• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.11
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• pp.840-848
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• 2009

In the boiling heat transfer mechanism, CHF(critical heat flux) is the significantly important parameter of the system. So, many researchers have been struggling to enhance the CHF of the system in enormous methods. Recently, there were lots of researches about enormous CHF enhancement with the nanofluids. In that, the pool boiling CHF in nanofluids has the significantly increased value compared to that in pure water because of the deposition of the nanoparticle on the heater surface in the nanofluids. The aim of this study is the comparison of the effect of the nanoparticle deposited surface and the modified surface which has the similar morphology and made by MEMS fabrication. The nanoparticle deposited surface has the complex structures in nano-micro scale. Therefore, we fabricated the surfaces which has the similar wettability and coated with the micro size post and nano structure. The experiment is performed in 3 cases : the bare surface with 0.002% water-ZnO nanofluids, the nanoparticle deposited surface with pure water and the new fabricated surface with pure water. The contact angle, a representative parameter of the wettability, of the all 3 cases has the similar value about 0 and the SEM(scanning electron microscope) images of the surfaces show the complex nano-micro structure. From the pool boiling experiment of the each case, the nanoparticle deposited surface with pure water and the fabricated surface with pure water has the almost same CHF value. In other words, the CHF enhancement of the nanoparticle deposited surface is the surface effect. It also shows that the new fabricated surface follows the nanoparticle deposited surface well.

• Current Applied Physics
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• v.18 no.11
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• pp.1320-1326
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• 2018

High crystalline quality CrN thin films have been grown on $La_{0.67}Sr_{0.33}MnO_3$ (LSMO) templates by molecular beam epitaxy. The structure and magnetic properties of CrN/LSMO heterojunctions are investigated combining with the experiments and the first-principles simulation. The N?el temperature of the CrN/LSMO samples is found to be 281 K and the saturation magnetization of CrN/LSMO increases compared to that of LSMO templates. The magnetic property of CrN/LSMO heterostructures mainly comes from Cr atoms of (001) CrN and Mn atoms of (001) LSMO. The (001) LSMO induces and couples the spin of the CrN sublattice at CrN/LSMO interface.

• Transactions of Materials Processing
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• v.13 no.3
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• pp.242-247
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• 2004

Literature review on reliability test method for developing high performance optical/thermofluidic components. Since the miniaturization by the conventional mechanical process is limited to milli-structure, i.e. $10^{-3}m$, new technology for fabricating of mechanical components is needed to match cost, reliability, and integrability criteria of micro-structure. Although numbers of various researches on MEMS/MOEMS devices and components, including material characterization, design and optimization, system validation, etc., the lack of standards and specifications make the researches and developments difficult. For that reason, this paper is intended to propose the methods of reliability test for measuring the mechanical property of optical/ thermofluidic components.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.12
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• pp.1117-1123
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• 2005

In this study, our varistors based on M. Matsuoka's composition were fabricated with ZnO nano-powder whose sizes were 50 nm and 100 nm. Before fabrication of ZnO nano-powder varistors, structure and Phase were analyzed by FE-SEM and XRD with size of ZnO nano-powders to obtain manufacturing information to fabricate the first ZnO varistors using by nano-powders. As a results of these analyses, calcination and sintering temperatures were respectively designed at $600^{\circ}C\;and\;1050^{\circ}C$. ZnO nano-powder varistors were analyzed by SEM and XRD to measure the changes of microstructures and phase after sintered by out process conditions. Also, electrical properties of ZnO nano-powder varistors were obtained by capacitance-voltage, frequency-teal impedance, and current-voltage corves. Our ZnO nano-powder varistors had about 2.5 times of electric field at varistor voltage as compared with normal ZnO varistors fabricated with micro-powder. Also, leakage current and non-liner coefficient respectively had $2.0{\times}10^{-6}A/cm^{-2}$ and 41 for ZnO nano-powder varistors with 50 nm.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.223-228
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• 2004

Miniaturization is the central theme in modern fabrication technology. Many of the components used in modern products are becoming smaller and smaller. The direct write FIB technology has several advantages over contemporary micromachining technology, including better feature resolution with low lateral scattering and capability of maskless fabrication. Therefore, the application of FIB technology in micro fabrication has become increasingly popular. In recent model of FIB, however the feeding system has been a very coarse resolution of about a few $\mu\;\textrm{m}$. It is not unsuitable to the sputtering and the deposition to make the high-precision structure in micro or macro scale. Our research is the development of nano stage of 200mm strokes and 10nm resolutions. Also, this stage should be effectively operating in ultra high vacuum of about $1\times10^{-7}$ torr. This paper presents the concept of nano stages and the discussion of the material treatment for ultra high vacuum.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.777-782
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• 2011

Micro features on the surface are well-known to have significant effects on optical or mechanical properties such as the optical interference, reflectance at the surface, contact angle, interfacial friction, etc. These surface micro features are increasingly employed to enhance the functionality of the applications in various application areas such as optical components for LCD or solar panel. Diverse surface features have been proposed and some of them are showing excellent efficiency or functionality, especially in optical applications. Most applications employing the micro features need manufacturing process for mass production and the injection molding and roll-to-roll forming, which are typical processes for mass production adopting polymeric materials, may be also preferred for micro patterned plastic product. Since the functionality or efficiency of the surface structures generally depends on the shape and the size of the structure itself or the array of the structures on the surface, it would be very important to replicate the features very precisely as being designed during the molding the micro pattern applications. In this paper, a series of research activities is introduced for roll-to-roll forming of micro patterned film including filling of patterns with UV curable resin, demolding of surface structures from the roll tool, control of surface energy and cure shrinkage of resin and dispose time and intensity of the UV light for curing of UV curable resin.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.519-520
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• 2012

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.233.1-233.1
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• 2005

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.101-102
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• 2012

• Journal of Aerospace System Engineering
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• v.9 no.2
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• pp.13-18
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• 2015

Micro planar type liquid propellant thruster was fabricated by MEMS manufacturing process for micro/nano satellites applications. 90 wt.% hydrogen peroxide was used as propellant and for propellant decomposition, Pt/Al2O3 was used as catalyst. Micro thruster structure was made by 5 photosensitive glasses patterned with thruster component profiles. Objective thrust was 50 mN and required hydrogen peroxide mass flow was 2.1 ml/min, which was supplied by syringe pump and teflon tube in experimental test. Performance test said that average steady thrust was approximately 30 mN, around 60% of objective thrust, and transient time was about 5 sec. It is estimated that extended response time was due to high thermal energy loss of micro scale thruster and low enthalpy input by propellant mass flow.