• 한국재료학회지
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• 제5권2호
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• pp.208-214
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• 1995

콘택 홀 패턴의 미세화가 HF 용액의 침투에 미치는 영향을 파악하고자, 미세 채널 패턴에서의 산화막 습식 식각 특성을 조사하였다. LPCVD로 증착된 산화막을 두께 0.1~1$\mu\textrm{m}$, 선폭 0.1~20$\mu\textrm{m}$, 그리고 초기 깊이 ~1.2$\mu\textrm{m}$ 범위의 질화막으로 둘러 쌓인 미세 채널 패터으로 제작한 후, HF용액에 의한 산화막의 식각속도를 관찰하였다. 실험 결과로써, 크기가 $0.1 \times 0.1 \mu \textrm{m}^{2} 초기 깊이가 1.2$\mu\textrm{m}$인 고종횡비(~12)의 초미세 패턴에서도 식각 속도가 일정함을 볼 수 있어서, 콘택 홀 패턴의 미세화에 관계없이 반응액의 침투가 원활하게 이루어짐을 알 수 있었다.

• 대한기계학회논문집B
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• 제30권6호
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• pp.553-559
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• 2006

Most diesel injector, which is currently used in high-pressure common rail fuel injection system of diesel engine, is driven by the solenoid coil energy for its needle movement. The main disadvantage of this solenoid-driven injector is a high power consumption, high power loss through solenoid coil and relatively fixed needle response's problem. In this study, a prototype piezo-driven injector, as a new injector mechanism driven by piezoelectric energy based on the concept of inverse piezo-electric effect, has been designed and fabricated to know the effect of piezo-driven injection processes on the diesel spray structure and internal nozzle flow. Firstly we investigated the spray characteristics in a constant volume chamber pressurized by nitrogen gas using the back diffusion light illumination method for high-speed temporal photography and also analyzed the inside nozzle flow by a fully transient simulation with cavitation model using VOF(volume of fraction) method. The numerical calculation has been performed to simulate the cavitating flow of 3-dimensional real size single hole nozzle along the injection duration. Results were compared between a conventional solenoid-driven injector and piezo-driven injector, both equipped with the same micro-sac multi-hole injection nozzle. The experimental results show that the piezo-driven injector has short injection delay and a faster spray development and produces higher injection velocity than the solenoid-driven injector. And the predicted simulation results with the degree of cavitation's generation inside nozzle for faster needle response In a piezo-driven injector were reflected to spray development in agreement with the experimental spray images.

• 대한기계학회논문집A
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• 제34권11호
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• pp.1765-1771
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• 2010

MEMS 소자의 공정에서 가공된 비아 홀 품질은 소자의 성능에 가장 중요한 요소의 하나이다. Nd:$YVO_4$ 레이저로 가공한 비아 홀에 대한 레이저 미세가공의 일반적인 특징을 설명하고 그것의 측정에 대한 효율적인 최적화 방법을 소개한다. 본 논문의 최적화 방법은 직교다항식, 분산분석과 반응표면최적화는 최적 레이저 공정변수를 결정하고 주요 영향을 이해하는데 사용된다. 유의한 레이저 공정변수를 확인하고 이의 비아 홀 품질에 관한 영향을 고찰하였다. 레이저 공정변수의 최적 수준을 가지는 확인 실험은 최적화 방법의 유효성을 설명하기 위해 수행하였다.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2002년도 봄 학술발표회 논문집
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• pp.751-758
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• 2002

Boreholes that are drilled in soft or unconsolidated materials such as gravels and coals are prone to collapse. To maintain the hole, some kinds of casing pipes are needed. If thereby a plastic pipe e.g. PVC is used for the casing, Televiewer tool is still capable of detecting structural features such as fractures in the borehole wall behind the pipe, whereas other borehole-imaging logging devices such as BIPS (Borehole Image Processing System) and FMS(Formation Micro Scanner) won't provide any information about that. Televiewer's primary component is a piezoelectric transducer centered in the hole. It acts as both a transmitter and receiver, and sends an ultrasonic beam. That is reflected, in the same manner as the seismic wave propagation, from the both sides(inner and outer surfaces) of the casing pipe, transmits through the pipe and then reflected from the borehole wall. With an appropriate choice of time-windowing, it is possible to capture the returning signals from both the borehole wall and the outer side of casing pipe as well. A suite of laboratory tests were performed on various physical models composed of plastic pipes with different diameters. Although the amplitudes of returning signals were reduced to about half the usual value due to the transmission loss, the dynamic range of Televiewer tool was sufficient to observe the structural features behind the casing pipe. Besides, several representative case studies at various research areas in our country are presented. The results demonstrate the usefulness of the transmissivity of Televiewer acoustic km, which will assist in further structural interpretation.

• Smart Structures and Systems
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• 제4권6호
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• pp.727-740
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• 2008

A down hole vertical seismic array is a sequence of instruments installed at various depths in the earth to record the ground motion at multiple points during an earthquake. Numerous studies demonstrate the unique utility of vertical seismic arrays for studying in situ site response and soil behavior. Examples are given of analyses made at two sites to show the value of data from vertical seismic arrays. The sites examined are the Lotung, Taiwan SMART1 array and a new site installed at Jingliao, Taiwan. Details of the installation of the Jingliao array are given. ARX models are theoretically the correct process models for vertical wave propagation in the layered earth, and are used to linearly map deeper sensor input signals to shallower sensor output signals. An example of Event 16 at the Lotung array is given. This same data, when examined in detail with a Bayesian inference model, can also be explained by nonlinear filters yielding commonly accepted soil degradation curves. Results from applying an ARMAX model to data from the Jingliao vertical seismic array are presented. Estimates of inter-transducer soil increment resonant frequency, shear modulus, and damping ratio are presented. The shear modulus varied from 50 to 150 MPa, and damping ratio between 8% and 15%. A new hardware monitoring system - TerraScope - is an affordable 4-D down-hole seismic monitoring system based on independent, microprocessor-controlled sensor Pods. The Pods are nominally 50 mm in diameter, and about 120 mm long. An internal 16-bit micro-controller oversees all aspects of instrumentation, eight programmable gain amplifiers, and local signal storage.

• 한국세라믹학회지
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• 제47권6호
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• pp.498-502
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• 2010

Aluminium titanate($Al_2TiO_5$) has extremely anisotropic thermal expansion properties in single crystals, and polycrystalline material spontaneously microcracks in the cooling step after sintering process. These fine intergranular cracks limit the strength of the material, but provide an effective mechanism for absorbing strain energy during thermal shock and preventing catastrophic crack propagation. Furthermore, since machinable BN-ceramics used as an insulating substrate in current micro-electronic industry are very expensive, the development of new low-cost machinable substrate ceramics are consistently required. Therefore, cheap $Al_2TiO_5$-machinable ceramics was studied for the replacement of BN ceramics. $Al_2O_3-Al_2TiO_5$ ceramic composite was fabricated via in-situ reaction sintering. $Al_2O_3$ and $TiO_2$ powders were mixed with various mol-ratio and sintered at 1400 to $1600^{\circ}C$ for 1 h. Density, hardness and strength of sintered ceramics were systematically measured. Phase analysis and microstructures were observed by XRD and SEM, respectively. Machinability of each specimens was tested by micro-hole machining. The results of research showed that the $Al_2TiO_5$-composites could be used for low-cost machinable ceramics.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.251-251
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• 2012

A lot of studies are undergoing on the magneto-optical (MO) properties of patterned magnetic systems for the reason that they have potential application to information technology such as ultrahigh-speed computing. Moreover, they can be considered as the future candidates for high-density MO storage devices. Not only the technical aspects, but there have been also tremendous interests in studying their properties related to the fundamental physics. The MO Kerr-rotation effects (both in reflected and the diffracted modes) and the magnetic force microscopy (MFM) are very useful techniques to investigate the micromagnetic properties of such periodic structures. Hence, in this study, we report on the MO properties of bilayered Cobalt (Co)/ nickel (Ni) micro-patterned anti-dot arrays. Such a ferromagnetic structure was made by sequentially depositing co (40 nm)/Ni (5 nm) bilayer on a Si substrate. The anti-dot patterning with hole diameter of $1{\mu}m$ was done only on the upper Co layer using photolithography technique, while the Ni underlayer was kept uniform. The longitudinal Kerr rotation (LKR) of the zeroth- and the first-order diffracted beams were measured at an incidence of $30^{\circ}$ by using a photoelastic modulator method. The external magnetic field was applied perpendicularly to the reflected and the diffracted beams using an electromagnet capable of a maximum field of ${\pm}5$ kOe. Significantly, it was observed that the LKR of the first-order diffracted beam is nearly 4 times larger than that of the zeroth-order beam. The simulated results for the hysteresis loops matched qualitatively well with the experimentally obtained ones. In conjunction with the LKR, we also investigated the magnetic-domain structure by using a MFM system, which were analyzed to elucidate the origin of the enhanced MO rotation.

• 한국세라믹학회지
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• 제49권6호
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• pp.581-585
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• 2012

Machinability is important in engineering applications, especially in the current micro-electronics industry. Most ceramic components have complex shapes and hence require machining generally with diamond tools, which incurs a high production cost. Recently, h-BN-containing machinable ceramics have been developed, but these materials are very expensive due to the high raw materials and production costs. Therefore, the development of low-cost machinable ceramics is necessary. In this study, inexpensive $Al_2TiO_5$ was studied as a replacement for h-BN. $Al_2O_3$, $TiO_2$ and partially stabilized $ZrO_2$(PSZ) powders were mixed with various mole ratios and were sintered at $1500^{\circ}C$ for 1 h. The density, hardness and strength were then measured. The phase analysis and microstructures were observed by XRD and SEM, respectively. The machinability of each specimen was tested by micro-hole machining. The results of this research showed that the produced composites could be used as low-cost machinable ceramics.

• 전기전자학회논문지
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• 제23권3호
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• pp.947-953
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• 2019

본 연구는 가시광선, 적외선, 자외선 등이 대기 중의 물리입자에 의해 산란되는 빛(광자)을 받아서 발생하는 전하(전자 전공 쌍)를 집적하여 전압신호로 변환 및 증폭하는 전치증폭단과, 증폭된 신호의 파형을 semi-gaussian으로 보정하는 파형보정기 및 신호의 크기를 임의의 기준전압과 비교하여 신호 크기에 따른 펄스를 2진수 디지털 신호로 출력시키는 비교기와 계수기를 포함하는 물리입자 검출용 ASIC 칩 설계에 관한 것이다. 본 연구에서 제안한 구조 및 기능 블록을 갖는 ASIC은 Global Foundries의 0.18um standard CMOS 공정 변수를 사용하여 설계하였으며, 동 공정을 이용하여 칩을 제작하여 동작 및 성능을 검증 확인하였다.

• Smart Structures and Systems
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• 제29권3호
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• pp.445-455
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• 2022

Steel anchor bolts are installed in concrete using a variety of methods. One of the most common methods of anchor bolt installation is using epoxy resin as an infill material injected into the drilled hole to act as a bonding material between the steel bolt and the surrounding concrete. Typical design standards assume uniform stress distribution along the length of the anchor bolt accompanied with single crack leading to pull-out failure. Experimental evidence has shown that the steel anchor bolts fail owing to the multiple failure patterns, hence these design assumptions are not realistic. In this regard, the presented research work details the analytical model that takes into consideration multiple micro cracks in the infill material induced via impact loading. The impact loading from the Schmidt hammer is used to evaluate the bond condition bond condition of anchor bolt and the epoxy material. The added advantage of the presented analytical model is that it is able to take into account the various type of end conditions of the anchor bolts such as bent or U-shaped anchors. Through sensitivity analysis the optimum stiffness and shear strength properties of the epoxy infill material is achieved, which have shown to achieve lower displacement coupled with reduced damage to the surrounding concrete. The accuracy of the presented model is confirmed by comparing the simulated deformational responses with the experimental evidence. From the comparison it was found that the model was successful in simulating the experimental results. The proposed model can be adopted by professionals interested in predicting and controlling the deformational response of anchor bolts.