• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.463-467
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• 2004

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated b micro-heater under pulse heating. The valve-less micropump using the diffuser/nozzle is consists of the lower plate, he middle plate, the upper plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive Ion Etching) process. The middle plate includes the chamber and diaphragm d the upper plate is the micro-heater. The Micropump is fabricated by bonding process of the three layer. This paper resented the possibility of the PCR chip operation by the fabricated micropump.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.381-385
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• 2003

This paper presents the fabrication possibility of the micro actuator which uses a micro-thermal bubble, generated by a micro-heater under pulse heating. The micro-actuator is consist of three plate. The lower plate includes the channel and chamber are fabricated on high processability silicon wafer by the DRIE(Deep Reactive ion Etching) process. The middle plate includes the chamber and diaphragm, and the upper plate is the micro-heater. The micro-heater designed non-uniform width and results in periodic generation of stable single bubbles in D.I water. The single bubble appears precisely on the narrow part of the micro-heater and control is recorded.

• Computers and Concrete
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• v.23 no.5
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• pp.361-376
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• 2019

In this research, bending analysis of a micro sandwich skew plate with isotropic core and piezoelectric composite face sheets reinforced by carbon nanotube on the elastic foundations are studied. The classical plate theory (CPT) are used to model micro sandwich skew plate and to apply size dependent effects based on modified strain gradient theory. Eshelby-Mori-Tanaka approach is considered for the effective mechanical properties of the nanocomposite face sheets. The governing equations of equilibrium are derived using minimum principle of total potential energy and then solved by extended Kantorovich method (EKM). The effects of width to thickness ratio and length to width of the sandwich plate, core-to-face sheet thickness ratio, the material length scale parameters, volume fraction of CNT, the angle of skew plate, different boundary conditions and types of cores on the deflection of micro sandwich skew plate are investigated. One of the most important results is the reduction of the deflection by increasing the angle of the micro sandwich skew plate and decreasing the deflection by decreasing the thickness of the structural core. The results of this research can be used in modern construction in the form of reinforced slabs or stiffened plates and also used in construction of bridges, the wing of airplane.

• Smart Structures and Systems
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• v.16 no.1
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• pp.141-162
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• 2015

The magneto-rheological visco-elastomer (MRVE) is used as a smart core to control the stochastic micro-vibration of a sandwich plate with supported mass. The micro-vibration response of the sandwich plate with MRVE core and supported mass under stochastic support motion excitations is studied and compared to evaluate the vibration suppression capability. The effects of the supported mass and localized magnetic field on the stochastic micro-vibration response of the MRVE sandwich plate are taken into account. The dynamic characteristics of the MRVE core in micro-vibration are described by a non-homogeneous complex modulus dependent on vibration frequency and controllable by applied magnetic fields. The partial differential equations for the coupled transverse and longitudinal motions of the MRVE sandwich plate with supported mass are derived from the dynamic equilibrium, constitutive and geometric relations. The simplified ordinary differential equations are obtained for the transverse vibration of the MRVE sandwich plate under localized magnetic fields. A frequency-domain solution method for the stochastic micro-vibration response of sandwich plates with supported mass is developed based on the Galerkin method and random vibration theory. The expressions of frequency-response functions, response power spectral densities and root-mean-square velocity responses of the plate in terms of the one-third octave frequency band are obtained for micro-vibration evaluation. Finally, numerical results are given to illustrate the large response reduction capacity of the MRVE sandwich plate with supported mass under stochastic support motion excitations, and the influences of MRVE parameters, supported mass and localized magnetic field placement on the micro-vibration response.

• Proceedings of the KIEE Conference
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• 2001.07c
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• pp.1881-1883
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• 2001

We manufactured a micro CPL by LlGA process, a new conceptual ultra-fine and precise forming method, using X-ray lithography process. We fabricated a BN X-ray mask having properties of good X-ray transmittance and large mechanical strength. Micro CPL was manufactured by dividing into an upper plate and a low plate. Each of plates was bonded by Ag paste screen printing. The upper plate was fabricated on glass wafer to observe flow and phase transformation of cooling solution. The lower plate was manufactured by Cu electroplating for good heat transmission. Precision of inner Parts, micro pin and micro channel, of manufactured micro CPL is under ${\pm}2{\mu}m$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.371-376
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• 1997

A 100*100.mu.m$^{2}$ aluminum micro mirror is designed and fabricated using a thick photoresist as a sacrificial layer andas a mold for nickel electroplating. The micro mirror is composed of aluminum mirror plate, two nickel support posts, two aluminum hinges, two address eletrodes, and two landing electrodes. The aluminum mirror plate,which is supported by two nickel support posts, is overhung about 10.mu.m from the silicon substrate. THe aluminum mirror plate is actuated like a seesaw by electrostatic force generated by electic potential difference applied between the mirror plate and the address electrode. This paper presents some methods to measure the optical and the dynamic characteristics of the fabricated micro mirror.

• Steel and Composite Structures
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• v.33 no.4
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• pp.509-523
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• 2019

In the present work, the buckling analysis of micro sandwich plate with an isotropic/orthotropic cores and piezoelectric/polymeric nanocomposite face sheets is studied. In this research, two cases for core of micro sandwich plate is considered that involve five isotropic Devineycell materials (H30, H45, H60, H100 and H200) and an orthotropic material also two cases for facesheets of micro sandwich plate is illustrated that include piezoelectric layers reinforced by carbon and boron-nitride nanotubes and polymeric matrix reinforced by carbon nanotubes under temperature-dependent and hydro material properties on the elastic foundations. The first order shear deformation theory (FSDT) is adopted to model micro sandwich plate and to apply size dependent effects from modified strain gradient theory. The governing equations are derived using the minimum total potential energy principle and then solved by analytical method. Also, the effects of different parameters such as size dependent, side ratio, volume fraction, various material properties for cores and facesheets and temperature and humidity changes on the dimensionless critical buckling load are investigated. It is shown from the results that the dimensionless critical buckling load for boron nitride nanotube is lower than that of for carbon nanotube. It is illustrated that the dimensionless critical buckling load for Devineycell H200 is highest and lowest for H30. Also, the obtained results for micro sandwich plate with piezoelectric facesheets reinforced by carbon nanotubes (case b) is higher than other states (cases a and c).The results of this research can be used in aircraft, automotive, shipbuilding industries and biomedicine.

• Advances in nano research
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• v.7 no.6
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• pp.405-417
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• 2019

This research is devoted to study post-buckling analysis of functionally graded carbon nanotubes reinforced composite (FG-CNTRC) micro plate with cut out subjected to magnetic field and resting on elastic medium. The basic formulation of plate is based on first order shear deformation theory (FSDT) and the material properties of FG-CNTRCs are presumed to be changed through the thickness direction, and are assumed based on rule of mixture; moreover, nonlocal Eringen's theory is applied to consider the size-dependent effect. It is considered that the system is embedded in elastic medium and subjected to longitudinal magnetic field. Energy approach, domain decomposition and Rayleigh-Ritz methods in conjunction with Newton-Raphson iterative technique are employed to trace the post-buckling paths of FG-CNTRC micro cut out plate. The influence of some important parameters such as small scale effect, cut out dimension, different types of FG distributions of CNTs, volume fraction of CNTs, aspect ratio of plate, magnitude of magnetic field, elastic medium and biaxial load on the post-buckling behavior of system are calculated. With respect to results, it is concluded that the aspect ratio and length of square cut out have negative effect on post-buckling response of micro composite plate. Furthermore, existence of CNTs in system causes improvement in the post-buckling behavior of plate and different distributions of CNTs in plate have diverse response. Meanwhile, nonlocal parameter and biaxial compression load on the plate has negative effect on post-buckling response. In addition, imposing magnetic field increases the post-buckling load of the microstructure.

• Design & Manufacturing
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• v.2 no.4
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• pp.48-53
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• 2008

We injection molded a thin type of plate and wedge type of plate with micro prizm patterns on its surface and investigated the fidelity of replication of the micro pattern depending on the process parameter such as mold temperature, melt temperature, injection rate or packing pressure. The size of the $90^{\circ}$ prizm pattern is $50{\mu}m$ and the size of the plate is about $335mm{\times}213mm$ and $400mm{\times}400mm$. The thicknesses are 2.6mm and 0.7mm at each edge of the wedge type of plate and 1mm at each edge of the thin type of plate. The fidelity of the replication turned out quite different according to the process parameters and location of the patterns on the plate. We measured the cavity pressure and temperature in real-time during the molding to analyze the effect of the local melt pressure and temperature on the micro pattern replication.

• Computers and Concrete
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• v.24 no.3
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• pp.185-192
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• 2019

In this paper, the buckling of micro sandwich hollow circular plate is investigated with the consideration of the porous core and piezoelectric layer reinforced by functionally graded (FG)carbon nano-tube. For modeling the displacement field of sandwich hollow circular plate, the high-order shear deformation theory (HSDT) of plate and modified couple stress theory (MCST) are used. The governing differential equations of the system can be derived using the principle of minimum potential energy and Maxwell's equation that for solving these equations, the Ritz method is employed. The results of this research indicate the influence of various parameters such as porous coefficients, small length scale parameter, distribution of carbon nano-tube in piezoelectric layers and temperature on critical buckling load. The purpose of this research is to show the effect of physical parameters on the critical buckling load of micro sandwich plate and then optimize these parameters to design structures with the best efficiency. The results of this research can be used for optimization of micro-structures and manufacturing different structure in aircraft and aerospace.