• Electrical & Electronic Materials
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• v.9 no.5
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• pp.490-497
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• 1996

RF마그네트론 스파터링에 의한 $sSnO_2$ 박막을 증착한 결과 작동조건에 따라 표면에서 막손상이 발생하였는데, 이는 target에서 생성된 높은 에너지의 고속입자가 기판에서 직접 충돌로 일어나며, 마그네트론의 자계분포와도 관계된다. 또한 기판의 위치에 따라 박막의 전기적, 구조적 특성이 급격히 변하는데 본 논문은 중심자석의 세기와 RF power, 가스압력, 그리고 기판온도 등의 스파터링 작동조건을 변화시키면서 박막의 비손상을 검토하였고, 물성특성을 평가하였다. 실험결과로 부터 기판의 외축부에서 제작된 박막은 전반적으로 막손상이 없었고, 특히 target의 중심자석을 Cobalt로 설치하고 15 mTorr의 가스압력과 50 W의 RF power로 한 경우 가장 우수한 특성을 가진 박막을 얻을 수 있었다. 추가로 막손상을 방지하고자, 환원형의 masking glass를 target위에 설치하였는데, 고에너지 입자의 직접 충돌을 확실히 차단할 수 있었으며, 비저항율도 target의 부식부위 (erosion)에 대응하는 부분에서 100배 정도로 개선하였다.

• Transactions on Electrical and Electronic Materials
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• v.8 no.1
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• pp.1-4
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• 2007

This paper discusses two approaches for pre-polishing optimization of oxide chemical mechanical planarization (CMP) that can be used as alternatives to the commonly applied dummy structure insertion in shallow trench isolation (STI) and replacement gate (RG) technologies: reverse nitride masking (RNM) and oxide etchback (OEB). Wafers have been produced using each optimization technique and CMP tests have been performed. Dishing, erosion and global planarity have been investigated with the help of conductive atomic force microscopy (C-AFM). The results demonstrate the effectiveness of both techniques which yield excellent planarity without dummy structure related performance degradation due to capacitive coupling.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.7
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• pp.1280-1287
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• 2002

The old technique of sandblasting which has been used for decoration of glass surface has recently been developed into a powder blasting technique for brittle materials such as glass, silicon and ceramics, capable of producing micro structures larger than $100{\mu}$ m. This paper describes the performance of powder blasting technique in micro-line grooving of glass and the effect of the number of nozzle scanning on the depth and width of line groove. Experimental results showed that increasing the no. of nozzle scanning resulted in the increase of depth and width in grooves. Increase of width which may cause several problems in the precision machining results from wear of mask film. Therefore, well-controlled masking process is the most important factor for micro machining of glass with accuracy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.628-631
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• 2003

This study describes a new mastless nano-fabrication technique of Pyrex 7740 glass using the combination of nanomachining by nano-indenter XP and HF wet etching. First, the surface of a Pyrex 7740 glass specimen was machined by using the nano-machining system, which utilizes the mechanism of the nano-indenter XP. Next, the specimen was etched by HF solution. After the etching process, the convex structure or deeper hole is made because of masking or promotion effect of the affected layer generated by nano-machining. On the basis of this interesting fact. some sample structures were fabricated.

• Publications of The Korean Astronomical Society
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• v.8 no.1
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• pp.105-117
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• 1993

Astronomical plates have a very large density range (dynamical range). Many exposed astronomical photographic plates do not provide detailed structures for very high densities, and some include hidden images for very low densities. The former can be fixed through 'Unsharp Masking' technique and the latter through 'Image Amplification' technique. Besides, we can find intrinsic colors of celestial bodies through 'Tri Color Composition' technique. Images of several plates which were observed from Sobaek Observatory with 61cm telescope are reproduced by the three kinds of image reproducing techniques. As reproduced image examples, we display an Orion nebula and a waxing crescent moon images through unsharp masking technique and an M81 image through image amplification technique. An Orion nebula and a Dumbbell nebula images are also given as results of tri color composition technique.

• Journal of Broadcast Engineering
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• v.1 no.1
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• pp.62-66
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• 1996

In this paper, we consider a signal masking structure based on the Lorenz system, which uses a feedback path of the information signal in the transmitter system. The scheme recovers the information signal exactly at the receiver, and can be used with increased amplitude information signal. The scrambling property of the scheme is also investigated by computer simulations, from which the performance is show to be better than that of the conventional method.

• Communications for Statistical Applications and Methods
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• v.7 no.3
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• pp.667-676
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• 2000

This paper focuses on the problem of detecting multiple leverage points and outliers in multivariate linear models. It is well known that he identification of these points is affected by masking and swamping effects. To identify them, Rousseeuw(1985) used robust estimators of MVE(Minimum Volume Ellipsoids), which have the breakdown point of 50% approximately. And Rousseeuw and van Zomeren(1990) suggested the robust distance based on MVE, however, of which the computation is extremely difficult when the number of observations n is large. In this study, e propose a new algorithm to reduce the computational difficulty of MVE. The proposed method is powerful in identifying multiple leverage points and outlies and also effective in reducing the computational difficulty of MVE.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.10
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• pp.178-183
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• 2001

Abrasive jet machining(AJM) process is similar to the sand blasting and effectively removes hard and brittle materials. AJM has applied to rough working such as debarring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro AJM is developed, and has become the inevitable technique to micromachining. This paper describes the performance of the micro AJM in micro grooving of glass. Diameter of hole and width of line in grooving is 80${\mu}{\textrm}{m}$. Experimental results showed good performance in micro grooving of glass, but the size of machined groove increased about 2~4${\mu}{\textrm}{m}$. With the fine tuning of masking process and compensation of film wear. this micro AJM could be effectively applied to the micro machining of semiconductor, electronic devices and LCD.

• Journal of the Korean Statistical Society
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• v.36 no.4
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• pp.457-469
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• 2007

Many procedures are available to identify a single outlier or an isolated influential point in linear regression and logistic regression. But the detection of influential points or multiple outliers is more difficult, owing to masking and swamping problems. The multiple outlier detection methods for logistic regression have not been studied from the points of direct procedure yet. In this paper we consider the direct methods for logistic regression by extending the $Pe\tilde{n}a$ and Yohai (1995) influence matrix algorithm. We define the influence matrix in logistic regression by using Cook's distance in logistic regression, and test multiple outliers by using the mean shift model. To show accuracy of the proposed multiple outlier detection algorithm, we simulate artificial data including multiple outliers with masking and swamping.

• Speech Sciences
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• v.4 no.2
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• pp.5-15
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• 1998

This paper proposes a speech state-dependent spectral subtraction method to regulate the blind spectral subtraction for improved enhancement. In the proposed method, a modified subtraction rule is applied over the speech selectively contingent to the speech state being voiced or unvoiced, in an effort to incorporate the acoustic characteristics of phonemes. In particular, the objective of the proposed method is to remedy the subtraction induced signal distortion attained by two state-dependent procedures, spectrum sharpening and minimum spectral bound. In order to remove the residual noise, the proposed method employs a procedure utilizing the masking effect. Proposed spectral subtraction including state-dependent subtraction and residual noise reduction using the masking threshold shows effectiveness in compensation of spectral distortion in the unvoiced region and residual noise reduction.