• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.8
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• pp.37-44
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• 2004

This paper describes a new GaAs-based surface-micromachined microstrip line supported by dielectric post and air-gapped signal line with ground metal. This new type of dielectric-supported air-gapped microstripline(DAML) structure is developed using surface micromachining techniques to provide easy means of airbridge connection between the signal lines and to archive low losses at millimeter-wave frequency band with wide impedance range. Each DAMLs with the length of 5 mm are fabricated and the measured characteristics are compared with those of the conventional microstrip transmission line. These transmission lines are composed of 10 ${\mu}{\textrm}{m}$ height of signal line, post size of 10 ${\mu}{\textrm}{m}$ ${\times}$ 10 ${\mu}{\textrm}{m}$ and post height of 9 ${\mu}{\textrm}{m}$. By elevating the signal lines from the substrate using the micromachining technology, the substrate dielectric loss can be reduced Compared with of the conventional microstrip transmission line showing 7.5 dB/cm loss at 50 GHz, the loss can be reduced to 1.1 dB/cm loss at 50 GHz.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.207.1-207.1
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• 2015

차세대 디스플레이 소자로서 TAOS TFT (transparent amorphous oxide semiconductor Thin Film Transistor)가 주목 받고 있다. 또한, 최근에는 값 비싼 전자 제품을 저렴하고 간단히 처분 할 수 있는 시스템으로 대신 하는 연구가 진행되고 있다. 그중, cellulose-fiber에 전기적 시스템을 포함시키는 e-paper에 대한 관심이 활발하다. cellulose fiber는 가볍고 깨지지 않으며 휘는 성질을 가지고 있다. 가격도 저렴하고 가공이 용이하여 차세대 기판의 재료로서 주목받고 있다. 하지만, cellulose-fiber 위에는 고온의 열처리공정과 고품질 박막 성장이 어려워서 TFT 제작에 어려움을 겪고 있다. 이러한 문제를 해결하기 위해서 산화물 반도체를 이용하여 TFT를 제작한 사례가 보고되고 있다. 또한, 채널 물질 뿐만 아니라 cellulose fiber에도 다른 물질을 첨가하거나 증착하여 전기적 화학적 특성을 개선시킨 사례도 많이 보고되고 있다. 본 연구에서는 가장 저품질의 용지로 알려진 신문지와 A4용지를 gate dielectric을 이용하여서 a-IGZO TFT를 제작하였다. 하지만, cellulose fiber로 만들어진 TFT의 경우에는 고온의 열처리가 불가능 하다. 따라서 저온에서 높을 효율은 보이는 microwave energy를 이용하여 열처리를 진행하였다. 추가적으로 저품질의 종이의 특성을 개선시키기 위해서 high-k metal-oxide solution precursor를 첨가 하여 TFT의 특성을 개선시켰다. 결과적으로 cellulose fiber에 metal-oxide solution precursor을 첨가하는 공정과 micro wave를 조사하는 방법을 사용하여 100도 이하에서 cellulose fiber를 저렴하고 우수한 성능의 TFT를 제작에 성공하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.207.2-207.2
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• 2015

차세대 디스플레이 소자로서 TAOS TFT (transparent amorphous oxide semiconductor Thin Film Transistor)가 주목 받고 있다. 또한, 최근에는 값 비싼 전자 제품을 저렴하고 간단히 처분 할 수 있는 시스템으로 대신 하는 연구가 진행되고 있다. 그중, cellulose-fiber에 전기적 시스템을 포함시키는 e-paper에 대한 관심이 활발하다. cellulose fiber는 가볍고 깨지지 않으며 휘는 성질을 가지고 있다. 가격도 저렴하고 가공이여 용이하여 차세대 기판의 재료로서 주목받고 있다. 하지만, cellulose-fiber 위에는 고온의 열처리공정과 고품질 박막 성장이 어려워서 TFT 제작에 어려움을 겪고 있다. 이러한 문제를 해결하기 위해서 산화물 반도체를 이용하여 TFT를 제작한 사례가 보고되고 있다. 또한, 채널 물질 뿐만 아니라 cellulose fiber에도 다른 물질을 첨가하거나 증착하여 전기적 화학적 특성을 개선시킨 사례도 많이 보고되고 있다. 본 연구에서는 가장 저품질의 용지로 알려진 신문지와 A4용지를 gate dielectric을 이용하여서 a-IGZO TFT를 제작하였다. 하지만, cellulose fiber로 만들어진 TFT의 경우에는 고온의 열처리가 불가능 하다. 따라서 저온에서 높을 효율은 보이는 microwave energy를 이용하여 열처리를 진행하였다. 추가적으로 저품질의 종이의 특성을 개선시키기 위해서 high-k metal-oxide solution precursor를 첨가 하여 TFT의 특성을 개선시켰다. 결과적으로 cellulose fiber에 metal-oxide solution precursor을 첨가하는 공정과 micro wave를 조사하는 방법을 사용하여 100도 이하에서 cellulose fiber를 저렴하고 우수한 성능의 TFT를 제작에 성공하였다.

• Journal of Korean Society for Atmospheric Environment
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• v.24 no.6
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• pp.641-648
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• 2008

A plate-type dielectric barrier discharge (DBD) reactor was designed and tested for removal of gaseous toluene. The DBD reactor consisted of 9 parallel plate electrodes, four of which were grounded. An AC voltage of rectangular waveform ($5{\sim}8.5kV$, $60{\sim}1,000Hz$), was applied to the other five electrodes. The gaseous toluene passed through the DBD reactor and its concentration was measured by a real-time gas analyzer. The carbon monoxide (CO) and carbon dioxide ($CO_2$) which were produced by decomposition of toluene in the DBD reactor, were sampled and analyzed by a micro gas chromatography. The maximum toluene removal efficiency was 51.4%.

• Transactions on Electrical and Electronic Materials
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• v.12 no.4
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• pp.131-134
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• 2011

Back-end-of-line using ultra low-k (ULK; k < 2.5) has been required to reduce resistive capacitance beyond 45 nmtechnologies, because micro-processing units need higher speed and density. There are two strategies to manufacture ULK inter-layer dielectric (ILD) materials using an air-gap (k = 1). The former ULK and calcinations of ILD degrade the mechanical strength and induce a high cost due to the complication of following process, such as chemical mechanical polishing and deposition of the barrier metal. In contrast, the air-gap based low-k ILD with a relatively higher density has been researched on the trench-type with activity, but it has limited application to high density devices due to its high air-gap into the next metal layer. The height of air-gap into the next metal layer was reduced by changing to the via-typed air-gap, up to about 50% compared to that of the trench-typed air-gap. The controllable ULK was easily fabricated using the via-typed air-gap. It is thought that the via-type air-gap made the better design margin like via-patterning in the area with the dense and narrow lines.

• Journal of applied mathematics & informatics
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• v.25 no.1_2
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• pp.315-327
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• 2007

Mathematical aspects of the electromagnetic surface-wave propagation are examined for the dielectric core consisting of multiple sub-layers, which are embedded in the gap between the two bounding cladding metals. For this purpose, the linear problem with a partial differential wave equation is formulated into a nonlinear eigenvalue problem. The resulting eigenvalue is found to exist only for a certain combination of the material densities and the number of the multiple sub-layers. The implications of several limiting cases are discussed in terms of electromagnetic characteristics.

• Proceedings of the KIEE Conference
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• 1997.07d
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• pp.1465-1468
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• 1997

In this study we investigated the aging characteristic such as leakage current, dielectric loss, contact angle, of EPDM for outdoor use by thermal treatment. And also observed the color change of surface, changing of chemical ingredient of the marterials by optical microscope. SEMI, FTIR and EDX at the section and surface. The test result show that leakage current is increased with thermal aging time. contact angle and dielectric loss is slightly decreased. Moreover, micro-void or crack in bulk is severely increased with aging time. However, the result affect to the tan $\delta$ at bulk of EPDM. It seems that carrier sources are removed by degassing with heat treatment.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.103.2-103
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• 2001

In this paper, we discusses compliant actuators those are made of electrostrictive polymer. Electrostrictive polymer actuators(EPAs) are based on the deformation of dielectric elastomer polymer in the presence of an electric field. We address actual design and fabrication method of an actuator using the electrostrictive polymer. We have developed primitive prototypes of the actuator using elastic restoring force. And they actuators have 1 to 3 DOF, 1 DOF actuators are simple linear actuators and 3 DOF actuator has linear actuation and steering capability. They are simple in structure with lightweight, high trust, force and large stroke. Basic design principles and experimental procedures for confirming their performance will be introduced.

• 제어로봇시스템학회:학술대회논문집
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• 2002.10a
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• pp.105.5-105
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• 2002

Digital Polymer Motor (DPM) based on dielectric elastomer is presented. It includes all the supplementary parts for actuation such as micro-controller, DC-DC converter etc. DPM can be operated by itself with the program embedded and controlled via serial interface with PC. The actuator accomplishes bidirectional actuation and compliance controllability, which are important characteristics for a biomimetic artificial muscle actuator. DPM accomplish these requirements without any mechanical substitute or complicated algorithms. Its basic concepts and working principles are addressed with modeling and simulation and the compliance controllability are verified by conducting several experiments. $\textbullet$ Polymer, Dielectric, Biomimetic

• Journal of Mechanical Science and Technology
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• v.19 no.11
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• pp.2025-2031
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• 2005

Eshelby type micro mechanics model with a newly developed piezoelectric Eshelby tensor is proposed for predicting the effective electroelastic properties of the piezoelectric composite. The model is applied for piezoelectric solids containing both porosities and metal inhomogeneities. The effective electroelastic moduli of the composites such as stiffness, piezoelectric constants, and dielectric constants are predicted by the present model, which are extensively compared with the existing experimental results from the literatures. The validity of Eshelby type model for predicting the effective properties of the composite is thoroughly examined. It can be concluded from this study that a new mechanism is needed to compute correctly the dielectric constants among the effective properties of the composites.