• 제목/요약/키워드: micro-contact method

검색결과 224건 처리시간 0.034초

다층 박막의 온도상승에 대한 마이크로 트라이볼로지적 조사 (Micro-Tribological Investigation for Temperature Rise in Multi-layered Thin Films)

  • 김준현;신경호
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2000년도 춘계학술대회논문집A
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    • pp.760-765
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    • 2000
  • The study deals with the development of a computational procedure for evaluating the temperature rise in dry and lubricated multi-layered contacts of head/disk interface. A transient computational model with a transformed rectangular computational domain is utilized. A model and a computational method for micro-contact with sub-lubricated zone, including friction heat generation, have been presented. The model was applied, taking full account of the changes in contact area and contact load due to frictional heating. The computational distribution of temperature is obtained with the analytical findings for various composition and contact conditions. Especially, a rapid rise ($220^{\circ}C$ or above) in read head temperature lese to a saturation in the influence of a thermal spike on signal performance. This general class of problems can be treated provided that heat generation distribution and layer properties are known.

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비접촉식 평면구동기의 동특성해석 (Dynamic Analysis of the Contact-free Surface Actuator)

  • 이상헌;백윤수
    • 한국소음진동공학회논문집
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    • 제13권9호
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    • pp.663-670
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    • 2003
  • As the micro-technologies in the high precision manufacturing processes are developed, the demand for micro actuating device is increasing. But, it is difficult to achieve high resolution and wide operating range simultaneously with the conventional actuating systems which are contacting and type of dual servo system. So, the contact-free surface actuators whose movers are suspended or levitated were proposed. These systems can be applied to high precision stages and alignment apparatuses. The suspended mover can be assumed to be rigid body, but the mover is a structure in this study, therefore the vibration caused during the operating process has a serious adverse effect on the performance and it is very important to identify the vibrational characteristics. In this paper, a contact-free surface actuator is modeled in finite element method and updated by using the experimental modal data. Finally, the static and dynamic characteristics of the finite element model are predicted and then discussed.

크기효과가 고려된 미소절삭시의 온도 및 응력특성에 관한 유한요소해석 (A Finite Element Analysis for the Characteristics of Temperature and Stress in Micro-machining Considering the Size Effect)

  • 김국원;이우영
    • 한국정밀공학회지
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    • 제15권10호
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    • pp.128-139
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    • 1998
  • In this paper, a finite element method for predicting the temperature and stress distributions in micro-machining is presented. The work material is oxygen-free-high-conductivity copper(OFHC copper) and its flow stress is taken as a function of strain, strain rate and temperature in order to reflect realistic behavior in machining process. From the simulation, a lot of information on the micro-machining process can be obtained; cutting force, cutting temperature, chip shape, distributions of temperature and stress, etc. The calculated cutting force was found to agree with the experiment result with the consideration of friction characteristics on chip-tool contact region. Because of considering the tool edge radius, this cutting model using the finite element method can analyze the micro-machining with the very small depth of cut, almost the same size of tool edge radius, and can observe the 'size effect' characteristic. Also the effects of temperature and friction on micro-machining were investigated.

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마이크로 표면주름 구조에 따른 물방울 동적거동에 관한 실험적 연구 (Experimental Study of Dynamic Behavior of a Water Droplet on Diverse Wrinkling Surfaces)

  • 백대현;;박상후
    • 한국정밀공학회지
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    • 제32권6호
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    • pp.577-585
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    • 2015
  • We fabricated multi-scale such as macro-, micro-, and multi-scale wrinkles by using repetitive volume dividing (RVD) method and thermal curing process. Also wrinkle surface was modified with coating of a self-assembled monolayer (SAM). We measured the contact angle of each wrinkled surface, and observed the behavior of droplets on sloping surface. Through experimental study, we found out that the contact angle was much higher in case of multi-scale and SAM coated wrinkles. And micro-scale wrinkle showed a high contact angle comparing with that of macro-scale wrinkle. Dynamic behaviors of a water droplet like sliding velocity on diverse wrinkled surfaces were dependent on their static contact angles. These results showed that hydro-dynamic characteristics were changed depending on the wrinkle structure and the material forming the wrinkle. These dynamic characteristics can be utilized in bio-chip, microfluidics, and many others in order to control easily chemical reactivity.

잠겨진 물체를 포함하는 계면유동의 수치적인 연구 (Numerical Study of Interfacial Flows With Immersed Solids)

  • 김성일;손기헌
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 추계학술대회
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    • pp.706-711
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    • 2003
  • A numerical method is presented for computing unsteady incompressible two-phase flows with immersed solids. The method is based on a level set technique for capturing the phase interface, which is modified to satisfy a contact angle condition at the solid-fluid interface as well as to achieve mass conservation during the whole calculation procedure. The modified level set method is applied for numerical simulation of bubble deformation in a micro channel with a cylindrical solid block and liquid jet from a micro nozzle.

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접촉 면적을 제어할 수 있는 CMP 패드 제작 방법 및 성능 평가에 관한 연구 (A study on manufacture and evaluation of CMP pad controllable contact area)

  • 최재영;김형재;정영석;박재홍;키노시타마사하루;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.247-251
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    • 2004
  • Chemical-Mechanical Polishing(CMP) especially is becoming one of the most important ULSI processes for the 0.25m generation and beyond. And there are many elements affecting CMP performance such as slurry, pad, process parameters and pad conditioning. Among these elements the CMP pad is considered one of the most important because of its change. But the surface of the pad has irregular pores, so there is non-uniformity of slurry flow and of contact area between wafer and the pad, and glazing occurs on the surface of the pad. So we make CMP pad with micro structure using micro molding method. This paper introduces the basic concept and fabrication technique of CMP pad with micro-structure and the characteristic of polishing. Experimental results demonstrate the removal rate, uniformity, and time vs. removal rate.

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LIGA-like 공정으로 제작된 마이크로 터빈의 유한 요소 해석 (The Finite Element Analysis for a Micro Turbine Fabricated by LIGA-like Process)

  • 오재근;최범규;김낙수
    • 센서학회지
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    • 제9권5호
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    • pp.380-388
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    • 2000
  • LIGA-like 공정을 이용하여 고종횡비를 갖는 초소형 니켈 터빈을 제작하기 위하여 블레이드에 대한 유한 요소 해석을 수행하여 안전한 운전 조건을 연구하였다. 이 해석으로부터 터빈의 입구와 출구의 압력 차이가 44kPa 정도일 때에 항복강도를 넘지 않도록 해야 하며 축의 외경과 터빈 날개의 내경 사이의 접촉에 의한 마찰계수와 최대 응력 사이의 관계는 약간 반비례하는 경향을 보였다. 즉, 터빈이 회전하는 상태에서 최대 응력은 접촉 마찰이 증가함에 따라 감소했다. 터빈과 같이 반복하중을 받는 부분은 취성이 강한 실리콘보다는 금속으로 제작해야 하며 이를 위해서는 표면 미세 가공 보다 LTGA-like 공정으로 제작되어야 한다. 본 연구는 초소형 구조물에서 움직이는 부분과 고정된 부분의 접촉 문제를 갖는 여러 종류의 문제를 다루는 데에 이용될 수 있다.

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콘택트렌즈 재질 및 침착 단백질에 따른 균 흡착 정도와 다목적용액의 살균력 비교 (Comparisons of Adherence Level of Micro-organisms According to Contact Lens Materials and Protein Deposition and Disinfection Efficacy of Multipurpose Solution)

  • 성형경;김소라;박미정
    • 한국안광학회지
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    • 제20권1호
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    • pp.35-42
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    • 2015
  • 목적: 콘택트렌즈 재질 및 렌즈에 침착된 단백질 종류에 따른 균의 흡착력을 비교하고 관리용품의 살균력 차이를 측정하고자 하였다. 방법: FDA 평가기준 및 방법인 Disinfection Efficacy Testing의 Part 2. Regimen Procedure For Disinfecting Regimens에 따라 균 흡착 및 관리용품의 살균력 측정실험을 실시하였다. 결과: 포도상구균을 제외한 녹농균, 세라티아균, 칸디다균은 etafilcon A 렌즈에 더 많이 흡착되었으며, 4종의 다목적용액은 칸디다균을 제외한 모든 균에서 거의 완벽한 살균력을 나타냈다. 눈물 단백질을 침착시킨 렌즈에서 세라티아를 제외한 모든 균은 알부민 침착 렌즈에서의 흡착이 많았으며, 다목적용액의 살균력은 라이소자임 침착 렌즈에 흡착된 균보다 알부민 침착 렌즈에 흡착된 균에서 높은 것으로 나타났다. 또한, 균의 종류에 따라 다목적 용액의 살균력이 달랐다. 결론: 균의 종류, 콘택트렌즈 재질, 침착된 눈물 단백질의 종류가 콘택트렌즈에 흡착되는 균의 양에 영향을 주며, 눈물 단백질의 침착은 다목적용액에 의한 살균력에 변화를 초래할 수 있음을 밝혔다. 이러한 살균력에 영향을 주는 요인에 의해 콘택트렌즈 위생상태가 달라지며 부작용 발생 여부가 영향을 받을 수 있음을 제안한다.

Sub-micrometer 크기의 패턴의 복제시 발생되는 이형 특성의 분석 (Analysis of anti-adhesion property in replication of patterns of sub-micrometers)

  • 이남석;강신일
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.940-944
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    • 2003
  • With the increasing demand for plastic micro components, micro-/nano-molding using the mother stamper has received much attention. If the replication temperature is too high, the adhesion between the stamper and the polymer melt may deteriorate the surface quality of the replicated part, excessively wearing down the stamper. In this paper, an experimental method analyzes the temperature dependency of the anti-adhesion property between the actual stamper with patterns of sub-micrometer and the polymer melt. As a practical example, a correlation between the contact angle of the stamper and the surface quality of the molded substrates as a function of the replication temperature, respectively, was obtained quantitatively.

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미세노즐을 통한 액적형성에 관한 수치적 연구 (Numerical Study on Drop Formation Through a Micro Nozzle)

  • 김성일;손기헌
    • 대한기계학회논문집B
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    • 제29권2호
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    • pp.205-213
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    • 2005
  • The drop ejection process from a micro nozzle is investigated by numerically solving the conservation equations for mass and momentum. The liquid-gas interface is tracked by a level set method which is extended for two-fluid flows with irregular solid boundaries. Based on the numerical results, the liquid jet breaking and droplet formation behavior is found to depend strongly on the pulse type of forcing pressure and the contact angle at the gas-liquid-solid interline. The negative pressure forcing can be used to control the formation of satellite droplets. Also, various nozzle shapes are tested to investigate their effect on droplet formation.