• Journal of the Microelectronics and Packaging Society
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• v.10 no.2
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• pp.13-17
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• 2003

In this study, new LTCC materials of $ZnWO_4$-LiF system were developed for the application to RF Module fabrication. Pure $ZnWO_4$ must be sintered above $1050^{\circ}C$ in order to obtain up to 98% of full density. The measured dielectric constant ($\epsilon_r$)quality factor ($Q{\times}f0$), and temperature coefficient of resonant frequency ($\tau_f$ were 15.5, 74000 GHz, and $-70ppm^{\circ}C$, respectively. LiF addition resulted in a liquid phase formation at 81$0^{\circ}C$ due to interaction between ZnWO$_4$ and LiF. Therefore, ZnWO$_4$ with 0.5∼1.5 wt% LiF could be densified at $850^{\circ}C$. In the given LiF addition range, the sintering shrinkage increased with increasing LiF content. Addition of LiF slightly lowered the dielectric constant from 15.5 to 14.2∼15 due to lower dielectric constant of LiF. Qxfo value decreased with increasing LiF content. This can be explained in terms of the interaction between LiF and $ZnWO_4$, and inhomogeneity of grain structure.