• Journal of the Semiconductor & Display Technology
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• v.21 no.3
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• pp.74-79
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• 2022

In this study, the plasma corrosion resistance and the change in the number of contamination particles generated using the plasma etching process and cleaning process of coating parts for semiconductor plasma etching equipment were investigated. As the coating method, atmospheric plasma spray (APS) was used, and the powder materials were Y₂O₃ and Y₃Al₅O₁₂ (YAG). There was a clear difference in the densities of the coatings due to the difference in solubility due to the melting point of the powdered material. As a plasma environment, a mixed gas of CF₄, O₂, and Ar was used, and the etching process was performed at 200 W for 60 min. After the plasma etching process, a fluorinated film was formed on the surface, and it was confirmed that the plasma resistance was lowered and contaminant particles were generated. We performed a surface cleaning process using piranha solution(H₂SO₄(3):H₂O₂(1)) to remove the defect-causing surface fluorinated film. APS-Y₂O₃ and APS-YAG coatings commonly increased the number of defects (pores, cracks) on the coating surface by plasma etching and cleaning processes. As a result, it was confirmed that the generation of contamination particles increased and the breakdown voltage decreased. In particular, in the case of APS-YAG under the same cleaning process conditions, some of the fluorinated film remained and surface defects increased, which accelerated the increase in the number of contamination particles after cleaning. These results suggest that contaminating particles and the breakdown voltage that causes defects in semiconductor devices can be controlled through the optimization of the APS coating process and cleaning process.

• Journal of the Korea Organic Resources Recycling Association
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• v.29 no.4
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• pp.47-54
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• 2021

In this study, the performance of a honeycomb-type hydrogen oxidation catalyst to remove hydrogen in a hydrogen economy society to secure leaking hydrogen. The Pd/TiO₂ catalyst was prepared based on a liquid phase reduction method that is not exposed to a heat source, and it was showed through H₂-chemisorption analysis that it existed as very small active particles of 2~4 nm. In addition, it was found that the metal dispersion decreased and the active particle size increased as the reduction reaction temperature increased. It was meant that the active metal particle size and the hydrogen oxidation performance were in a proportional correlation, so that it was consistent with the hydrogen oxidation performance reduction result. The prepared catalyst was coated on a support in the form of a honeycomb so that it could be applied to the hydrogen industrial process. When 20 wt% or more of the AS-40 binder was coated, oxidation performance of 90% or more was observed under low-concentration hydrogen conditions. It was showed through SEM analysis that long-term catalytic activity can be expected by enhancing the adhesion strength of the catalyst and preventing catalyst desorption. It is a basic research that can secure safety in a hydrogen society such as gasification, organic resource, and it can be utilized as a system that can respond to unexpected safety accidents in the future.

• The Journal of the Korea institute of electronic communication sciences
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• v.18 no.1
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• pp.45-52
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• 2023

The power generation method using expensive diesel has operation problems such as high cost diesel generator and a lack of reserved power due to increase of power demand in some islands, requiring expansion of power generation facilities. To solve this problems, it is necessary to improve the efficiency of power generation facilities through an ORC(Organic Rankin Cycle) system application that uses waste heat as a heat source. Therefore, localized application technology of price competitive and highly reliable ORC power generation system is needed, and optimization technology of generators is having great effect, so this study performed two generator designs to get a high-efficiency generator with an optimized 30kW output. The comparison of simulation data for two designed models showed that a generator with SPM factor of 46.2% had an efficiency of 92.1% and a power ouput of about 23.2kW based on 12,000rpm, a generator with SPM factor of 44.46%, had a power output of 27.9kW and efficiency of 93.6% based on above rpm. For the verification of improved design model with SPM factor of 44.46%, the prototype test system with 110kW motor dynamometer was installed and got to the efficiency of 92.08% with conditions of the rated capacity 25kW at 12,000rpm, the test results of prototype generator showed the validity of generator design.

• Microbiology and Biotechnology Letters
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• v.51 no.1
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• pp.99-108
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• 2023

Several challenges arise in DNA extraction and gene amplification for airborne fungal metagenome analysis from a particulate matter (PM) samples. In this study, various conditions were tested to optimize the DNA extraction method from PM samples and polymerase chain reaction (PCR) conditions with primer set and annealing temperature. As a result of comparative evaluation of DNA extraction under various conditions, chemical cell lysis using buffer and proteinase K for 20 minutes and bead beating treatment were followed by using a commercial DNA extraction kit to efficiently extract DNA from the PM filter samples. To optimize the PCR conditions, PCR was performed using 10 primer sets for amplifying the ITS2 gene region. The concentration of the PCR amplicon was relatively high when the annealing temperature was 58℃ with the ITS3tagmix3/ITS4 primer set. Even under these conditions, when the concentration of the PCR product was low, nested PCR was performed using the primary PCR amplicon as the template DNA to amplify the ITS2 gene at a satisfactory concentration. Using the methods optimized in this study, DNA extraction and PCR were performed on 15 filter samples that collected PM2.5 in Seoul, and the ITS2 gene was successfully amplified in all samples. The optimized methods can be used for research on analyzing and interpreting the fungal metagenome of atmospheric PM samples.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.1
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• pp.88-92
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• 2023

The ferroelectricity in Hf_0.5Zr_0.5O₂ (HZO) thin films is one of the most interesting topics for next-generation nonvolatile memory applications. It is known that a crystallization process is required at a temperature of 400℃ or higher to form an orthorhombic phase that results in the ferroelectric properties of the HZO film. However, to realize the integration of ferroelectric HZO films in the back-end-of-line, it is necessary to reduce the annealing temperature below 400℃. This study aims to comprehensively analyze the ferroelectric properties according to the annealing temperature (350-500℃) and time (1-5 h) using a furnace as a crystallization method for HZO films. As a result, the ferroelectric behaviors of the HZO films were achieved at a temperature of 400℃ or higher regardless of the annealing time. At the annealing temperature of 350℃, the ferroelectric properties appeared only when the annealing time was sufficiently increased (4 h or more). Based on these results, it was experimentally confirmed that the optimization of the annealing temperature and time is very important for the ferroelectric phase crystallization of HZO films and the improvement of their ferroelectric properties.

• Membrane Journal
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• v.33 no.4
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• pp.191-200
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• 2023

Polyethersulfone (PES) is a widely employed membrane material for water and industrial purification applications owing to its hydrophilicity and ease of phase separation. However, PES membranes and filters prepared using the nonsolvent induced phase separation method often encounter significant flux decline due to pore clogging and cake layer formation on the dense membrane surfaces. Our investigation revealed that tight microfiltration or loose ultrafiltration membranes can be subject to physical fouling due to the formation of a dense skin layer on the bottom side caused by water intrusion to the gap between the shrank membrane and the substrate. To investigate the effect of the bottom surface porosity on membrane fouling, two membranes with the same selective layers but different sub-layer structures were prepared using single and double layer casting methods, respectively. The double layered PES membrane with highly porous bottom surface showed high flux and physical fouling tolerance compared to the pristine single layer membrane. This study highlights the importance of physical optimization of the membrane structure to prevent membrane fouling.

• International journal of advanced smart convergence
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• v.12 no.3
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• pp.89-103
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• 2023

Obstructive sleep apnea (OSA) is one of the most prevalent sleep disorders that can lead to serious consequences, including hypertension and/or cardiovascular diseases, if not treated promptly. Continuous positive airway pressure (CPAP) is widely recognized as the most effective treatment for OSA, which needs the proper titration of airway pressure to achieve the most effective treatment results. However, the process of CPAP titration can be time-consuming and cumbersome. There is a growing importance in predicting personalized CPAP pressure before CPAP treatment. The primary objective of this study was to optimize the CPAP titration process for obstructive sleep apnea patients through EEG feature engineering with machine learning techniques. We aimed to identify and utilize the most critical EEG features to forecast key OSA predictive indicators, ultimately facilitating more precise and personalized CPAP treatment strategies. Here, we analyzed 126 OSA patients' PSG datasets before and after the CPAP treatment. We extracted 29 EEG features to predict the features that have high importance on the OSA prediction index which are AHI and SpO2 by applying the Shapley Additive exPlanation (SHAP) method. Through extracted EEG features, we confirmed the six EEG features that had high importance in predicting AHI and SpO2 using XGBoost, Support Vector Machine regression, and Random Forest Regression. By utilizing the predictive capabilities of EEG-derived features for AHI and SpO2, we can better understand and evaluate the condition of patients undergoing CPAP treatment. The ability to predict these key indicators accurately provides more immediate insight into the patient's sleep quality and potential disturbances. This not only ensures the efficiency of the diagnostic process but also provides more tailored and effective treatment approach. Consequently, the integration of EEG analysis into the sleep study protocol has the potential to revolutionize sleep diagnostics, offering a time-saving, and ultimately more effective evaluation for patients with sleep-related disorders.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.43 no.3
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• pp.337-352
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• 2023

In general, Rainfall-Runoff model parameter set is optimized using the entire data to calculate unique parameter set. However, Korea has a large precipitation deviation according to the season, and it is expected to even worsen due to climate change. Therefore, the need for hydrological data considering seasonal characteristics. In this study, we conducted regional sensitivity analysis(RSA) using the conceptual Rainfall-Runoff model, GR4J aimed at the Soyanggang dam basin, and clustered combining the RSA results with hydrometeorological data using Self-Organizing map(SOM). In order to consider the climate characteristics in parameter estimation, the data was divided based on clustering, and a calibration approach of the Rainfall-Runoff model was developed by comparing the objective functions of the Global Optimization method. The performance of calibration was evaluated by statistical techniques. As a result, it was confirmed that the model performance during the Cold period(November~April) with a relatively low flow rate was improved. This is expected to improve the performance and predictability of the hydrological model for areas that have a large precipitation deviation such as Monsoon climate.

• Journal of Digital Convergence
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• v.20 no.3
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• pp.343-348
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• 2022

Recently, With the recent rapid development of technology, the amount of data generated by various systems is increasing, and enterprise servers and data centers that have to handle large amounts of big data need to apply high-stability and high-performance storage devices even if costs increase. In such systems, SSD(solid state disk) that provide high performance of read/write are often used as storage devices. However, due to the characteristics of reading and writing on a page-by-page basis, erasing operations on a block basis, and erassing-before-writing, there is a problem that performance is degraded when duplicate writes occur. Therefore, in order to delay this performance degradation problem, over-provision technology of SSD has been applied internally. However, since over-provided technologies have the disadvantage of consuming a lot of storage space instead of performance, the application of inefficient technologies above the right performance has a problem of over-costing. In this paper, we proposed a method of measuring the performance and cost incurred when various over-provisions are applied in an SSD and predicting the system-optimized over-provided ratio based on this. Through this research, we expect to find a trade-off with costs to meet the performance requirements in systems that process big data.

• The Journal of the Korea institute of electronic communication sciences
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• v.17 no.2
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• pp.265-278
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• 2022

The global energy paradigm is rapidly changing by centering on carbon neutrality, and wind energy is positioning itself as a leader in renewable energy-based power sources. The success of onshore and offshore wind energy projects focuses on securing the economic feasibility of the project, which depends on securing high-quality wind resources and optimal arrangement of wind turbines. In the process of constructing the wind farm, the optimal arrangement method of wind turbines considering the main wind direction is important, and this is related to minimizing the wake effect caused by the fluid passing through the structure located on the windward side. The accuracy of the predictability of the wake effect is determined by the wake model and modeling technique that can properly simulate it. Therefore, in this paper, using WindSim, a commercial CFD model, the wake diffusion pattern is analyzed through the sensitivity study of each wake model of the proposed onshore wind farm located in the mountainous complex terrain in South Korea, and it is intended to be used as basic research data for wind energy projects in complex terrain in the future.