• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2006.11a
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• pp.15-18
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• 2006

Recently, experimental visualization of microscale fluid transport has attacted considerable attention in designing microelectromechanical systems. Fluid-surface interactions on hydrophobic and hydrophilic surfaces can play a key role in passively controlling microfluidics. Here we investigate the slip boundary condition depending on the surface characteristics; hydrophilic, hydrophobic wettabilities. Using the micro-PIV, velocity profiles are measured in the glass (hydrophilic), PDMS (hydrophobic) microchannels.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.480-483
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• 2008

This paper reports a piezoelectric paper made with cellulose. Since cellulose has merits in terms of biodegradability, biocompatibility, abundance in nature, lightweight and cheap, piezoelectric paper can bring a broad technological impact in many areas, for example, sensors, actuators, speakers, microphones and microelectromechanical systems. Fabrication and characterization of the piezoelectric paper are illustrated and its possibility for acoustic applications is addressed with some preliminary device demonstrations.

• Structural Engineering and Mechanics
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• v.22 no.4
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• pp.433-447
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• 2006

The problem of very large deflection of a circular cantilever arc device subjected to inward or outward polar force is studied. An exact elliptic integral solution is derived for the two cases and the results are checked using large displacement finite element analysis via the ANSYS package by performing a new novel modeling simulation technique for this problem. Excellent agreements have been obtained between the exact analytical solution and the numerical approach. From this study, a design chart for engineers is developed to predict the required value for the inward polar force for the device to switch on for a given angle forming the circular arc (${\theta}_o$). This study has several interesting applications in mechanical engineering, integrated circuit technology, nanotechnology and especially in microelectromechanical systems (MEMs) such as a MEM circular device switch subjected to attractive or repulsive magnetic forces due to the attachments of two magnetic poles at the fixed and at the free end of the circular cantilever arc switch device.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.258-263
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• 2004

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems(MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of materials used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed an uniaxial testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, new techniques and procedures for measuring strength are described.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.6 s.261
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• pp.644-650
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• 2007

Mechanical property evaluation of micrometer-sized structures is necessary to help design reliable microelectromechanical systems(MEMS) devices. Most material properties are known to exhibit dependence on specimen size and such properties of microscale structures are not well characterized. This paper describes techniques developed for tensile testing of thin film used in MEMS. Epi-polycrystalline silicon is currently the most widely used material, and its tensile strength has been measured as 1.52GPa. We have developed a tensile testing machine for testing microscale specimen using electro-magnetic actuator. The field magnet and the moving coil taken from an audio-speaker were utilized as the components of the actuator. Structure of specimen was designed and manufactured for easy handling and alignment. In addition to the static tensile tests, it is described that new techniques and procedures can be adopted for high cycle fatigue test of a thin film.

• ETRI Journal
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• v.35 no.4
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• pp.617-624
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• 2013

Low power consuming and highly responsive semiconductor-type microelectromechanical systems (MEMS) gas sensors are fabricated for real-time environmental monitoring applications. This subsystem is developed using a gas sensor module, a Bluetooth module, and a personal digital assistant (PDA) phone. The gas sensor module consists of a $NO_2$ or CO gas sensor and signal processing chips. The MEMS gas sensor is composed of a microheater, a sensing electrode, and sensing material. Metal oxide nanopowder is drop-coated onto a substrate using a microheater and integrated into the gas sensor module. The change in resistance of the metal oxide nanopowder from exposure to oxidizing or deoxidizing gases is utilized as the principle mechanism of this gas sensor operation. The variation detected in the gas sensor module is transferred to the PDA phone by way of the Bluetooth module.

• Transactions on Electrical and Electronic Materials
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• v.7 no.4
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• pp.184-188
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• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2001.06a
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• pp.49-54
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• 2001

Monolayers such as self-assembled monolayer (SAM) have received considerable attention to reduce stiction and friction in micro-devices and microelectromechanical systems (MEMS). Various organic molecular films were investigated to obtain better understanding of their tribological behaviors and adhesion property. The organic molecular films studied in this work are: epoxysilane SAMs, octadecyltricholosilane (OST), multi-layers composed of epoxysilane SAMs, poly〔styrene-b-(ethylene-co-butylene)-b-styrene〕(SEBS) and compound of epoxy resin and poly (paraphenylene) (EP/PPP). The pull-off forces of these films were also obtained from force-distance curves measured in static mode of operation of atomic force microscope (AFM). Tribological tests were conducted with a ball-on-flat reciprocating friction tester. The OST showed the lowest pull-off force, indicating its low adhesion property. It was revealed that, the OST, EP/PPP and the multi-layer of epoxysilane SAMs, SEBS and EP/PPP exhibited good tribological properties at the lower load (0.3 N) whereas the OST showed best performance at the higher load (1.8 N).

• Computers and Concrete
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• v.30 no.3
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• pp.185-196
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• 2022

In this paper, the dynamic characteristics of a composite cylindrical beam made of a mechanism of carbon dioxide absorption coated on the tube core are investigated based on the classical beam theory coupled with the modified couple stress theory. The composite tube structures are assumed to be uniform along the tube length, and the energy method regarding the Hamilton principle is utilized for generating the governing equations. A powerful numerical solution, the generalized differential quadrature method (GDQM), is employed to solve the differential equations. The carbon dioxide trapping mechanism is a composite consisting of a polyacrylonitrile substrate and a cross-link polydimethylsiloxane gutter layer. Methacrylate, poly (ethylene glycol), methyl ether methacrylate, and three pedant methacrylates are all taken into account as potential mechanisms for capturing carbon dioxide. The application of the present study is helpful in the design and production of microelectromechanical systems (MEMS) and the different valuable parameters, such as the length-scale parameter, rate of section change, aspect ratio, etc., are presented in detail.

• Korean Journal of Materials Research
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• v.21 no.8
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• pp.456-460
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• 2011

Microelectromechanical systems (MEMS)-fabricated suspended devices were used to measure the in-plane electrical conductivity, Seebeck coefficient, and thermal conductivity of 304 nm and 516 nm thick InGaAlAs films with 0.3% ErAs nanoparticle inclusions by volume. The suspended device allows comprehensive thermoelectric property measurements from a single thin film or nanowire sample. Both thin film samples have identical material compositions and the sole difference is in the sample thickness. The measured Seebeck coefficient, electrical conductivity, and thermal conductivity were all larger in magnitude for the thicker sample. While the relative change in values was dependent on the temperature, the thermal conductivity demonstrated the largest decrease for the thinner sample in the measurement temperature range of 325 K to 425 K. This could be a result of the increased phonon scattering due to the surface defects and included ErAs nanoparticles. Similar to the results from other material systems, the combination of the measured data resulted in higher values of the thermoelectric figure of merit (ZT) for the thinner sample; this result supports the theory that the reduced dimensionality, such as in twodimensional thin films or one-dimensional nanowires, can enhance the thermoelectric figure of merit compared with bulk threedimensional materials. The results strengthen and provide a possible direction in locating and optimizing thermoelectric materials for energy applications.