• Title/Summary/Keyword: low-dielectric materials

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Dependence of Ozone Generation in a Micro Dielectric Barrier Discharge on Dielectric Material and Micro Gap Length

  • Sakoda, Tatsuya;Sung, Youl-Moon
    • KIEE International Transactions on Electrophysics and Applications
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    • v.4C no.5
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    • pp.201-206
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    • 2004
  • In order to investigate the optimum conditions for the effective ozone formation in a dielectric barrier discharge, measurements of ozone concentration were carried out for various conditions such as the gap length, the dielectric material and the operating gas. It was found that the optimum discharge conditions differed exceedingly in the types of operating gases and dielectric materials. In dry air, dielectric material with low dielectric constant and thermal conductivity, which might contribute to the restriction of the gas temperature rise in the discharge region, proved effective in obtaining both high ozone yield and concentration. The optimum gap length was considered to be in the range of 600-800 mm. In oxygen, using a quartz glass disk as a dielectric material, the required condition to obtain the high ozone yield and concentration was expanded.

Comparative Measurements and Characteristics of Cu Diffusion into Low-Dielectric Constant para-xylene based Plasma Polymer Thin Films

  • Kim, K.J.;Kim, K.S.;Jang, Y.C.;Lee, N.-E.;Choi, J.;Jung, D.
    • Journal of the Korean institute of surface engineering
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    • v.34 no.5
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    • pp.475-480
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    • 2001
  • Diffusion of Cu into the low-k para-xylene based plasma polymer (pXPP) thin films deposited by plasma-enhanced chemical vapor deposition using the para-xylene precursor was comparatively measured using various methods. Cu layer was deposited on the surfaces of pXPPs treated by $N_2$ plasma generated in a magnetically enhanced inductively coupled plasma reactor. Diffusion characteristics of Cu into pXPPs were measured using Rutherford backscattering spectroscopy (RBS), secondary ion mass spectroscopy (SIMS), cross-sectional transmission electron microscopy (XTEM), and current-voltage (I-V) measurements for the vacuum-annealed Cu/pXPPs for 1 hour at $450^{\circ}C$ and were compared. The results showed a correlation between the I-V measurement and SIMS data are correlated and have a sensitivity enough to evaluate the dielectric properties but the RBS or XTEM measurements are not sufficient to conclude the electrical properties of low-k dielectrics with Cu in the film bulk. The additional results indicate that the pXPP layers are quite resistant to Cu diffusion at the annealing temperature of $450^{\circ}C$ compared to the other previously reported organic low-k materials.

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Development of Atomic Nitrogen Source Based on a Dielectric Barrier Discharge and Low Temperature Growth GaN (유전체장벽방전에 의한 질소함유 활성종의 개발 및 저온 GaN 박막 성장)

  • Kim, Joo-Sung;Byun, Dong-Jin;Kim, Jin-Sang;Kum, Dong-Wha
    • Korean Journal of Materials Research
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    • v.9 no.12
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    • pp.1216-1221
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    • 1999
  • GaN films were deposited on sapphire [$Al_2O_3(0001)$] substrates at relatively low temperature by MOCVD using N-atom source based on a Dielectric Barrier Discharged method. Ammonia gas($NH_3$is commonly used as an N-source to grow GaN films in conventional MOCVD process, and heating to high temperature is required to provide sufficient dissociation of $NH_3$. We used a dielectric barrier discharge method instead of $NH_3$ to grow GaN film relatively low temperature. DBD is a type of discharge, which have at least one dielectric material as a barrier between electrode. DBD is a type of controlled microarc that can be operated at relatively high gas pressure. Crystallinity and surface morphology depend on growth temperature and buffer layer growth. With the DBD-MOCVD method, wurtzite GaN which is dominated by the (0001) reflection was successfully grown on sapphire substrate even at $700^{\circ}C$.

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Advanced Low-k Materials for Cu/Low-k Chips

  • Choi, Chi-Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.71-71
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    • 2012
  • As the critical dimensions of integrated circuits are scaled down, the line width and spacing between the metal interconnects are made smaller. The dielectric film used as insulation between the metal lines contributes to the resistance-capacitance (RC) time constant that governs the device speed. If the RC time delay, cross talk and lowering the power dissipation are to be reduced, the intermetal dielectric (IMD) films should have a low dielectric constant. The introduction of Cu and low-k dielectrics has incrementally improved the situation as compared to the conventional $Al/SiO_2$ technology by reducing both the resistivity and the capacitance between interconnects. Some of the potential candidate materials to be used as an ILD are organic and inorganic precursors such as hydrogensilsequioxane (HSQ), silsesquioxane (SSQ), methylsilsisequioxane (MSQ) and carbon doped silicon oxide (SiOCH), It has been shown that organic functional groups can dramatically decrease dielectric constant by increasing the free volume of films. Recently, various inorganic precursors have been used to prepare the SiOCH films. The k value of the material depends on the number of $CH_3$ groups built into the structure since they lower both polarity and density of the material by steric hindrance, which the replacement of Si-O bonds with Si-$CH_3$ (methyl group) bonds causes bulk porosity due to the formation of nano-sized voids within the silicon oxide matrix. In this talk, we will be introduce some properties of SiOC(-H) thin films deposited with the dimethyldimethoxysilane (DMDMS: $C_4H_{12}O_2Si$) and oxygen as precursors by using plasma-enhanced chemical vapor deposition with and without ultraviolet (UV) irradiation.

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Preparation, Characterization and Low Frequency a.c. Conduction of Polypyrrole-Lead Titanate Composites

  • Basavaraja, C.;Choi, Young-Min;Park, Hyun-Tae;Huh, Do-Sung;Lee, Jae-Wook;Revanasiddappa, M.;Raghavendra, S.C.;Khasim, S.;Vishnuvardhan, T.K.
    • Bulletin of the Korean Chemical Society
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    • v.28 no.7
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    • pp.1104-1108
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    • 2007
  • Conducting Polypyrrole-lead titanate (PPy/PbTiO3) composites have been prepared by in situ deposition technique by placing different wt.% of fine grade powder of PbTiO3 (10, 20, 30, 40, and 50%) during polymerization of pyrrole. The composites formed were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and thermogravimetric analysis (TGA), and these data indicate that PbTiO3 particles are dominating with an increase in crystallinity as well as thermal stability of the composites. The results on the low frequency dielectric studies which are obtained in the form of pressed pellet state are interpreted in terms of Maxwell Wagner polarization, which are responsible for the dielectric relaxation mechanism and frequency dependence of conductivity.

Binary Mixture Rule for Predicting the Dielectric Properties of Unidirectional E-glass/Epoxy Composite Materials (일방향 유리섬유/에폭시 복합재료의 유전성질 예측을 위한 혼합법칙)

  • Chin Woo Seok;Lee Dai Gil
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2004.10a
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    • pp.175-179
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    • 2004
  • Since the electromagnetic properties of fiber reinforced polymeric composites can be tailored effectively by adding small amount of electromagnetic powders to the matrix of composites, they are plausible materials for fabricating the radar absorbing structures (RAS) of desired performance. In order to design the effective electromagnetic wave (EM) absorber with the fiber reinforced polymeric composites, the electromagnetic characteristics with respect to the constituents of the composite should be available in the target frequency band. In order to describe the dielectric behavior of low loss unidirectional fiber reinforced composite, theoretical models and mixture equations for estimating its dielectric constant were proposed with respect to the fiber, matrix volume fractions and fiber orientations, and verified by the experiments. From the investigation, it was found that the suggested binary mixture rules agreed well with the experimental results.

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Temperature-dependent dielectric relaxation in ITO/Alq3/Al organic light-emitting diodes

  • Ahn, Joonho;Kim, Tae Wan;Lee, Won Jae
    • Journal of Ceramic Processing Research
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    • v.13 no.spc2
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    • pp.163-165
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    • 2012
  • Impedance spectroscopy informs electrical properties of materials as accumulated charges, contact status between electrode and organic materials. We carried out impedance spectroscopy of organic light-emitting diodes as ITO/Alq3(60 nm)/Al on temperatures from 10 K to 300 K. The result described Z'-Z" plot, cole-cole plot and dielectric relaxation time τ. Z'-Z" plot means that real and imaginary part of materials in organic and electrode by frequencies and temperature. Z' as real part of impedance by applied frequency depending on temperature shows the plateau in low frequency region as Rs+ Rp and over 100 kHz in high frequency region as Rs. Cole-cole plot shows resistance of materials in equivalent circuit of the device by temperatures. And equivalent circuit and dielectric relaxation could be accomplished by using the complex impedance analysis.

Effect of the Front Dielectric Layer on the Efficacy of the Plasma Display Panel

  • Moon, Won-Seok;Oh, Jin-Mok;Seo, Byung-Hwa;Lee, Sung-Wook;Byun, Na-Mi;Cho, Yun-Hui;Ryu, Byung-Gil;Kim, Sung-Tae
    • 한국정보디스플레이학회:학술대회논문집
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    • 2009.10a
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    • pp.31-34
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    • 2009
  • We investigated the effect of relative dielectric constant of front dielectric layer on the efficacy of plasma display panel. Dielectric materials with relative dielectric constant of around 6 and 7 were developed. When the front dielectric layer had a low relative dielectric constant, power consumption decreased more than luminance did. And it led to efficacy enhancement. However, the minimum sustain voltage increased.

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Characterization of Water Vapor Transmission & Dielectric Breakdown in Insulation Materials for Jacket Compound (자켓 컴파운드용 절연재의 수증기투과 및 절연파괴 특성)

  • Song, Jae-Joo;Han, Jae-Hong;Song, IL-Keun;Han, Yong-Hee;Han, Byung-Sung
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.52-56
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    • 2001
  • Experiments of 2 type on insulating compounds accomplished to change PVC using in URD(Underground) power cable jacketing. one was DB (Dielectric Breakdown) test on the pure base resins and the others were WVT(Water Vapor Transmission) test on the compounds which contained C/B(Carbon Black), anti-oxidant to base resin. a kind of specimens made by pressing to resin of pellet or lump form was HDPE(High Density Polyethylene), MDPE(Medium Density Polyehylene), LDPE(Low Density Polyethylene), LLDPE(Linear Low Density Polyethylene), PVC (Polyvinyl Chloride). As a results of AC DB and WVT test, we saw that strength of Insulation was HDPE > LLDPE ≒ MDPE > LDPE and WVT ratio was HDPE < LLDPE < MDPE < LLDPE ≒ LDPE${\ll}$PVC. WVT of PVC using for jacket showed characteristic 15 times more than MDPE or LLDPE. Therefore, to development of watertightness cable, our works present need of Changing in insulating materials

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Relationships between dielectric properties and characteristics of impregnated and activated samples of potassium carbonate-and sodium hydroxide-modified palm kernel shell for microwave- assisted activation

  • Alias, Norulaina;Zaini, Muhammad Abbas Ahmad;Kamaruddin, Mohd Johari
    • Carbon letters
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    • v.24
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    • pp.62-72
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    • 2017
  • The aim of this work was to evaluate the dielectric properties of impregnated and activated palm kernel shells (PKSs) samples using two activating agents, potassium carbonate ($K_2CO_3$) and sodium hydroxide (NaOH), at three impregnation ratios. The materials were characterized by moisture content, carbon content, ash content, thermal profile and functional groups. The dielectric properties were examined using an open-ended coaxial probe method at various microwave frequencies (1-6 GHz) and temperatures (25, 35, and $45^{\circ}C$). The results show that the dielectric properties varied with frequency, temperature, moisture content, carbon content and mass ratio of the ionic solids. PKSK1.75 (PKS impregnated with $K_2CO_3$ at a mass ratio of 1.75) and PKSN1.5 (PKS impregnated with NaOH at a mass ratio of 1.5) exhibited a high loss tangent ($tan{\delta}$) indicating the effectiveness of these materials to be heated by microwaves. $K_2CO_3$ and NaOH can act as a microwave absorber to enhance the efficiency of microwave heating for low loss PKSs. Materials with a high moisture content exhibit a high loss tangent but low penetration depth. The interplay of multiple operating frequencies is suggested to promote better microwave heating by considering the changes in the materials characteristics.