• Title/Summary/Keyword: microwave device

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A CMOS Compatible Micromachined Microwave Power Sensor (CMOS 공정과 호환되는 마이크로머시닝 기술을 이용한 마이크로파 전력센서)

  • 이대성;이경일;황학인;이원호;전형우;김왕섭
    • Proceedings of the IEEK Conference
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    • 2002.06a
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    • pp.439-442
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    • 2002
  • We present in this Paper a microwave Power sensor fabricated by a standard CMOS process and a bulk micromachining process. The sensor consists of a CPW transmission line, a resistor as a healer, and thermocouple arrays. An input microwave heater, the resistor so that the temperature rises proportionally to the microwave power and tile thermocouple arrays convert it to an electrical signal. The sensor uses air bridged 8round of CPW realized by wire bonding to reduce tile device size and cost and to improve the thermal impedance. Al/poly-Si junctions are used for the thermocouples. Poly-Si is used for tile resister and Aluminium is for transmission line. The resistor and hot junctions of the thermocouples are placed on a low stress silicon nitride diaphragm to minimize a thermal loss. The fabricated device operates properly from 1㎼ to 100㎽\ulcorner of input power. The sensitivity was measured to be ,3.2~4.7 V/W.

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Photonic K-Band Microwave Bandpass Filter with Electrically Controllable Transfer Characteristics Based on a Polymeric Ring Resonator (전기적으로 가변되는 전달특성을 갖는 폴리머 링 광공진기를 이용한 마이크로웨이브 대역통과 필터)

  • Kim, Gun-Duk;Lee, Sang-Shin
    • Korean Journal of Optics and Photonics
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    • v.17 no.5
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    • pp.475-479
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    • 2006
  • An integrated photonic K-band microwave bandpass filter has been proposed and demonstrated by incorporating a polymeric ring resonator. Its transfer characteristics were adjusted by shilling the resonance wavelength of the ring resonator via the thermooptic effect. The achieved performance of the filter includes the center frequency of 20 GHz, the attenuation of ${\sim}15dB$, the bandwidth of 2 GHz, and the corresponding quality factor of 10. The microwave output power within the passband of the device was adjusted at the rate of about 6.7 dB/mW in the range of 27 dB. This kind of device with electrically controllable transfer characteristics can be applied to implement microwave switches and other devices.

Improvement of Device Characteristic on Solution-Processed InGaZnO Thin-Film-Transistor (TFTs) using Microwave Irradiation

  • Moon, Sung-Wan;Cho, Won-Ju
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.15 no.2
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    • pp.249-254
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    • 2015
  • Solution-derived amorphous indium-gallium-zinc oxide (a-IGZO) thin-film-transistor (TFTs) were developed using a microwave irradiation treatment at low process temperature below $300^{\circ}C$. Compared to conventional furnace-annealing, the a-IGZO TFTs annealed by microwave irradiation exhibited better electrical characteristics in terms of field effect mobility, SS, and on/off current ratio, although the annealing temperature of microwave irradiation is much lower than that of furnace annealing. The microwave irradiated TFTs showed a smaller $V_{th}$ shift under the positive gate bias stress (PGBS) and negative gate bias stress (NGBS) tests owing to a lower ratio of oxygen vacancies, surface absorbed oxygen molecules, and reduced interface trapping in a-IGZO. Therefore, microwave irradiation is very promising to low-temperature process.

Optimization of InAlAs/InGaAs HEMT Performance for Microwave Frequency Applications and Reliability

  • Gupta, Ritesh;Aggarwal, Sandeep Kumar;Gupta, Mridula;Gupta, R.S.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.4 no.3
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    • pp.240-249
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    • 2004
  • In the present paper efforts have been made to optimize InAlAs/InGaAs HEMT by enhancing the effective gate voltage ($(V_c-V_off)$) using pulsed doped structure from uniformly doped to delta doped for microwave frequency applications and reliability. The detailed design criteria to select the proper design parameters have also been discussed in detail to exclude parallel conduction without affecting the del ice performance. Then the optimized value of $V_c-V_off$and breakdown voltages corresponding to maximum value of transconductance has been obtained. These values are then used to predict the transconductance and cut-off frequency of the del ice for different channel depths and gate lengths.

Reduction of the bondwire parasitic effect using dielectric materials for microwave device packaging (초고주파 소자 실장을 위한 유전체를 이용하는 본딩와이어 기생 효과 감소 방법)

  • 김성진;윤상기;이해영
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.34D no.2
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    • pp.1-9
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    • 1997
  • For the reduction of parasitic inductance and matching of bonding wire in the package of microwave devices, we propose multiple bonding wires buried in a dielectric material of FR-4 composite. This structure is analyzed using the method of moments (MoM) and compared with the common bondwires and ribbon interconnections. The FR-4 composite is modelled by the cole-cole model which can consider the loss and the variation of the permittivity in a frequency. At 20 GHz, the parasitic reactance is reduced by 90%, 80%, 60% compared to those of a single bonding wire in air, double bonding wires in air and ribbon interconnection in air, respectively. Also, the new bondwire shows very good matching of 60.ohm characteristic impedance and has 15dB, 10dB, 5dB improvement of the return loss and 2.5dB, 0.7dB, 0.2dB improvement of the insertion loss compared to the common interconnections. This technique can minimize the parasitic effect of bondwires in microwave device packaging.

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Activation of Implanted tons by Microwave Annealing (마이크로 웨이브를 이용한 이온의 활성화 방법에 관한 연구)

  • Kim, Cheon-Hong;Yoo, Juhn-Suk;Park, Cheol-Min;Han, Min-Koo
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1630-1632
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    • 1997
  • We have investigated activation phenomena of implanted ions on silicon wafers using microwave(2.45GHz). It is found that the higher concentration of impurities makes the better activation effects by microwave annealing. We have exposed poly-Si TFTs by microwave in order to anneal and improved the device performance. Microwave activates source/drain ions and lowers the contact resistance so that the current of the poly-Si TFTs increases. In addition, the leakage current of hydrogen passivated poly-Si TFTs is decreased after microwave annealing, due to the diffusion of hydrogen ions and curing the defects in the poly-Si active channel.

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Microwave Tomography Analysis System for Breast Cancer Detection (전자파 기반 유방암 진단을 위한 토모그램 분석 시스템)

  • Kwon, Ki-Chul;Yoo, Kwan-Hee;Kim, Nam;Son, Seong-Ho;Jeon, Soon-Ik
    • The Journal of the Korea Contents Association
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    • v.9 no.4
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    • pp.19-26
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    • 2009
  • The microwave exposure device for microwave breast cancer detection consists of RF transceiver and several antennas. The microwave information of object acquired from the microwave exposure device can be calculated permittivity and conductivity by using the inverse scattered analysis. In this paper, we have developed the software for detecting breast cancers based on microwave tomography, by which users not only can check out the existence of breast cancers through the permittivity and conductivity information analysis of the object's internal, but also can analysis easily information for distribution of breast cancers. The developed software provides the function for visualizing the captured permittivity and conductivity information as 2D or 3D color images on which users can easily detect the existence of breast cancers. For more detailed analysis of tomography images, the proposed software also has provided the functions for displaying their cutting profiles as well as position and size information of special area in them.

All-Fiber Microwave Signal Processing Device with Z-Shaped Double Coupler Optical Resonator (Z형 쌍-결합기 광 공진기를 이용한 광섬유 마이크로파 신호처리)

  • 이동욱
    • Proceedings of the Optical Society of Korea Conference
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    • 1999.08a
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    • pp.116-117
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    • 1999
  • Optical fiber networks for microwave signal processing have been investigation . Theoretical and experimental results are presented in Z-shaped Double-Coupler Optical Resonator. The use of Mason's rule to calculate transfer functions greatly simplified the analysis in our model. A good comparison between modelling and experiment is presented.

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Nonlinear Microwave Performance of an Optoelectronic CPW-to-Slotline Ring Resonator on GaAs Substrate

  • Lee, Jong-Chul
    • Journal of Electrical Engineering and information Science
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    • v.2 no.3
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    • pp.95-98
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    • 1997
  • A nonlinear optical-microwave interaction is carried out in an uniplanar CPW-to-Slotline ring resonator on the semi-insulating GaAs substrate, in which a Schottky photodetector is monolithically integrated as a coupling gap. When the capacitive reactance of the detetor is modulated, the parametric amplification effect of the mixer occurs. In this device structure, the parametric amplification gain of 20 dB without the applied bias in RF signal is obtained. This microwave optoelectronic mixer can be used in the fiber-optic communication link.

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