• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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• pp.981-984
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• 2004

We have studied a printability of synthesized silver nano solon ITO glass substrate. The highly concentrated polymeric dispersant-assisted silver nano sol was prepared by variation of molecular weight and control of initial nucleation and growth of silver nanoparticles, to achive dispersion stability and controlling the size of silver nanoparticles. The synthesized silver nano-sol was tested for printability to explore the possibility of micro-electrodes patterning on ITO glass substrate. The silver micro-electrode with 50${\sim}100{\mu}m$ line width was formed on ITO glass substrate.

• 한국기계가공학회지
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• 제8권3호
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• pp.1-6
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• 2009

This paper presents a geometrical error compensation of tool alignment for sharp edge bite on B axis controlled machine. In precision micro patterning, bite alignment is crucial parameter for machined surface. To decrease bite alignment error, plus tilted bite from B axis center is touched to reference work piece(pin gauge) and checked the deviation from original position. Same process is repeated for maximum touch deviation value. From this touched position value, wheel alignment error in X axis and Z axis can be calculated on B axis center. Experimental results show that this compensation method is efficient to correct sharp edge bite alignment.

• Design & Manufacturing
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• 제2권1호
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• pp.45-50
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• 2008

Micro channel is to fabricate desired pattern on the polymer substrate by pressing the patterned mold against the substrate which is heated above the glass transition temperature, and it is a high throughput fabrication method for bio chip, optical microstructure, etc. due to the simultaneous large area patterning. However, the bad pattern fidelity in large area patterning is one of the obstacles to applying the hot embossing technology for mass production. In the present study, stamper of cross channel with width $100{\mu}m$ and height $50{\mu}m$ was manufactured using UV-LiGA process. Micro channel was manufactured using stamper manufactured in this study. Also replicability appliance was evaluated for micro channel and factors affected replicability were investigated using Taguchi method.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권2호
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• pp.93-99
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• 2006

In this paper, we fabricated and evaluated polydimethylsiloxane(PDMS)-based flexible and implantable micro electrodes. The electrode patterning was carried out with the photolithography and chemical etching process after e-beam evaporation of 100 ATi and 1000 A Au. The PDMS substrate was treated by oxygen plasma using reactive ion etching(RIE) system to improve the adhesiveness of PDMS and metal layers. The minimum line width of fabricated micro electrode was 20 $\mu$m. After finished patterning, we did packaging with PDMS and then brought up the electrode's part about 40 $\mu$m with gold electroplating. The Hank's balanced salt solution(HBSS) test was carried out for 6 month for endurance of fabricated micro electrode. We carried out in-vivo test for the evaluation of biocompatibility by implanting electrodes under the ICR mouse skin for 42 days.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.395-400
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• 2005

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin damaged layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The damaged layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• 한국정밀공학회지
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• 제23권8호
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• pp.39-46
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• 2006

Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip, allowing the formation of damaged layer on silicon substrate by a simple scratching process, has been applied instead of conventional silicon cantilever for scanning. A thin mask layer forms in the substrate at the diamond tip-sample junction along scanning path of the tip. The mask layer withstands against wet chemical etching in aqueous KOH solution. Diamond tip acts as a patterning tool like mask film for lithography process. Hence these sequential processes, called tribo-nanolithography, TNL, can fabricate 2D or 3D micro structures in nanometer range. This study demonstrates the novel fabrication processes of the micro cantilever and diamond tip as a tool for TNL using micro-patterning, wet chemical etching and CVD. The developed TNL tools show outstanding machinability against single crystal silicon wafer. Hence, they are expected to have a possibility for industrial applications as a micro-to-nano machining tool.

• 한국광학회지
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• 제16권2호
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• pp.113-120
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• 2005

LCD-BLU(liquid crystal device-back light unit)에 사용되는 도광판의 미세 산란패턴을 만드는 새로운 방법으로서, 실리콘 웨이퍼의 비등방 식각에 의해 자연적으로 형성되는 3차원 결정면 구조를 이용하는 방법을 제안하였다. 실리콘 3차원 결정면을 갖는 도광판과 프리즘 시트의 원판을 설계 및 제작하였고, casting 공정을 통해 PDMS 재질로 복제된 도광판을 제작하여 특성을 분석하였다. 측정 결과, 기존 인쇄형 도광판에 비해 실리콘피라미드 패턴의 도광판이 $10\%$ 증가된 정면 휘도 효율을 가질 수 있음을 실험적으로 검증하였다.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.658-659
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• 2008

Numerical simulation is performed for a microdroplet deposition on the pre-patterned micro-structure. The liquid-air interface is tracked by level set method improved by incorporating the ghost fluid approach based on a sharp-interface representation. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to overcome the patterning error.

• 대한기계학회논문집B
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• 제33권1호
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• pp.28-38
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• 2009

Numerical simulation is performed for microdroplet deposition on a pre-patterned micro-structure. The liquid-air interface is tracked by a level-set method, which is improved by incorporating a sharp-interface modeling technique for accurately enforcing the matching conditions at the liquid-gas interface and the no-slip condition at the fluid-solid interface. The method is further extended to treat the contact angle condition at an immersed solid surface. The present computation of a patterning process using microdroplet ejection demonstrates that the multiphase characteristics between the liquid-gas-solid phases can be used to improve the patterning accuracy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.257-258
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• 2010