• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3322-3324
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• 1999

This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to $30({\pm}15){\mu}m$ and high resolution less than 0.01f1l1l in each direction. Experimented resonant frequency of this actuator is 630Hz. The micro-Fresnel lens is fabricated on the square-shape glass structure prepared in the center of actuator.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.11b
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• pp.791-798
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• 2001

As the form factor of the disk drive is decreased, many mechanical issues that are negligible in larger form factors, should be considered for the design of the miniature drives. This paper deals with basic research on vibration characteristics and design considerations of small disks and actuators. The natural frequencies of micro-sized disks with polycabonate and glass substrates are experimentally measured, being compared to FEM results. In order to investigate the effects of rotating speeds, airflow and disk size on power consumption. we measure power imposed to spindle motor when different optical disks are spins in vacuum chamber. Finally, The vibration characteristics of the micro actuator used in a IBM Microdrive are experimentally studied for the application to the basic design of micro optical disks.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.41 no.5
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• pp.474-482
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• 1992

This paper describes the speed control system of an induction type ac servomotor drive on the vector control basis of slip frequency and constant secondary flux control for a quick torque response. The system is composed of a digital controller using a SCB-V50 microprocessor and a PWM inverter with power MOSFETs for high speed switching. And, for the measurement of actual instantaneous currents, MDCS A070-051 hall sensors are employed. The rising time of step responce by this system through the test of a 600[W] ac servomotor is 30[ms]. Overall experimental result shows that the drive performance of the system is similar to that of a separately excited armature current control of a dc motior.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2001.06a
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• pp.122-126
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• 2001

Magnetic hard disk drive is continually being pushed to reduce head-disk spacing for higher recording densities. The current minimum spacing between the air-bearing slider and disk has been reduced to under 15 nm. In this work, it was investigated if flying height could be lowered under the height of laser bumps. With the reduction of the spinning speed, the flying height was decreased under the height of laser bumps. When a head swept between landing zone and data zone, the head-disk impact was monitored using AE and friction signals. It is demonstrated that magnetic hard disk drive could be operated without tribological failures under the height of laser bumps.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.591-592
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• 2008

• Proceedings of the KIPE Conference
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• 2001.12a
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• pp.190-193
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• 2001

This paper describes the reduction of vibration and position error of Linear Pulse Motor(LPM) with the control method of PWM duty ratio by using Motion Controller in LPM. The LPM is operated on micro-stepping drive, that the linear scale is sequently returned the position signals of a micro-meter And next micro-step is controlled with the scale factor when position error is occurred. The scale factor is experimently acquired.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1806-1809
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• 2008

Study that form micro pattern by direct ink jet printing method is getting attention recently. Direct ink jet printing spout fine droplet including nano metal particle by force or air pressure. There is reason which ink jet printing method is profitable especially in a various micro-patterning technology. It can embody patterns directly without complex process such as mask manufacture or screen-printing for existent lithography. In this study, research of a technology that ejects fine droplet form of Pico liter and forms metal micro pattern was carried with inkjet head of piezoelectricity drive system. Droplet established pattern while ejecting consecutively and move on the surface at the fixed speed. Patterns formed in ink are mixed with organic solvent and polymer that act as binder. So added thermal hardening process after evaporate organic solvent at isothermal after printing. I executed high frequency special quality estimation of CPW transmission line to confirm electrical property of manufactured circuit board. We tried a large area printing to confirm application possibility of an ink jet technology.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.6
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• pp.410-420
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• 2016

The geometric dimension and shape of microchannels that are formed during surface texturing are widely studied for applications in flow control, and drag and friction reduction. In this research, a new method for controlling the deformation of U channels during micro-rolling-based surface texturing was developed. Since the width of the U channels is almost constant, controlling the depth is essential. A calibration procedure of initial rolling gap, and proportional-integral PI controllers and a linear interpolation have been applied simultaneously to control the depth. The PI controllers drive the position of the pre-U grooved roll as well as the rolling gap. The relationship between the channel depth and rolling gap is linearized to create a feedback signal in the depth control system. The depth of micro channels is studied on A2021 aluminum lamina surfaces. Overall, the experimental results demonstrated the feasibility of the method for controlling the depth of microchannels.

• Journal of Institute of Convergence Technology
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• v.1 no.2
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• pp.6-15
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• 2011

This paper reports the design and fabrication of a micro-electro-mechanical-system(MEMS)-based electrostatic angular microactuator for a dual-stage servo. The proposed actuator employs a novel electrode pattern named "skewed electrode array(SEA)" scheme. It is shown that SEA has better linearity than a parallel plate type actuator and stronger force than a comb-drive based actuator. The moving and the fixed electrodes are arranged to make the driving force perpendicular to the rotating moment of arm. By changing the electrode overlap length, the magnitude of electrostatic force and stable displacement will be changed. In order to optimize the design, an electrostatic FE analysis was carried out and an empirical force model was established for SEA. A new assembly method which will allow the active electrodes to be located beneath the slider was developed. The active electrodes are connected by inner and outer rings lifted on the base substrate, and the inner and outer rings are connected to platform on which the slider locates. Electrostatic force between active electrodes and platform can be used for exiting out of plane modes, so this provides the possibility of the flying height control. A microactuator that can position the pico-slider over ${\pm}0.5{\mu}m$ using under 20 volts for a 2 kHz fine-tracking servo was designed and fabricated using SoG process.

• Journal of Power System Engineering
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• v.17 no.2
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• pp.38-45
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• 2013

In this study, for carrying out the spray and combustion experiment using a Common Rail Direct Injection(CRDI) system, the controller was fabricated to drive a high speed camera, a injector and a laser beam sequentially at a low cost. CB280 module of one-chip micro processer was used for the controller. In order to confirm responsibility and utility of the controller, the current drive performance, the spray behavior and the injection rate were tested and analyzed under various experimental conditions. As this research results, we found that the fabricated controller was able to control the devices for the spray experiment precisely with the input value in program and it had the dynamic load responsibility and repetition. Also, we found that the injection rates of our experimental results were higher than those of others at the same injection pressure and the controller connected with the laser system and the data acquisition system had validity for carrying out the spray visualization experiment.