• Journal of Institute of Control, Robotics and Systems
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• v.9 no.4
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• pp.277-283
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• 2003

Recently, near-field recording (NFR) disk drive schemes have been proposed with a view to increasing recording densities of hard disk drives. Compared with hard disk drives. NFR disk drives have narrower track pitches and are exposed to more severe periodic disturbances resulting from eccentric rotation of the disk. It is difficult to meet servo system design specifications for NFR disk drives with conventional VCM actuators in that the servo system for an NFR disk drive generally requires a feater gain and higher bandwidth. To tackle the problem various dual-stage actuator systems composed of a microactuator mounted on top of a conventional VCM actuator have been proposed. This article deals with the problem of designing a tracking servo system far an NFR disk drive adopting a dual-stage actuator. We summarize design constraints pertaining to the dual-stage servo system and present a new servo scheme using iterative teaming control. We design feedback compensators and an iterative teaming controller for a target plant and verify the validity of the proposed control scheme through a computer simulation.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.4 no.4
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• pp.39-47
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• 2005

In this paper, a novel high power micropump using active check valves in place of conventional passive check valves employed at the inlet and outlet ports is presented. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. A prototype micropump having an effective size of $17mm{\times}8mm{\times}11mm$ is fabricated. Frequency-dependent flow rate characteristics, bi-directional flow characteristics and load characteristics are experimentally investigated using a timing control method for valve closing motion. From the obtained experimental results, it is ascertained that optimal values of the phase shift compared to the voltage to drive pump chamber are $15^{\circ}$ for inlet check valve and $195^{\circ}$ for outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with an effective size of $10mm{\times}10mm{\times}10mm$ is fabricated and the basic characteristics are experimentally investigated.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.520-528
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• 2001

This paper investigates a resonant microaccelerometer that measures acceleration using a built-in micromechanical resonator, whose resonant frequency is changed by the acceleration-induced axial force. A set of design equations for the resonant microaccelerometer has been developed, including analytic formulae for resonant frequency, sensitivity, nonlinearity and maximum stress. On this basis, the sizes of the accelerometer are designed for the sensitivity of 10$^3$Hz/g in the detection range of 5g, while satisfying the conditions for the maximum nonlinearity of 5%, the minimum shock endurance of 100g and the size constraints placed by microfabrication process. A set of the resonant accelerometers has been fabricated by the combined use of bulk-micromachining and surface-micromachining techniques. From a static test of the cantilever beam resonant accelerometer, a frequency shift of 860Hz has been measured for the proof-mass deflection of 4.3${\pm}$0.5$\mu\textrm{m}$; thereby resulting in the detection sensitivity of 1.10${\times}$10$^3$Hz/g. Uncertainty analysis of the resonant frequency output has been performed to identify important issues involved in the design, fabrication and testing of the resonant accelerometer.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.38 no.9
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• pp.605-610
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• 2001

Electrostatic comb-drive microactuators with sub-micron gap were fabricated and tested. We designed and fabricated two type of electrodes which are rectangular and triangular tip. The fabricated microactuators with triangular tip resulted in the electrode gaps in the range of 0.55 ${\mu}{\textrm}{m}$~1.35 ${\mu}{\textrm}{m}$ Displacement of 1 ${\mu}{\textrm}{m}$ and electrostatic force of 2.3 $\mu$N were observed in a triangular-tip microactuator with 0.55 ${\mu}{\textrm}{m}$ gap when a DC drive voltage of 13 volts was applied. Measured 1st resonance frequency of microactuators was about 23 kHz.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1857-1862
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• 2008

Resonant frequency tuning of micro devices is essential to achieve performance uniformity and high sensitivity. Previously reported frequency tuning methods using electrostatic force or mass deposition are not directly applicable to non-conducting polymer devices and have limitations such as dielectric breakdown or low tunable bandwidth. In this paper, thermally frequency-tunable microactuators with poly-dimethylsiloxane membranes are proposed. Permanent and/or nonpermanent frequency tunings are possible using a simple temperature control of the device. Resonant frequency and Q-factor variations of devices according to temperature change were studied using a micro heater and laser Doppler vibrometer. The initial resonant frequencies determined by polymer curing and hardening temperatures are reversibly tuned by thermal cycles. The measured resonant frequency of 9.7 kHz was tuned up by ${\sim}25%$ and Q-factor was increased from 14.5 to 27 as the micro heater voltage increased from 0 to 70 V.

• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1968-1970
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• 1996

We investigate a surface-micromachined polysilicon microgyroscope, whose resonant frequencies are electrostatically-tunable after fabrication. The microgyroscope with two oscillation nudes has been designed so that the resonant frequency in the sensing mode is higher than that in the actuating mode. The microgyroscope has been fabricated by a 4-mask surface-micrormachining process, including the deep RIE of a $6{\mu}m$-thick LPCVD polycrystalline silicon layer. The resonant frequency in the sensing mode has been lowered to that in actuating mode through the adjustment of an inter-plate bias voltage; thereby achieving a frequency matching at 5.8kHz under the bias voltage of 2V in a reduced pressure of 0.1torr. For an input angular rate of $50^{\circ}/sec$, an output signal of 20mV has been measured from the tuned microgyroscope under an AC drive voltage of 2V with a DC bias voltage of 3V.