• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2002년도 춘계학술대회 논문집
• /
• pp.38-42
• /
• 2002

In the recent, electro-rheological fluid has been used for micro polishing of the 3-dimensional micro-aspherical lens and some sectional parts with defects on the wide flat wafer. The ER fluid has the properties that its viscosity has drastic changed under some electric fields. Therefore, ER fluid can be applicable to the micro polishing fur some parts using these properties. In this paper, the experimental device has been constructed using the precision milling machine in order to micro polishing far some sectional parts of a 4 inches wafer It is consisted of a small steel electrode, a wafer fixture, DC10mA and 5KV power supply unit, and a controller unit. Using the ER experimental device, possibility of amending for wide flat wafer and micro polishing of some micro part has been analyzed.

• 한국공작기계학회논문집
• /
• 제17권1호
• /
• pp.59-64
• /
• 2008

Micro machining can manufacture complex shapes with high accuracy. Especially, this enables wide application of micro technology in various fields. For example, micro channels allow fluid transfer, which is a widely used technology. Therefore, liquidity research of flow in micro channels and micro channel manufacturing with use of various materials and cutting conditions has very important meaning. In this study, to find out correlation between fluid velocity in micro channels and surface roughness, we manufactured micro channels using micro end-mill and dropped ethanol into micro channels. We compared several surface roughness and fluid velocity in micro channels that were created by various processing conditions. Finally, we found out relationship between fluid velocity and surface roughness in micro channels of different materials.

• 소성∙가공
• /
• 제22권2호
• /
• pp.80-85
• /
• 2013

The surface integrity of micro-machined products affects the performance of products significantly. Micro-burrs resulting from micro-cutting degrades the surface quality. Therefore it is desired to eliminate them completely and many studies have been undertaken for this purpose. In this study, micro-end-milling was carried out on nickel alloy and brass materials commercially used for light guide plate mold in 3-D optical devices. After completing this micro-machining, the burr heights were measured with a microscope. Then, deburring was done on the machined edges using the MR jet polishing method. A jet angle of $0^{\circ}$ and deburring times of 1, 3, and 5 min. were chosen. It was found that burrs were completely eliminated after 5 min of MR fluid jet polishing.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2003년도 춘계학술대회 논문집
• /
• pp.1873-1876
• /
• 2003

Magneto-rheological polishing is a new technology used in precision polishing. It utilizes magneto-rheological fluid. nonmagnetic polishing abrasive, aqueous carrier fluids in magnetic field to remove material from a part surface. Silicon micro channel as work piece is fixed in the slurry which is made of MR fluid and CeO$_2$(10 vol%) abrasive particles. And permanent magnet rotate in the slurry to transfers magnetic force to abrasive particles by increasing yield strength of MR fluid. so, the obtained bottom surface roughness of micro channel by experiment reduced to Ra 0.010 $\mu\textrm{m}$ Rmax 0.103 $\mu\textrm{m}$ and finwall surface roughness of micro channel reduced to Ra 0.018 $\mu\textrm{m}$ Rmax 0.468 $\mu\textrm{m}$. At optimum conditions of variables, the workpiece as silicon micro channel have about 24 times smaller surface roughness than before polishing.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1988-1991
• /
• 2005

A micro fluid actuator driven by electromagnetic force at MEMS(Micro Electro Mechanical System) level has been designed. The operation of the actuator was simulated in three steps. First, fluid flow analysis has been performed to determine the actuator load. With the load, dynamic behavior of the actuator structure has been analysed. Finally, fluid-structure interaction analysis has been performed to predict the performance of the actuator. To avoid excessive amount of computation, axisymmetric and plane strain 2-D models were used.

• 유체기계공업학회:학술대회논문집
• /
• 유체기계공업학회 2003년도 유체기계 연구개발 발표회 논문집
• /
• pp.107-114
• /
• 2003

The influence of property difference in refraction index on micro PIV measurement of two-fluid flow in a microchannel was analyzed. The difference of measurement planes in two fluids would bring misunderstanding of the physics. The objective-imaging system for two-fluid flow measurement was presented, and the condition for measurement of valid velocity profile across two-fluid interface was derived. A micro PIV experimental system was set up to measure two-fluid flow inside a Y-shape microchannel. Under the conditions, three cases of two-fluid flow of glycerol solutions at different concentration (${\phi}$), e.g., (${\phi}=0\;and\;{\phi}=0.2,\;{\phi}=0.1\;and\;{\phi}=0.5,\;{\phi}=0\;and\;{\phi}=0.6$, were measured. Close agreement of experimental and numerical results was found.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2004년도 춘계학술대회 논문집
• /
• pp.27-33
• /
• 2004

Electro-theological fluid is recently used for the micro polishing of 3-dimensional micro-aspherical lens. It's also used for polishing small area defects on the wide flat wafer. Since ER fluid shows a behavior of viscosity changing under certain electric fields. micro polishing efficiency may be enhanced for certain cases. In this paper, a perfluorinated carbonyl fluoride oil based ER fluids was used to improve surface polishing rate and submicron-scale accuracy. As the polishing electrodes, micro size cylindrical tools had been used for maximizing the electric field. An experimental device, which was applied for micro polishing a number of wafers of 4inches in size and other workpiece. was made on a precision polishing system. It consisted of a steel electrode. a wafer fixture. l0㎃ current and DC 5㎸ power supply unit, and a controller unit. From the Experiments. the ER fluid is applicable for micro polishing of small parts.

• 한국정밀공학회지
• /
• 제25권11호
• /
• pp.119-125
• /
• 2008

The objective of this study was to compare micro-scale friction coefficients with and without synovial fluid, and micro-scale measurements were performed using atomic force microscopy (AFM) with a $5{\mu}m$ spherical probe. Four cylindrical cartilage specimens were harvested from two fresh bovine humeral heads (4-6 months old). $Average{\pm}standard$ deviation values of the micro-scale AFM frictional coefficients calculated from the liner fit of friction versus normal force was $0.177{\pm}0.012$ and $0.130{\pm}0.010$ with and without synovial fluid coating on AFM probe respectively, showing its reduction by ${\sim}27%$ with synovial fluid. To the best of our knowledge, this experimental study investigates the first such comparisons of frictional response of articular cartilage with and without synovial fluid coating on AFM probe, and provides significant insights into the role of synovial fluid in the articular cartilage friction and lubrication independently of the confounding effect of fluid pressurization in the articular cartilage.

• Journal of applied mathematics & informatics
• /
• 제41권5호
• /
• pp.1085-1102
• /
• 2023

In this study the magneto hydrodynamic (MHD) micro polar fluid flow of a viscous incompressible fluid past a porous medium in the presence of chemical reaction is considered. This work is devoted to investigate the Soret effect and Electromagnetic radiation effect and analyze analytically. In the energy equation the applied magnetic field strength and in the concentration equation the Soret effect are incorporated. The basic PDE (partial differential equations) are reduced to ODE (ordinary differential equations) using non dimensional variables. Then the analytical solution of the dimensionless equations are found using perturbation technique. The features of the fluid flow parameters are analyzed, discussed and explained graphically. The graphical solutions are found using MATLAB R2019b. Skin friction coefficient at the wall, Couple stress coefficient at the plate and the local surface heat flux are also thoroughly examined. Overall, this study sheds light on the complex interplay between physical parameters in the behavior of MHD micro-polar fluid past a porous medium in the presence of chemical reaction.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1997년도 추계학술대회 논문집
• /
• pp.953-956
• /
• 1997

Micro drilling characteristics by EDM method was investigated. In detail, Micro tool electrode for EDM drilling was machined by use of WEDG method and micro hole was drilled using the machined tool electrode in SUS plate. The machining accuracy and time was compared in a different dielectric fluid. As a result, it was convinced that this method could be utilized as a fabrication technology of micro mold or micro 3 dimensional parts.