• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.6
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• pp.521-526
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• 2005

Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.182-183
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• 2014

Hemispherical dimples with diameter, ø=$60{\mu}m$ and depth, d= $30{\mu}m$ were created on the metal and ceramics surfaces using INYA 10 watt Laser of 1064 nm wavelength. This study reports the influence of dimple pitch on friction and wear behavior rather than dimple size, depth and density. LST was performed on the specimens with dimple pitch and density in the range of 80 to-$200{\mu}m$ and 44 to 7 %, respectively. Surface topography was analyzed by using roughness measurement, scanning electron microscopy (SEM), and optical microscopy. Friction and wear characteristics were analyzed on textured surfaces at lubricating environment to observe the effect of surface texturing on reduction of friction and wear. Reduction on coefficient of friction was achieved by more than 70% due to the dual behavior of dimples as wear (debris) traps and lubricant reservoirs. Wear reduced significantly for the textured surface as compared to the polished surface. Moreover, the friction coefficient of the textured specimens reduced with increasing load and speed which may be attributed to the transition of lubrication regime.

• Tribology and Lubricants
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• v.34 no.6
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• pp.235-240
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• 2018

Superlubricity refers to the lubrication phenomenon that occurs when the friction coefficient is lower than 0.01. In recent years, this phenomenon has received a significant amount of attention because it can greatly contribute to the reduction of economic and environmental losses caused by friction and wear. In the case of acid lubricants, only ceramic materials can be used for superlubricity, and it takes a long running-in period to enter the superlubricity regime. In this work, we investigated the superlubricity effect of vitreous enamel coating on SUS304. We also examined the running-in period of vitreous enamel coating under phosphoric acid lubricant condition with respect to surface treatments. Drying and polishing methods were used to treat the vitreous enamel coating on the specimen. The friction experimental results revealed that superlubricity could be achieved with vitreous enamel coating. It was also found that the drying and polishing methods can significantly reduce the running-in period and improve the wear properties of vitreous enamel coating. In particular, the polishing method shortened the running-in period by approximately 99% and reduced the wear rate by approximately 99%, compared to nontreated vitreous enamel coating.