• Journal of Sensor Science and Technology
• /
• v.9 no.5
• /
• pp.334-340
• /
• 2000

This paper presents the fabrication of a micro electromagnetic flow sensor for the liquid flow rate measurement. The micro electromagnetic flow sensor has some advantages such as a simple structure, no heat generation, a rapid response and no pressure loss. The principle of the micro electromagnetic flow sensor is based on Faraday's law. If conductive fluid passes through a magnetic field, the electromotive force is generated and detected by two electrodes on the wall of the flow channel. The flow sensor consists of two permanent magnets and a silicon flow channel with two electrodes. The dimension of the flow sensor is $9\;mm\;{\times}\;9\;mm\;{\times}\;1\;mm$. The micro flow channel is mainly fabricated by anisotropic etching of two silicon wafers, and the detection electrodes are fabricated by metal evaporation process. The characteristic of the fabricated flow sensor is obtained experimentally. When the flow rates of water with the conductance of $100-200\;{\mu}S/cm$ are 9.1 ml/min and 62 ml/min, the generated electromotive forces are $261\;{\mu}V$ and 7.3 mV, respectively.

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2007.04a
• /
• pp.45-48
• /
• 2007

Conventional force sensors such as piezoelectric sensor has limitations for measuring micro/nano-scale thrust. In this study we developed nano-scale measurement system using laser displacement sensor and cantilever. And electrospray microthruster was fabricated by using stainless capillary and extraction electrode, to generate nano-scale thrust. The measurement system can measure the around 90 nN thrust from this thruster. In addition, we designed and fabricated electrospray micro thruster based on PMMA(Polymethyl methacrylate), which has a nozzle protruded from the substrate.

• Journal of Sensor Science and Technology
• /
• v.22 no.5
• /
• pp.374-378
• /
• 2013

In this paper, a new structure of probe unit is designed and fabricated with PDMS, which is well-known elastic material, as a buffer layer for increasing overdrive force and mechanical strength. In general, PDMS is widely used as actuation material due to its elasticity and compatibility of fabrication process. In this work, PDMS layer is chosen for mechanical elasticity of the proposed probe unit. We achieved the high overdrive force by placing PDMS buffer layer under the silicon based cantilever due to its elasticity. Moreover, the relation between prove length and overdrive force was measured by experiment in this work. Therefore, the various specifications of the micro prove unit can be designed by using the results of this work.

• Journal of Power System Engineering
• /
• v.5 no.2
• /
• pp.36-42
• /
• 2001

This paper deals with finite element analyses of residual stresses causing popping up which are induced in micromachining processes of a microaccelerometer sensors. The paddle of the micro accelerometer sensor is designed symmetric with respect to the direction of the beam. After heating the tunnel gap up to 100 degree and get it through the cooling process and the additional beam up to 80 degree and get it through the cooling process. We learn the thermal internal stresses of each shape and compare the results with each other, after heating the tunnel gap up to 400 degree during the Pt deposition process. Finally we find the optimal shape which is able to minimize the internal stresses of microaccelerometer sensor. We want to seek after the real cause of this pop up phenomenon and diminish this by change manufacturing processes of microaccelerometer sensor by electrostatic force.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.2451-2456
• /
• 2003

In biological cell manipulation, manual thrust or penetration of an injection pipette into an egg is currently performed by a skilled operator, relying only on visual feedback information. Massive load of various micro injection of either genes, fluid or cells in the postgenomic era calls a more reliable and automatic micro injection system that can test hundreds of genes or cell types at a single experiment. We initiated to study cellular force sensing in zebrafish eggs as the first step for the development of a more controllable micro injection system by any inexperienced operator. Zebrafish eggs at different developmental stages were collected and an integrated biomanipulation system was employed to measure cellular force during penetrating the egg envelope, the chorion. First of all, the biomanipulation system integrated with cellular force sensing instrument is implemented to measure the penetration force of cell membranes and characterize mechanical properties of zebrafish embryo cells. Furthermore, implementation of cellular force sensing system and calibration are presented. Finally, the cellular force sensing of penetrating cell membranes at each developmental stages was experimentally performed. The results demonstrated that the biomanipulation system with force sensing capability can measure cellular force at real-time while the injection operation is undergoing. The magnitude of the measured force was in the range of several hundreds of uN. The precise real-time measurement should provide the first step forwards for the development of an automatic and reliable injection system of various materials into biological cells.

• 제어로봇시스템학회:학술대회논문집
• /
• 2000.10a
• /
• pp.390-390
• /
• 2000

This research is the development of a skin-type tactile sensor for service robot using PVDF film for the detection of the contact state. The Prototype of the tactile sensor which has 8$\times$8 taxels was fabricated using PVDF film In the fabrication procedure of the sensor, the electrode patterns and common electrode of the thin conductive tape were attached to the both side of the 28 micro meter thickness PVDF film using conductive adhesive. The sensor was covered with polyester film for insulation and attached to the rubber base for making stable structure. The signals of a contact pressure to the tactile sensor were sensed and processed in the DSP system in which the signals were digitized and filtered. Finally, the signals were integrated for taking the force profile. The processed signals of the output of the sensor were visualized in PC, the shape and force distribution of the contact object were obtained. The reasonable performance for the detection of contact state was verified through the experiment.

• International Journal of Precision Engineering and Manufacturing
• /
• v.9 no.3
• /
• pp.46-50
• /
• 2008

The present status and future prospects of the levitation mass method (LMM), a technique for precision mass and force measurement, are reviewed. In the LMM, the inertial force of a mass levitated using a pneumatic linear bearing is used as the reference force applied to the objects being tested, such as force transducers, materials, or structures. The inertial force of the levitated mass is measured using an optical interferometer. We have modified this technique for dynamic force calibration of impact, oscillation, and step loads. We have also applied the LMM to material testing, providing methods for evaluating material viscoelasticity under an oscillating or impact load, evaluating material friction, evaluating the biomechanics of a human hand, and generating and measuring micro-Newton-level forces.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.637-640
• /
• 2005

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of $0\~30{\mu}N$ by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), and the force vs. deflection. From this relationship, the force constant of the cantilever was calculated to 3.45 N/m with a standard deviation of 0.01 N/m. It shows that there is a big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer s specifications.

• Interaction and multiscale mechanics
• /
• v.3 no.3
• /
• pp.257-266
• /
• 2010

A novel resonance based proximity DC current sensor is proposed. The sensor consists of a piezo sensed and actuated cantilever beam with a permanent magnet mounted at its free end. When the sensor is placed in proximity to a wire carrying DC current, resonant frequency of the beam changes with change in current. This change in resonant frequency is used to determine the current through the wire. The structure is simulated in micro and meso scale using COMSOL Multi physics software and the sensor is found to be linear with good sensitivity.

• Journal of Sensor Science and Technology
• /
• v.27 no.2
• /
• pp.99-104
• /
• 2018

A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.