• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2248-2250
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• 2000

We investigated properties of PZT composite for medical ultrasonic transducer array (briefly UTA) for medicine applications fabricated by micro pressing and dicing method. Dicing method was the fabrication process of conventional ultrasonic transducer array by dicing sintered PZT sheet. Micro pressing method was the proposed process using pressing PZT green sheet by PMMA micro mold from LIGA process. Microstructures, electrical and electro -mechanical properties of fabricated UTAs of two cases were analyzed. Thickness mode electro-mechanical coupling coefficient of two cases have same values of 51%. Sintered PZT Microstructures of them showed dense and uniform. Micro pressing method was very mass productive process because of using batch type LIGA process. From results, we found micro pressing method was more competitive than dicing method for UTA fabrication. For further study, uniformity of microstructures and electro-mechanical properties of large scale, and fabrication processes of Ni plating and PMMA molding should be improved and investigated.

• 제어로봇시스템학회논문지
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• 제19권11호
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• pp.979-983
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• 2013

The three-dimensional measurement method of confocal systems is a spot scanning method which has a high resolution and good illumination efficiency. However, conventional confocal systems had a weak point in that it has to perform XY axis scanning to achieve FOV (Field of View) vision through spot scanning. There are some methods to improve this problem involving the use of a galvano mirror [1], pin-hole array, etc. Therefore, in this paper we propose a method to improve a parallel mode confocal system using a micro-lens and pin-hole array in a dual microscope configuration. We made an area scan possible by using a combination MLA (Micro Lens Array) and pin-hole array, and used an objective lens to improve the light transmittance and signal-to-noise ratio. Additionally, we made it possible to change the objective lens so that it is possible to select a lens considering the reflection characteristic of the measuring object and proper magnification. We did an experiment using 5X, 2.3X objective lens, and did a calibration of height using a VLSI calibration target.

• 정보저장시스템학회논문집
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• 제2권4호
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• pp.236-239
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• 2006

Glass micro molding process is the most suitable process for fabricating high precision glass microlens amy at low cost. A new glass micro molding process was proposed. Tungsten carbide mold was fabricated by imprinting and sintering process to overcome the difficulties of the conventional process. In the glass micro molding process, process conditions such as processing temperature and compression force were changed. Geometrical properties of the replicated glass microlens array were measured and compared at variety process conditions. The condition of glass micro molding process was optimized. The experimental result showed that developed process was effective to produce a glass microlens array.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.459-460
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• 2008

Zinc oxide micro rods were fabricated using as chemical bath deposition ok photolithography. Vertically aligned Zinc Oxide rod array as grown by chemical bath deposition method on Zinc Oxide template layer. The ZnO template layer was deposited on glass and the pattering was made by standard photolithography technique. The selective growth of ZnO micro rods were achieved with the masked ZnO template layer substrate. The fabricated ZnO micro rods were found to be single crystalline and have grown along hexagonal c-axis direction of (0002) which is same as the preferred growth orientation of ZnO template layer. The ZnO micro-rod array structure was implemented as a window layer in Cu(InGa)Se2 solar cell and its effect on photovoltaic efficiency was examined.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.163-164
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• 2012

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.1231-1235
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• 2004

The needs of micro scale thermal detecting technique are increasing in biology and chemical industry. For example, Thermal finger print, Micro PCR(polymer chain reaction), ${\mu}TAS$ and so on. To satisfy these needs, we developed a DTSA(Diode Temperature Sensor Array) for detecting and controlling the temperature on small surface. The DTSA is fabricated by using VLSI technique. It consists of 32 ${\times}$ 32 array of diodes (1,024 diodes) for temperature detection and 8 heaters for temperature control on a 8mm ${\times}$ 8mm surface area. The working principle of temperature detection is that the forward voltage drop across a silicon diode is approximately proportional to the inverse of the absolute temperature of diode. And eight heaters ($1K{\Omega}$) made of poly-silicon are added onto a silicon wafer and controlled individually to maintain a uniform temperature distribution across the DTSA. Flip chip packaging used for easy connection of the DTSA. The circuitry for scanning and controlling DTSA are also developed

• 조명전기설비학회논문지
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• 제20권2호
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• pp.1-7
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• 2006

LCD 백라이트의 효율을 향상시키기 위하여 배열형 소형 프레넬 렌즈(micro Fresnel lens array)가 결합된 도광판을 설계하였다. 배열형 소형 프레넬 렌즈(MFLA)는 blazed 형태 및 다단계 이진 형태를 채택하였다. MFLA는 기존 LCD 백라이트 장치에서 필요로 했던 프리즘판 및 확산판을 대체할 수 있다. MFLS가 적용된 도광판의 성능을 나타내기 위하여 휘도와 균일도 값 등을 계산하였다.

• 한국광학회:학술대회논문집
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• 한국광학회 2007년도 동계학술발표회 논문집
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• pp.265-266
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• 2007

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권9호
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• pp.662-664
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• 1999

We fabricated AC-TFEL device having cone-shaped Si micro-tip reflector array based on the process which have been conventionally employed for the Si-tip field emitter array in FED system. As a result, the AC-TFEL device having a new geometrical structure could generate well concentrated visible white-light from 3600 reflectors/pixel under bipolar pulse excitation mode only by edge-emission mechanism.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2004년도 제22회 춘계학술대회논문집
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• pp.601-604
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• 2004

Precise position and attitude control of pico-satellite requires huge number of impulses of the order of 10$^{-6}$ Ns. MEMS solid rocket array is a promising propulsion system but the higher degree of miniaturization causes unreliable operation mainly due to quenching. In order to breakthrough this situation, a novel design of solid micro-rocket is proposed, which generates tiny impulses repetitively from a single rocket not from array. This unique micro-rocket is based on the utilization of quenching, which causes propellant reaction to sustain only in a small area. A test chip of a micro solid propellant tank and micro heater array is fabricated and ignition test is conducted. Obtained results show the feasibility of this concept and future direction of this quenching-based propulsion is discussed.