• Korean Journal of Food Science and Technology
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• v.31 no.3
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• pp.625-630
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• 1999

This work was to study drying characteristics of the brown rice koji, an enzymic health food, using microwave under vacuum. Cooked brown rice was inoculated with Aspergillus oryzae and incubated at $32^{\circ}C$ for 6 days. The brown rice koji was dried by different drying methods: microwave vacuum drying, hot air drying, vacuum drying and freeze drying. Each drier except freeze drier was set to maintain the sample temperature at $40^{\circ}C$. During microwave vacuum drying, the sample reached $40^{\circ}C$ much faster (within $5{\sim}10\;min$) and was dried much faster (2 hrs) than the other drying methods. The initial drying rate of microwave vacuum drying was ten times faster than that of hot air drying. The microwave vacuum drying produced a dry sample of the highly retained enzymic activity, followed by freeze drying, vacuum drying, and hot air drying.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.26 no.9
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• pp.441-446
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• 2014

In Jeju province, the Citrus is widely spread crop which is the most popular fruit on the island. When the quality of a Citrus is not in a good condition or when its size exceeds or is lower than the set criteria, it is discarded as a waste. In this study, a drying machine for waste Citrus has been developed with 2.6 GHz microwave energy supply to the Citrus at vacuum environment. The vacuum environment of the drying chamber was maintained to reduce the energy supply to the Citrus by lowering the evaporating temperature of the water. The experiment was conducted with variation of the vacuum pressure, interior temperature of the drying chamber, and operating time of the microwave. As a result, the effect of the temperature was shown to be higher than the other two control methods, and it showed with 0.305 g/W evaporation efficiency.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.241.1-241.1
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• 2013

최근 고집적화된 금속-산화막 반도체 metal oxide semiconductor (MOS) 소자는 크기가 점점 작아짐에 따라 얇은 산화막과 다양한 High-K 물질과 전극에 대하여 연구되고 있다. 이러한 소자의 열적 안정성과 균일성을 얻기 위해 다양한 열처리 방법이 사용되고 있으며, 일반적인 열처리 방법으로는 conventional thermal annealing (CTA)과 rapid thermal annealing (RTA)이 많이 이용되고 있다. 본 실험에서는 microwave radiation에 의한 열처리로 소자의 특성을 개선시킬 수 있다는 사실을 확인하였고, 상대적으로 $100^{\circ}C$ 이하의 저온에서도 공정이 이루어지기 때문에 열에 의한 소자 특성의 열화를 억제할 수 있으며, 또한 짧은 처리 시간 및 공정의 단순화로 비용을 효과적으로 절감할 수 있다. 본 실험에서는 metal-oxide-silicon (MOS) 구조의 capacitor를 제작한 다음, 기존의 CTA나 RTA 처리가 아닌 microwave radiation을 실시하여 MOS capacitor의 전기적인 특성에 미치는 microwave radiation 효과를 평가하였다. 본 실험은 p-type Si 기판에 wet oxidation으로 300 nm 성장된 SiO2 산화막 위에 titanium/aluminium (Ti/Al) 금속 전극을 E-beam evaporator로 형성하여 capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 평가하였다. 그 결과, microwave 처리를 통해 flat band voltage와 hysteresis 등이 개선되는 것을 확인하였고, microwave radiation 파워와 처리 시간을 최적화하였다. 또한 일반적인 CTA 열처리 소자와 비교하여 유사한 전기적 특성을 확인하였다. 이와 같은 microwave radiation 처리는 매우 낮은 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA나 RTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 산화막과 실리콘 기판의 계면 특성 개선에 매우 효과적이라는 것을 나타낸다. 따라서, microwave radiation 처리는 향후 저온공정을 요구하는 nano-scale MOSFET의 제작 및 저온 공정이 필수적인 display 소자 제작의 해결책으로 기대한다.

• Journal of Korean Ophthalmic Optics Society
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• v.13 no.4
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• pp.59-63
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• 2008

Purpose: The purpose of this study is to understand a relation of water content measurement with two different method, water removal method and dry method. Methods: 72 hydrogel contact lens containing various water content (ranged from 47% to 58%) were measured by the gravimetric method at 20$^{\circ}C$and 21% of the humidity. We weighed the dried test specimen at room temperature for 30 min after cooling. Results: In dry blotting method, the water content was measured to 47.43${\pm}$8.48%. The water contents was measured to 48.15${\pm}$8.36% with wet blotting condition. It was found that wet blotting method showed the higher water content of about 7% than dry blotting method. In water content with two dry methods, each of results was measured by 47.89${\pm}$8.06% and 49.56${\pm}$7.06%. In case of microwave method, the water content was measured significantly higher water content of about 1.67% than vacuum oven method. However, no statistical difference was found (p>0.05). Conclusions: In water removal method (Dry blotting method and Wet blotting method) to weigh hydrated test specimen, wet blotting method showed significantly higher water content than dry blotting method. Also in case of dry methods (vacuum oven and microwave) to weigh dry test specimen, water content of microwave method showed higher water content than vacuum oven method, but it should be noted that microwave oven method must be used carefully to measure accurateness on the specimen position and wave power.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.121.1-121.1
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• 2014

Recently, much attention has been given to plasma production under liquid and its applications [1]. However, most of plasma production techniques reported so far utilize high voltage dc, ac, rf or microwave power [2], where damage to discharge electrodes and small discharge volume are remained issues. As an alternative of plasma production method under liquid, we have proposed pulsed microwave excited plasma using slot antenna, where damage to the slot electrode can be minimized and plasma volume can be increased. We have also reported improvement of treatment efficiency with use of reduced-pressure condition during the discharge [3]. To realize low pressure conditions in liquid, various alternative technique can be considered. One possible technique is simultaneous injection of microwave power and ultrasonic wave. Ultrasonic wave induces pressure fluctuation with the wave propagation and is so far used for cavitation production in the water. We propose utilization of reduced pressure induced by ultrasonic cavitation for improvement of the plasma production. Correlation between the plasma production and the ultrasonic power will be discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.501-501
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• 2012

A 2.45 GHz electron cyclotron resonance (ECR) plasma source with a belt magnet assembly configuration (BMC) was developed for hyperthermal neutral beam (HNB) generation. A plasma source for high flux HNB generation should be satisfied with the requirements: low pressure operation, high density, and thin plasma. The ECR plasma source with BMC achieved high density at low operation pressure due to electron confinement enhancement caused by high mirror ratio and drifts in toroidal direction. The 2.45 GHz microwave launcher had a circularly bended WR340 waveguide with slits. The microwave E-field profile induced by the microwave launcher was studied in this paper. The E-field profile was a cups field perpendicular to B-filed at ECR zone. The optimized E-field profile and B-field were found for effective ECR heating.

• Korean Journal of Food Science and Technology
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• v.31 no.3
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• pp.619-624
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• 1999

This work was to study the potential health food use of germinated colored rice after germinating and drying using microwave under vacuum. Colored rice was soaked in water at $15^{\circ}C$ for 2 days and then germinated at $25^{\circ}C$ for $3{\sim}4\;days$. The germinated colored rice was dried by different drying methods: microwave vacuum drying 1, microwave vacuum drying $2\;(drying{\rightarrow}crushing{\rightarrow}drying)$, hot air drying, vacuum drying and freeze drying. Each drier except freeze drier was set to maintain the sample temperature at $60^{\circ}C$. During microwave vacuum drying 1 or 2, the sample reached $60^{\circ}C$ much faster (within 5 min) and was dried much faster ($2{\sim}3\;hrs$ than the other drying methods. The initial drying rate of microwave vacuum drying was ten times faster than that of hot air drying. The microwave vacuum drying 2 retained the highest ${\alpha}-amylase$ activity, followed by microwave vacuum drying 1, freeze drying, vacuum drying, and hot air drying.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.151-151
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• 2011

Atmospheric-pressure plasmas are used in a variety of materials processes. The lifetime of most atmospheric-pressure plasma sources is limits by electrode erosion due to energetic ion bombardment. These drawbacks were solved recently by several microplasma sources based on microstrip structure, which are more efficient and less prone to perturbations than other microplasma sources. In this work, we propose microplasma sources based on strip line and microstrip line, developed for the generation of microplasmas even in atmospheric air and analyzes these systems with microwave field simulation via comparative study with two previous microwave sources (Microstrip Spit Ring Resonator (MSRR), Microstrip Structure Source (MSS)).

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.297-297
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 1998.02a
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• pp.42-43
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• 1998