• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.12
• /
• pp.171-178
• /
• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools (WC) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID (Electrolytic In-process Dressing) technique and the micro tools are fabricated as square shape with the dimension less than 100${\mu}{\textrm}{m}$. With the micro tools on the same machine, characteristics of micro grooving and drilling are evaluated. Also we compare normal micro machining with ultrasonic micro machining on the vibration table. It is confirmed that the developed micro tools are fully applicable to micro grooving, micro drilling and free form cutting.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.508-511
• /
• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools(wc) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID(Electrolytic In-process Dressing) technique and good dimensional accuracy was achieved. Furthermore we researched the characteristics of machining on the micro drilling using micro drills and manufactured micro tools. Finally it is confirmed that manufactured micro tools can be used for micro machining.

• Transactions of Materials Processing
• /
• v.14 no.3 s.75
• /
• pp.251-256
• /
• 2005

3-D micro structures and micro tools were fabricated using Micro Electrical Discharge Machining (MEDM). To make micro structures, micro electrical discharge milling process was applied. During micro electrical discharge milling, electrode (tool) worn in the both axial and radial direction. To compensate tool wear which has significant influence on machining accuracy, machining path overlapping was proposed. Machining characteristics of micro electrical discharge milling was investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools were also fabricated using REDM (reverse electrical discharge machining). Sacrificial electrodes were machined through electrical discharge milling process and were used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' were fabricated. With these complex shaped tools, micro machining was successfully applied repeatedly.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2004.11a
• /
• pp.255-259
• /
• 2004

3-D micro structures and micro tools are fabricated using MEDM (Micro Electric Discharge Machining). To make micro structures, micro electro discharge milling process is applied. During micro electro discharge milling, electrode (tool) wears both axial and radial direction. To compensate tool wear which influences significantly machining accuracy, overlap machining path is proposed. Machining characteristics of micro electro discharge milling is investigated in considering of depth of cut and capacitance of discharge circuit. Micro complex shaped tools are fabricated using REDM (reverse electro discharge machining). Sacrificial electrode is machined through electro discharge milling process and is used as electrode to make micro tools. Using this process several micro tools shape of 'ㄷ', 'ㅁ' and 'o' are fabricated. With these complex shaped tools, micro machining is successfully applied repeatedly.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2001.04a
• /
• pp.858-861
• /
• 2001

As the application fields of micro parts that are micro endo-scope, PDA, and tele-communication had been extended, there are required the micro machine tools and MEMS in order to machining for those parts. In order to machining of the micro parts, the micro machining center is very effective. The micro machining center had some advantages that are lower cost, higher accuracy, and lower required powers than existing machine tools for machining of micro parts. In this study, in order to analyze the machining characteristics and its application possibility of the developing micro machining center with 60,000rpm rotations, 0.1$\mu\textrm{m}$ resolutions, and 80 50 50mm sliding unit, the machining experiment had been executed. In this experimental machining, 0.1~ 0.5mm endmills are used to machining the micro cap and tele-communication's parts. In the future, experimental results will be adapted to the micro-machining center.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.589-592
• /
• 2003

In the machining process of micros shape by using high-precision machining system and micro end-mill, it is important for machining characters of tools to be grasped in order to stably use tools of micro end-mill. In this study. we carried out an analytical experiment of basic machining features by using end-mill tools for the purpose of damage prevention and manufacture of high quality when the tools of micro end-mill are used. This experiment used a micro machining system with high precision and a variety of end-mill tools commercialized from tens to hundreds microns in diameter. To establish an optimal machining condition without tool damage, cutting force was analyzed according to the changes of tool diameter and cutting conditions such as cutting speed. feed rate, depth of cut. And an examination was performed for the shape and surface illumination of machining surface according to the changes of machining conditions. Based on these micro machining conditions, micro square pillar, cylinder shaft. thin wall with high aspect ratio, and micro 3-D structures such as micro gear and fan were manufactured.

• Transactions of Materials Processing
• /
• v.13 no.3
• /
• pp.190-204
• /
• 2004

The objective of this study is to develop a highly accurate micro tool alignment system applicable to the micro machining technology. In a specific application such as micro hole punching, radial clearance between micro tools is order of a few micron. Under this micron scale tool clearance, accuracy of tool alignment is very important for ensuring hole quality. In the present study, a two-way image acquisition system was developed, which can produce overlapped image of both micro tools that face each other, and applied to the tool alignment in the micro punching. Also, to meet alignment accuracy of tools within $1\mu\textrm{m}$, the cross correlation image processing algorithm was employed. With this system, $25\mu\textrm{m}$ punching tools with $1\mu\textrm{m}$ radial clearance could be accurately aligned.

• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.10
• /
• pp.23-30
• /
• 2002

• Journal of the Korean Society for Precision Engineering
• /
• v.22 no.11 s.176
• /
• pp.151-158
• /
• 2005

Micro-machine tool is essential in the micro/meso cutting for the sake of saving of space, resources, and energy. In this research, a micro-turning lathe was fabricated with piezoelectric feed drive mechanism, and motion of each axis was generated by stepwise mechanism with two piezo actuators. The resolution to drive the axis was $0.05{\mu}m$ and position accuracy less than $2{\mu}m$ was assured. From the positioning experiment, piezo feed mechanism is good enough for the micro machine tools. Many fuming experiments were carried out with diamond-cutting tools to evaluate cutting capability of a machine tool. Continuous flow type chip could be obtained even if the cutting speed was very low due to small diameter of workpiece. However, thorough investigation about machineability in micro/meso cutting is inevitable to assure high quality surface roughness in micro machine tool.

• Journal of the Korean Society for Precision Engineering
• /
• v.30 no.3
• /
• pp.284-291
• /
• 2013

Micro cutting of titanium alloy by polycrystalline diamond (PCD) tools was studied. Micro electro discharge machining (MEDM) was used to fabricate customized micro shaping tools from PCD blank. The tool was used to machine micro grooves on Ti alloy and the effects of depth of cut and machining length on tool wear, burr and surface roughness were studied. The shaping tool has cutting edge of a few ${\mu}m$. The crater size of the tool surface was increased with increasing capacitance of EDM machining conditions, which was used to control the surface roughness of the machined micro grooves.