• 한국소음진동공학회논문집
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• 제20권4호
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• pp.414-421
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• 2010

The proper orthogonal decomposition(POD) is used to the vibration analysis of microcantilever in tapping mode atomic force microscopy(AFM). The proper orthogonal modes (POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures such as the tapping cantilever. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses of the AFM microcantilever.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권2호
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• pp.116-122
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• 2004

A micromachined self-exited piezoelectric cantilever has been fabricated using PZT(52/48) thin film. For the application to biosensor using antigen-antibody interaction, electromechanical properties such as resonant frequency and quality factor of micromachined piezoelectric cantilever were important factors. Electromechanical properties and resonant behaviors of microfabricated cantilever were simulated by FEA (Finite Element Analysis) using Coventorware$^{TM}$2003. And these characterization of microcantilever were measured by using LDV(Laser Doppler Vibrometer) to compare with FEA data. We present the resonant frequency shift of micromachined piezoelectric cantilevers due to combination of mass loading and change of spring constant by gold deposition. Experimental mass sensitivities of microcantilever were characterized by Au deposition on the backside of microcantilever. Mass sensitivities with $100{\times}300$ ${\mu}{\textrm}{m}$ dimension cantilever from simulation and experimental were 5.56 Hz/ng and 16.8 Hz/ng respectively.y.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.465-466
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• 2012

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 추계학술발표강연 및 논문개요집
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• pp.29-29
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• 1998

• 대한기계학회논문집A
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• 제41권6호
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• pp.483-489
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• 2017

본 연구에서는 초음파 기법을 이용하여 메가헤르츠 대역에서 작동하는 마이크로 캔틸레버의 공진 주파수를 측정하였다. 고출력 초음파 펄스 발생기와 탐촉자를 이용하여 실리콘 재질의 마이크로 캔틸레버를 가진하였으며, 532 nm 연속파장(continuous wave) 레이저를 광원으로 하는 마이켈슨 간섭계를 사용하여 자유진동하는 마이크로 캔틸레버의 시간영역 파형을 획득하였다. 고속 푸리에 변환(fast Fourier transform)을 통한 주파수 응답 특성으로부터 마이크로 캔틸레버의 고유진동수를 평가할 수 있었으며, 유한요소법을 이용한 수치해석을 통하여 그 타당성을 검증하였다. 본 연구는 기존 원자현미경 기반의 측정기술과 대비하여 민감도를 향상시킬 수 있는 특성평가 기법을 제시한다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.2134-2136
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• 2004

A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. To evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well carried out the measurement of deflection.

• 대한기계학회논문집B
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• 제36권9호
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• pp.961-964
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• 2012

원자현미경에서 시편의 높이정보를 얻기 위한 마이크로 캔틸레버의 굽힘은 optical lever 방식이나 간섭원리에 기반한 방식으로 이루어졌으나, 부피와 가격적인 측면에서 이들 방식은 많은 개선의 여지를 가지고 있다. 따라서 본 논문에서는 이전 방식의 단점을 극복하기 위하여, 간단한 구조로 구현이 가능한 비점 수차방식을 기반으로한 광픽업헤드를 이용하여 마이크로 캔틸레버의 굽힘 측정시스템을 개발하였다. 개발된 시스템은 실험실에서 제작한 원자현미경에 적용하여 그 가능성을 확인하였다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1773-1777
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• 2008

The proper orthogonal decomposition(POD) is used to the modal analysis of microcantilever of dynamic mode atomic force microscopy(AFM). The proper orthogonal modes(POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses.

• Journal of Mechanical Science and Technology
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• 제20권10호
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• pp.1646-1652
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• 2006

A model of mechanical behavior of microcantilever due to intrinsic strain during deposition of MEMS structures is derived. A linear ordinary differential equation is derived for the beam deflection as a function of the thickness of the deposited layer. Closed-form solutions are not possible, but numerical solutions are plotted for various dimensionless ratios of the beam stiffness, the intrinsic strain, and the elastic moduli of the substrate and deposited layer. This model predicts the deflection of the cantilever as a function of the deposited layer thickness and the residual stress distribution during deposition. The usefulness of these equations is that they are indicative of the real time behavior of the structures, i.e. it predicts the deflection of the beam continuously during deposition process.

• Journal of Magnetics
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• 제18권2호
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• pp.173-177
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• 2013

Cantilever-detected high-frequency electron spin resonance (ESR) is a powerful method of sub-terahertz and terahertz ESR spectroscopy for a tiny magnetic sample at low temperature. In this technique, a small magnetization change associated with ESR transition is detected as deflection of a sample-mounted cantilever. So far, we have succeeded in ESR detection at 370 GHz using a commercial piezoresistive microcantilever. The spin sensitivity was estimated to ${\sim}10^{12}$ spins/gauss. In order to further increase the sensitivity, we adopt a fiber-optic-based detection system using a Fabry-Perot interferometer in place of piezoresistive system. Fabry-Perot cavity is formed between an optical-fiber end and microcantilever surface, and a change in the interference signal, corresponding to the cantilever deflection, is sensitively detected. This system is suitable for low-temperature and high-magnetic-field experiments because of its compact setup and less heat dissipation. In this study, performance of Fabry-Perot interferometer is evaluated, and its application to cantilever-detected ESR measurement is described.