• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.11
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• pp.627-634
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• 2000

In this paper, new micromachined tunble bandpass filters for multi-band millimeter-wave telecommunication systems are proposed. Two types of mm-wave tunable filters are fabricated using micromachning technology and the responses of the filters are measured. One is two-pole lumped elements filter and the other two-pole resonators filter. Frequency tunability of the filter is achieved by changing the gap between a common CPW ground plate and the movable cantilever beam connected to the transmission line with the controllable renge of 2.5${\mu}m$. The deflection of cantilever beam is measured with the applied DC voltage. With the applied bias voltage from 0 to 50 V, the fabricated filters show 0.6 GHz(2.3%) at 26.6 GHz, and 0.8 GHz(2.5%) at 32 GHz center frequency shift for the lumped elements and resonators filter, respectively. The life time of the fabricated gold cantilever structure are tested.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3271-3273
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• 1999

In this paper, new micromachined tunable bandpass filters for multi-band millimeter-wave telecommunication systems are proposed. Two types of mm-wave tunable filters are fabricated using micromachining technology and the responses of the filters are measured. One is two-pole lumped elements filter and the other two-pole resonators filter. Frequency tunability of the filter is achieved by changing the gap between a common CPW ground plate and the movable cantilever beam connected to the transmission line with the controllable range of 2.5 ${\mu}m$. The deflection of cantilever beam is measured with the applied DC voltage. With the applied bias voltage from 0 to 50 V, the fabricated filters show 0.6 GHz(2.3 %) at 26.6 GHz, and 0.8 GHz(2.5%) at 32 GHz center frequency shift for the lumped elements and resonators filter, respectively.