• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2009년 춘계학술대회논문집
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• pp.227-231
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• 2009

Traditional vacuum cleaner adoptsa highly rotating centrifugal impeller for generating suction region at lower pressure. The rotational speed is very high at 35,000 to 40,000 rpm and accessory structure such as a circular brush at the base plate of the cleaning devices is equipped for gathering dusts. Highly rotating impeller is effective for low pressure generation but causes noise problems. Recently, the unwanted noise is removed by installation of air-pump, instead of a centrifugal impeller, and the internal flows of the modified system are estimated in numerical and experimental approach, respectively.

• Applied Science and Convergence Technology
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• 제24권4호
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• 한국진공학회지
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• 제9권1호
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• pp.7-15
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• 2000

An ECR-PECVD system with the characteristics of high ionization rat다 ability of plasma processing in a wide pressure range and deposition at low temperature was manufactured and characterized for the deposition of thin films. The system consists of a vacuum chamber, sample stage, vacuum gauge, vacuum pump, gas injection part, vacuum sealing valve, ECR source and a control part. The control of system is carried out by the microprocessor and the ROM program. We have investigated the vacuum characteristics of ECR-PECVD system, and also have diagnosed the characteristics of ECR microwave plasma by using the Langmuir probe. From the data of system and plasma characterization, we could confirmed the stability of pressure in the vacuum chamber according to the variation of gas flow rate and the effect of ion bombardment by the negative DC self bias voltage. The plasma density was increased with the increase of gas flow rate and ECR power. On the other hand, it was decreased with the increase of horizontal radius and distance between ECR source and probe. The calculated plasma densities were in the range of 49.7\times10^{11}\sim3.7\times10^{12}\textrm{cm}^{-3}$. It is also expected that we can estimate the thickness uniformity of film fabricated by the ECR-PECVD system from the distribution of the plasma density.

• 한국진공학회지
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• 제19권4호
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• pp.243-248
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• 2010

진공용 기체 유동측정 표준기로 사용하고자 소닉노즐을 ISO 9300에서 제시한 사양에 맞추어 목직경 0.03 mm와 0.2 mm의 소닉 노즐을 제작하였다. 한국표준과학연구원에서 진공용 유량측정 장치로 개발된 정적형 유량계를 이용하여 제작된 2종의 소닉노즐의 유출계수를 확장불확도 3% 이내로 교정하였다. 교정된 소닉노즐의 유량 측정범위는 약 0.6~1,800 cc/min 범위를 갖는 것으로 나타났으며, 사용유동 조건에 해당되는 레이놀드 수(Reynolds number) 범위는 26~12,100으로 확인되었다. 이러한 결과는 교정된 소닉노즐을 이용하여 진공공정에서 필요한 극 미세 유량의 정밀측정을 가능하게 한 새로운 연구결과로 판단된다. 교정된 소닉노즐을 이용하여 진공펌프의 배기속도 측정결과는 기 구축된 정적법을 이용한 배기속도 측정결과와 1% 이내의 오차범위내로 매우 잘 일치함을 보였다. 교정된 소닉노즐은 향후 반도체 및 디스플레이 공정에 사용되는 다양한 건식 진공펌프들의 배기속도를 현장에서 간단하게 평가할 수 있는 현장 성능평가 장치에 활용할 예정이며, 현재 공정현장에서 배기속도 측정에 널리 사용중인 MFC를 대체할 수 있을 것으로 예상된다.

• 한국진공학회지
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• 제16권6호
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• pp.483-488
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• 2007

KSTAR (Korea Superconducting Tokamak Advanced Research) 전류전송계 (Current Feeder System)는 4.5 K의 저온에서 운전되는 초전도자석과 300 K의 실온에서 운전되는 전원장치 (Magnet Power Supply)를 전기적으로 연결하는 장치이다. 전류전송계는 최대 35 kA의 DC 전류가 인가되는 TF 자석용 및 350초간 20$\sim$26 ㎄의펄스 전류가 인가되는 PF 자석용으로 분리되어 있으며 리드박스 내부는 전류인입선, 초전도버스라인, 열차폐체 및 냉각라인 등이 설치되어 있다. 리드박스와 초전도버스라인 진공덕트는 KSTAR 주장치와는 별도로 진공배기 시스템이 구축되어있으며, 전체적으로 아령 형상을 하고 있는 진공공간을 효율적으로 진공배기하기 위하여 버스라인 덕트와 주장치 저온용기 사이에 진공 분리막 (Vacuum Separator)이 설치되어 있다. 진공배기를 위한 초벌배기계는 로터리펌프 및 부스터펌프 (Mechanical Booster Pump)로 구축되었으며 고진공 배기계는 4대의 크라이오펌프 (Cryo-pump)로 구축되었다. 진공장치 운전을 위해 PLC 기반의 로컬 제어시스템을 구축하였고 장치 안전을 위한 자체 인터록과 중앙인터록 시스템 및 중앙제어연계시스템이 함께 구축되어 있다. 전류전송계 설치완료 후 진공배기 시운전을 통해 배기시스템의 자가진단 및 리드박스 내부에 설치되어 있는 헬륨배관의 진공누설검사를 완료하였으며, 액체질소를 사용하여 전류인입선 냉각시험을 완료하였다.

• 한국초전도ㆍ저온공학회논문지
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• 제24권4호
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• pp.71-77
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• 2022

Sub-Kelvin cooling has been generally demanded for the fields of low temperature physics, such as physical property measurements, astronomical detection, and quantum computing. The refrigeration system with a small size can be appropriately introduced when the measurement system does not require a high cooling capacity at sub-Kelvin temperature. The dilution refrigerator which is a common method to reach sub-Kelvin, however, must possess a large ³He circulation equipment at room temperature. As alternatives, a sorption refrigerator and a magnetic refrigerator can be adopted for sub-Kelvin cooling. This paper describes those coolers which have been developed by various research groups. Furthermore, a cold-cycle dilution refrigerator of which the size of the ³He circulation system is minimized, is also introduced. Subsequently, a new concept of dilution refrigerator is proposed by our group. The suggested cooler can achieve sub-Kelvin temperature with a small size since it does not require any recuperator and turbo-molecular vacuum pump. Its architecture allows the compact configuration to reach sub-Kelvin temperature by integrating the sorption pump and the magnetic refrigerators. Therefore, it may be suitably utilized in the low temperature experiments requiring low cooling capacity.

• 한국기술혁신학회:학술대회논문집
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• 한국기술혁신학회 2004년도 정기총회 및 추계학술대회 논문집
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• pp.617-624
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• 2004

• Tribology and Lubricants
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• 제14권4호
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• pp.7-14
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• 1998

A correlation between the low-cycle fatigue life and the scuffing-failure life is demonstrated using the plastic strain increment in boundary lubricated sliding. Loadings proportional to hardness with three different lubricated conditions were used to evaluate the plastic strain increments. As the results of scuffing tests using vacuum pump oils in nitrogen gas, plastic strain increment shows 0.0062, and in the mineral oils and commercial engine oils in air, plastic strain increments show 0.0042 and 0.00092. Those are very useful to describe quantitatively the real lubricated sliding conditions, and are very effective to find the relation between the low-cycle fatigue life and the scuffing-failure life.

• Applied Biological Chemistry
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• 제41권8호
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• pp.583-586
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• 1998

Porous ceramic cups are used for monitoring ion concentration in soil solutions in various time course and depth. A soil solution sampler was constructed in laboratory by inserting pliable perfluoroalkoxy(PFA) tubings into porous cup through holes in PVC rod segment which plugged top opening of the porous cup. The system was installed in drip irrigated soil in a vertical position, and nitrogen movement below the drip basin was monitored. To collect soil solution, vacuum in the cup was applied with a hand vacuum pump. The samples obtained were sufficient enough to run quantitative analyses for a number of chemicals. Nitrogen transformation and movement could be well defined, and the system seemed to be relevant to the other soil solution samplers in monitoring chemical movement in soil. Although this system has general deficiencies found in the other samplers using ceramic cup, it could be easily constructed at a low cost. Since the tubing was pliable, the cups could be installed in horizontal position, and this allows installations of the cups at more precise depth increments and also more precise samplings of soil solution at each depth.

• 한국추진공학회지
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• 제4권4호
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• pp.26-35
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• 2000

본 연구에서는 어떤 2차목을 가지는 축대칭 아음속/음속 이젝터 유동을 조사하기 위하여, 수치해석법을 이용하였다. 수치계산은 2차 정체실에서 이젝터 디퓨저 출구까지의 넓은 계산영역에 대하여, 압축성 Reynolds-Averaged Navier-Stokes방정식에 완전 음적 유한 체적법을 적용하였다. 축대칭 아음속/음속 이젝터 시스템에 대한 실용적 설계 인자를 얻기 위해서, 이젝터 목면적, 혼합부의 형상, 그리고 이젝터 목 길이를 변화시켜, 비교적 낮은 작동압력비로 운전되는 이젝터 유동특성의 변화를 조사하였다 계산 결과들은 2차 정체실의 진공성능에 미치는 작동압력비와 아젝터 형상의 영향을 조사하는데 활용되었다.