity (XRR). The LF 43 film, which was prepared with a 4:3 molar ratio of PMDA and ODA, was comprised of uniformly spherical PAAS particles that influenced the nanostructure of the interlayer by increasing the interaction forces. This result was supported by the atomic force microscopy (AFM) data. It was concluded that the relationship between the uniformity of the PAAS particle shapes and the interaction between the layers affected the optical and thermal properties of PI layered films.

Layer-by-Layer 자기조립법에 의한 Poly(ethyiene-alt-maleic anhydride)i Poly(4-vinyl pyrtdine) 다층막 제조 (Fabrication of an Alternating Multilayer Film of Poly(ethylene-alt-maleic anhydride) and Poly(4-vinyl pyridine) by Layer-by-Layer Self-Assembly Method)

  • 이준열;홍숙영
    • 폴리머
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    • 제29권4호
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    • pp.392-398
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    • 2005
  • Layer-by-layer(LbL) 흡착에 의한 poly(ethylene-alt-m미? anhydride) (PEMAh)/poly(4-vinyl pyridine) (P4VP) 자기조립 다층박막을 제조하였다. 자기조립 다층막을 이루는 PEMAh/P4VP 두 고분자 사이의 수소 결합과 정전기적 인력이 다층막을 이루는 원동력이라는 것이 푸리에 변환 적외선(FT-IR) 분광분석에 의해서 확인되었다. 다층막의 균일한 자기조립 과정은 PEMAh/P4VP 이중층막의 적층 수 증가에 따른 UV-vis 스펙트럼의 256 nm에서 나타나는 P4VP 특성 흡수 피크의 선형적 증가에 의해서 확인할 수 있었다. 다층막을 이루는 고분자 전해질 담지 용액의 조건 변화가 다층막 형성에 미치는 영향을 살펴보기 위하여 두 고분자 용액의 농도 및 PEMAh 담지용액의 pH를 변화시키면서 다층막을 제조하였다. 다층막의 두께, 흡착된 고분자 전해질 질량 및 표면 거칠기의 변화를 UV-vis 분광 분석, 수정진동자 미량저울(quartz crystal microbalance;QCM) 및 원자 힘 현미경(atomic force microscopy;AFM)을 이용하여 측정하였다.

$TiN_xO_y/TiN_x$다층 박막을 이용한 고저항 박막 저항체의 특성평가 (Characteristic and Electrical Properties of $TiN_xO_y/TiN_x$ Multilayer Thin Film Resistors with a High Resistance)

  • 박경우;허성기;안준구;윤순길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.19-19
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    • 2009
  • TiNxOy/TiNx multilayer thin films with a high resistance (~ k$Omega$) were deposited on SiO2/Si substrates at room temperature by sputtering. The TiNx thin films show island and smooth surface morphology in samples prepared by dc and rf magnetron sputtering, respectively. TiNxOy/TiNx multilayer has been developed to control temperature coefficient of resistance (TCR) by the incorporation of TiNx layer (positive TCR) inserted into TiNxOy layers(negative TCR). Electrical and structural properties of sputtered TiNxOy/TiNx multilayer films were investigated as a function of annealing temperature. In order to achieve a stable high resistivity, multilayer films were annealed at various temperatures in oxygen ambient. Samples annealed at 700 oC for 1 min exhibit a good TCR value and a stable high resistivity.

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Spin-coated ultrathin multilayers and their micropatterning using microfluidic channels

  • Hongseok Jang;Kim, Sangcheol;Jinhan Cho;Kookheon Char
    • Korea-Australia Rheology Journal
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    • 제15권1호
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    • pp.1-7
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    • 2003
  • A new method is introduced to build up organic/organic multilayer films composed of cationic poly(allylamine hydrochloride) (PAH) and negatively charged poly (sodium 4-styrenesulfonate) (PSS) using the spinning process. The adsorption process is governed by both the viscous force induced by fast solvent elimination and the electrostatic interaction between oppositely charged species. On the other hand, the centrifugal and air shear forces applied by the spinning process significantly enhances desorption of weakly bound polyelectrolyte chains and also induce the planarization of the adsorbed polyelectrolyte layer. The film thickness per bilayer adsorbed by the conventional dipping process and the spinning process was found to be about 4 ${\AA}$ and 24 ${\AA}$, respectively. The surface of the multilayer films prepared with the spinning process is quite homogeneous and smooth. Also, a new approach to create multilayer ultrathin films with well-defined micropatterns in a short process time is Introduced. To achieve such micropatterns with high line resolution in organic multilayer films, microfluidic channels were combined with the convective self-assembly process employing both hydrogen bonding and electrostatic intermolecular interactions. The channels were initially filled with polymer solution by capillary pressure and the residual solution was then removed by the .spinning process.

Effects of Fe layer on Li insertion/extraction Reactions of Fe/Si Multilayer thin Film Anodes for Lithium Rechargeable Batteries

  • Kim, Tae-Yeon;Kim, Jae-Bum;Ahn, Hyo-Jun;Lee, Sung-Man
    • Journal of Electrochemical Science and Technology
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    • 제2권4호
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    • pp.193-197
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    • 2011
  • The influences of the thickness and microstructure of Fe layer on the electrochemical performances of Fe/Si multilayer thin film anodes were investigated. The Fe/Si multilayer films were prepared by electron beam evaporation, in which Fe layer was deposited with/without simultaneous bombardment of Ar ion. The kinetics of Li insertion/extraction reactions in the early stage are slowed down with increasing the thickness of Fe layer, but such a slowdown seems to be negligible for thin Fe layers less than about $500{\AA}$. When the Fe layer was deposited with ion bombardment, even the $300{\AA}$ thick Fe layer significantly suppress Li diffusion through the Fe layer. This is attributed to the dense microstructure of Fe layer, induced by ion beam assisted deposition (IBAD). It appears that the Fe/Si multilayer films prepared with IBAD show good cyclability compared to the film deposited without IBAD.

Decision of Interface and Depth Scale Calibration of Multilayer Films by SIMS Depth Profiling

  • Hwang, Hye-Hyun;Jang, Jong-Shik;Kang, Hee-Jae;Kim, Kyung-Joong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.274-274
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    • 2012
  • In-depth analysis by secondary ion mass spectrometry (SIMS) is very important for the development of electronic devices using multilayered structures, because the quantity and depth distribution of some elements are critical for the electronic properties. Correct determination of the interface locations is critical for the calibration of the depth scale in SIMS depth profiling analysis of multilayer films. However, the interface locations are distorted from real ones by the several effects due to sputtering with energetic ions. In this study, the determination of interface locations in SIMS depth profiling of multilayer films was investigated by Si/Ge and Ti/Si multilayer systems. The original SIMS depth profiles were converted into compositional depth profiles by the relative sensitivity factors (RSF) derived from the atomic compositions of Si-Ge and Si-Ti alloy reference films determined by Rutherford backscattering spectroscopy. The thicknesses of the Si/Ge and Ti/Si multilayer films measured by SIMS depth profiling with various impact energy ion beam were compared with those measured by TEM. There are two methods to determine the interface locations. The one is the feasibility of 50 atomic % definition in SIMS composition depth profiling. And another one is using a distribution of SiGe and SiTi dimer ions. This study showed that the layer thicknesses measured with low energy oxygen and Cs ion beam and, by extension, with method of 50 atomic % definition were well correlated with the real thicknesses determined by TEM.

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Self-assembly Coloration Approach on Cotton Fibers using Porphyrin

  • Kim, Byung-Soon;Li, Xiachuan;Kim, Sung-Hoon;Bae, Jin-Seo;Son, Young-A
    • 한국염색가공학회지
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    • 제20권5호
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    • pp.23-27
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    • 2008
  • In this work, poly(diallyldimethylammoniumchloride) (PDDAC) and meso-tetrakis(4-carboxyphenyl)porphyrin were considered to produce the self-assembly fabrication films. This method is based on the layer-by-layer (LbL) deposition produced by the electrostatic attraction between positively charged PDDAC and negatively charged porphyrin ions. The result of multilayer fabrication was discussed with the level of color strength (K/S). K/S spectra of the fabricated multilayer films showed gradual increase behaviors. In addition, the color photo images of the fabricated multilayer films showed that PDDAC and porphyrin were successfully attracted by electrostatic self-assembly forces.

a new process for fabricating electrically conducting thin films

  • Onoda, Mitsuyoshi;Yoshino, Katsumi
    • E2M - 전기 전자와 첨단 소재
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    • 제8권6호
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    • pp.795-805
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    • 1995
  • A novel thin film processing technique has been developed for the fabrication of ultrathin films of conducting polymers with molecular-level control over thickness and multilayer architecture. This new self-assembly process opens up vast possibilities in applications which require large area, ultrathin films of conducting polymers and more importantly in applications that can take advantage of the unique interactions achievable in the complex, supermolecular architectures of multilayer films.

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