• 한국세라믹학회지
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• 제43권1호
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• pp.4-9
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• 2006

To test the fracture toughness of alumina; a Surface-Crack-in-Flexure (SCF) method, a Single-Edge-Precracked-Beam (SEPB) method and a Single-Edge-V-Notched-Beam (SEVNB) method were used at crosshead rates ranging from 0.005 mm/min to 2 mm/ min and relative humidity ranging from $15\%\;to\;80\%$. The results show that the fracture toughness tested by the SCF method increases with either an increasing loading rate or decreasing relative humidity; in contrast, the toughness by the SEPB method and the SEVNB method does not depend on the loading rate or the relative humidity. Theoretical analysis of the way slow crack growth affects the apparent fracture toughness indicates that the three testing methods have different effects with respect to the loading rate and the relative humidity; moreover, these differences are attributable to differences in the size of the cracks or notches.

• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.39-39
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• 1999

The KSTAR (Korea Superconducting Tokamak Advanced Research) tokamak is a nuclear fusion experimental device for a long pulse/steady-state plasma operation, adopting fully superconducting magnets. In accordance with completion of the basic design of the torus vacuum vessel and the enclosing cryostat, the vacuum pumping and gas fueling basic design has been developed to fulfil the physics requirements. The ultra-high vacuum pumping and sophisticated gas fueling system of the machine is essential to achieve such roles for optimized plasma performance and operation. Recently the vacuum exhaust system using dedicated pumping ports for the vacuum vessel and cryostat has been modified to meet more reliable and successful performance of the KSTAR[Fig. 1].In order to achieve the required base pressure of 5 x 10-9 torr, the total impurity load to the vessel internal is limited to ~5 x 10-5 torr-1/x, while the cryostat base pressure is kept as ~5 x 105 torr to mitigate the thermal load applied to the superconducting magnets. Each KSTAR fueling system will be separately capable of fueling gas at a rate of 50 torr-1/x, consistent with the given pumping throughput. In order to initiate a plasma discharge in KSTAR, the vacuum vessel is filled to a gas pressure of few 10-6 to few 10-4 torr, and additional gas injection is required to maintain and increase the plasma density during the course of the discharge period.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.359-359
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• 2014

In this study, surface plasmon resonance structures for the selective and the enhanced transmission of infrared light were designed. In order to relieve the large discontinuity of refractive index between air and metal hole array, $Si_3N_4$ was used as the impedance matching layer. Experimental parameter were calculated and determined in advance by the rigorous coupled wave analysis (RCWA) simulation, and then the experiment was carried out. A 2-dimensional metal hole array structures were patterned on the size of $1{\times}1cm^2$ GaAs substrate using photolithography process, and 5 nm thick Ti, 50 nm thick Au were deposited by E-beam evaporator, respectively. Subsequently, $Si_3N_4$ films with various thicknesses (150, 350, 550, and 750 nm) were deposited by plasma enhanced chemical vapor deposition (PECVD). For the comparison, transmittance of specimens with and without $Si_3N_4$ was measured using Fourier transform infrared spectroscopy (FTIR) in the range of $2.5-15{\mu}m$. Furthermore, the surface and the cross-sectional images were collected from the specimens by scanning electron microscopy (SEM). From the results, it was demonstrated that the transmittance was enhanced up to 80% by the deposition of 750 nm $Si_3N_4$ at $6.23{\mu}m$. It has advantage of enhanced transmission despite the simple fabrication process.

• 한국의학물리학회지:의학물리
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• 제33권4호
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• pp.72-79
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• 2022

Purpose: The proficiency test was conducted to assess the performance of the dosimetry audit service provider in the readout practice of the dose delivered to patients in medical institutions. Methods: A certain amount of the absorbed dose to water for the high-energy X-ray from the medical linear accelerator (LINAC) installed in the Korea Research Institute of Standards and Science (KRISS) was delivered to the postal dose audit package given by the dosimetry audit service provider, in which the radio-photoluminescence (RPL) glass dosimeters were mounted. The dosimetry audit service provider read the RPL glass dosimeters and sent the readout dose value with its uncertainty to KRISS. The performance of the dosimetry audit service provider was evaluated based on the E_n number given in ISO/IEC 17043:2010. Results: The evaluated E_n number was -0.954. Based on the ISO/IEC 17043, the performance of the dosimetry service provider is "satisfactory." Conclusions: As part of the conformity assessment, the KRISS performed the proficiency test over the postal dose audit practice run by the dosimetry audit service provider. The proficiency test is in line with confirming the traceability of the medical institutions to the primary standard of absorbed dose to the water of the KRISS and ensuring the confidence of the dosimetry audit service provider.

• 한국광학회지
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• 제35권2호
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• pp.61-70
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• 2024

400 nm부터 1,600 nm까지의 파장 영역에서 단일모드 광섬유에 결합된 12개의 다이오드 레이저 광원를 기반으로 하는 레이저 복사출력계 교정시스템을 소개한다. 본 시스템은 복사출력 측정위치에서 레이저 출력요동을 최소화하였고 모든 광원에 대해 비슷한 빔 크기를 갖는다. 또한 감응도의 비균일도 및 비선형성을 최소화하기 위해 적분구 기준기를 사용하였다. 이 교정시스템의 최소 측정불확도는 대부분의 레이저 파장에서 1.1% (k=2)로 추정된다.

• 한국음향학회지
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• 제43권3호
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• pp.335-343
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• 2024

본 논문은 초음파 방사힘을 이용하여 음향파워를 측정하는 방법에 대한 이론적 모델을 세우고 이에 대한 이론적 결과를 다루었다. 이를 위해 Kirchhoff approximation 기반으로 강체원뿔표적에 대한 산란모델을 세우고 음향파워를 계산한 후 이를 방사힘으로 환산하였다. 이를 통해 원뿔표적을 사용하는 기존 방법의 정확성 및 측정 한계, 그리고 임의의 경사각의 원뿔표적으로도 측정할 수 있는 음향파워측정에 관한 확장된 이론을 제시하였다. 이를 이용하여 초음파 방사힘을 이용한 음향파워측정 방법의 주파수 및 표적 크기에 대한 의존도도 본 논문에서 제시하였다. 그 결과로 주파수 및 표적 크기를 고려하였을 때 국제표준규격(International Electrotechnical Commission, IEC)에서 제시하는 방법으로 계산한 음향파워값에 추가되어야 할 보정값을 산출하였다.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2004년도 ICCAS
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• pp.282-285
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• 2004

Every year, the last products from most important builders of high bandwidth digitizers are tested in our laboratory which is specialized in the design and the characterization of fast links used in large laser facility. The purpose of this article is to describe the series of tests conducted during the characterization of such digitizers. More particularly, it takes an interest in the metrology of instruments with more than 5 GHz of bandwidth. It presents the different methods used and the kind of conclusion that we can give after such study. Such metrology campaign which usually takes one month of work, allows us to observe the smallest details and characteristics that usually builders don't give in their tables specifications. After the campaign, a copy of our technical report is written and sends to the builder. This report can be used by the technical team to ameliorate the points we noted.

• 센서학회지
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• 제3권2호
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• pp.24-32
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• 1994

힘 증강기법을 이용하여 10 MN 로드셀 3개로 30 MN 힘 센서를 설계 제작하였다. 로드셀은 스트레인 게이지방식으로서 기둥형 감지부로 설계되었으며 오차를 줄이기 위하여 온도보상회로등이 내장되어 있다. 특성실험 결과 제작된 힘 센서의 총오차는 0.1 %이내로 추정되어 4.5 MN 이상의 대용량 재료시험기의 교정 및 시험에 유용하게 사용될 것으로 기대된다.

• 산업공학
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• 제23권3호
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• pp.229-238
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• 2010

Virtual metrology (VM), a critical component of semiconductor manufacturing, is an efficient way of assessing the quality of wafers not actually measured. This is done based on a model between equipment sensor data (obtained for all wafers) and the quality characteristics of wafers actually measured. This paper considers principal component regression (PCR), partial least squares regression (PLSR), kernel PCR (KPCR), and kernel PLSR (KPLSR) as VM models. For each regression model, two cases are considered. One utilizes all explanatory variables in developing a model, and the other selects significant variables using the genetic algorithm (GA). The prediction performances of 8 regression models are compared for the short- and long-term etch process data. It is found among others that the GA-KPLSR model performs best for both types of data. Especially, its prediction ability is within the requirement for the short-term data implying that it can be used to implement VM for real etch processes.