• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.67-67
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• 2009

Due to the scaling down of the dielectrics thickness, the leakage currents arising from electron tunneling through the dielectrics has become the major technical barrier. Thus, much works has focused on the development of high k dielectrics in both cases of memories and CMOS fields. Among the high-k materials, $Al_2O_3$ considered as good candidate has been attracting much attentions, which own some good properties as high dielectric constant k value (~9), a high bandgap (~2eV) and elevated crystallization temperature, etc. Due to the easy control of ion energy and flux, low ownership and simple structure of the inductively coupled plasma (ICP), we chose it for high-density plasma in our study. And the $BCl_3$ was included in the gas due to the effective extraction of oxygen in the form of BClxOy compound. In this study, the etch characteristic of ALD deposited $Al_2O_3$ thin film was investigated in $BCl_3/N_2$ plasma. The experiment were performed by comparing etch rates and selectivity of $Al_2O_3$ over $SiO_2$ as functions of the input plasma parameters such as gas mixing ratio, DC-bias voltage and RF power and process pressure. The maximum etch rate was obtained under 15 mTorr process perssure, 700 W RF power, $BCl_3$(6 sccm)/$N_2$(14 sccm) plasma, and the highest etch selectivity was 1.9. We used the x-ray photoelectron spectroscopy (XPS) to investigate the chemical reactions on the etched surface. The Auger electron spectroscopy (AES) was used for elemental analysis of etched surface.

• 대한심미치과학회지
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• 제3권1호
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• pp.32-43
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• 1995

Ni-Ti alloy has excellent corrosion resistance, biocompatibility, shape memory effect and superelasticity, so it has been used widely in biomedical fields. But it has difficulty in casting due to its high melting temperature and oxygen affinity at high temperature. Recently it has been attempted to cast Ni-Ti alloy using new casting machine and investment. The purpose of this study was to examine the superelastic behavior of cast shape memory Ni-Ti alloy and to compare the mechanical properties of the cast shape memory alloy with those of commercial alloys for removable partial denture framework. Ni-Ti alloy(Ni 50.25%, Ti 49.75% : atomic ratio) was cast with dental argon-arc pressure casting machine and Type IV gold alloy, Co-Cr alloy, Ni-Cr alloy, pure titanium were cast as reference. Experimental cast Ni-Ti alloy was treated with heat($500{\pm}2^{\circ}C$) in muffle furnace for 1 hour. Transformation temperature range of cast Ni-Ti alloy was measured with differential scanning calorimetry. The superelastic behavior and mechanical properties of cat Ni-Ti alloy were observed and evaluated by three point bending test, ultimate tensile test, Vickers microhardness test and scanning electron microscope. The results were as follows : 1. Cast Ni-Ti alloy(Ni 50.25%, Ti 49.75% : atomic ratio) was found to have superelastic behavior. 2. Stiffness of cast Ni-Ti alloy was considerably lesser than that of commercial alloys for removable partial denture. 3. Permanent deformation was observed in commercial alloys for removable partial denture framework at three point bending test over proportional limit(1.5mm deflection), but was not nearly observed in cast Ni-Ti alloy. 4. On the mechanical properties of ultimate tensile strength, elongation and Vickers microhardness number, cast Ni-Ti alloy was similiar to Type IV gold alloy, Co-Cr alloy, Ni-Cr alloy and pure titanium. With these results, cast Ni-Ti alloy had superelastic behavior and low stiffness. Therefore, it is suggested that cast Ni-Ti alloy may be applicated to base metal alloy for removable partial denture framework.

• 공업화학
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• 제9권6호
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• pp.878-883
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• 1998

Pd-ZSM-5 촉매 상에서 메탄의 연소반응을 수행하였다. 담체는 저온상압법으로 합성한 ZSM-5를 이용하였다. 담체인 ZSM-5의 $SiO_2/Al_2O_3$ 몰비 변화에 따른 메탄의 전환율 변화를 조사해 보았다. 그리고 합성한 Pd-ZSM-5 촉매의 메탄 전환율을 상업화된 Pd-ZSM-5(PQ Co.) 및 $PdO/{\gamma}-Al_2O_3$와 비교하여 보았다. $SiO_2/Al_2O_3$ 몰비 변화에 따른 메탄의 연소반응실험 결과 $SiO_2/Al_2O_3$ 몰비가 작을수록 높은 메탄의 전환율을 보였으며, Pd을 정량화시켜 메탄의 연소속도를 비교한 결과, 역시 $SiO_2/Al_2O_3$ 몰비가 작을수록 빠르게 나타났다. 합성한 Pd-ZSM-5가 상업화된 Pd-ZSM-5(PQ Co.)보다 우수한 메탄 전환율을 나타냈다. 촉매 특성 분석 결과들로부터 메탄의 연소반응에서 촉매에 흡착하는 산소의 결합세기가 반응속도에 매우 큰 영향을 미침을 알 수 있었다.

• 한국초등과학교육학회지:초등과학교육
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• 제26권4호
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• pp.359-371
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• 2007

The purpose of this study was to investigate elementary school students' conceptions of gas and analyse the type of alternative conceptions of gas which students constructed. To appreciate the conceptions formed by elementary school students on this topic, 173 sixth grade students from an elementary school located in Suwon participated in this study. Additionally, their conceptions and their alternative conceptions of gas represented by the questionnaires were analyzed. The questionnaires consisted of 11 questions related to the conception of gas. To analyze the types of alternative conceptions which presented themselves, constructed prototypes were generated by interviewing the students themselves. From our results, we suggest that sixth grade elementary school students have various conceptions of gas and tend to think that gas is weighty, and that gaseous volume decreases by pressure. However, their conceptions of gas melting in water were very low, as only about 16% of students were aware of this scientific conception. Students who did not understand precisely the conception of the nature of oxygen, carbon dioxide and hydrogen were over 20%. The results of the interviews showed that the construction of alternative conceptions of gas was affected by various and complex causes.

• 한국자동차공학회논문집
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• 제17권5호
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• pp.39-45
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• 2009

An experimental research with 2.0 liter 4-cylinder turbocharged diesel engine was carried out to investigate the combustion and emission characteristics for various alternative fuels. The conventional diesel fuel, neat GTL, blends of 80% of GTL and 20% of biodiesel derived from waste cooking oil are utilized without any modification of engine hardware and ECU data. For GTL and blends of GTL/biodiesel fuel, the ignition delay decreased at the same operating conditions, and overall combustion duration increased slightly. Also, the peak cylinder pressure increased for blends of GTL/biodiesel compared to diesel and GTL fuel. THC and CO emissions with blends of GTL/biodiesel compared to other fuels decreased for the low and middle load conditions. But NOx emission increased due to oxygen content in biodiesel. The number concentrations of PM are higher for blends of GTL/biodiesel than other test fuels in the nucleation mode, while it had an opposite tendency in the accumulation mode, which implies more reduction of PM for blends of GTL/biodiesel on the base of mass concentration.

• 폴리머
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• 제26권3호
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• pp.389-399
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• 2002

단파장 자외선을 이용하여 폴리에틸렌테레프탈레이트(PET) 섬유 표면의 화학적 성질을 개질 하였다. 자외선 조사에 의하여 PET 섬유의 화학결합이 절단되어 섬유표면에 COOH기가 생성되고 자외선 조사시간에 비례하여 COOH기가 증가함을 FT-IR과 XPS 분석에 의하여 확인하였으며 XPS측정을 통하여 PET 섬유 표면에 생성된 COOH기가 12개월후에도 변화가 없음을 알 수 있었다. 또한 자외선 조사 PET 섬유에 기능성을 부여하기 위하여 사용한 친수성의 양이온성 천연화합물이, 자외선 조사 PET 섬유에 용이하게 흡착되는 현상으로부터 자외선 조사에 의하여 PET 섬유표면에 음이온성을 나타내는 COOH기가 존재함을 흡착실험을 통하여 확인하였다. 항균성 및 소취성을 측정한 결과 자외선 조사시간이 30분 이상인 경우에 99% 이상의 항균성과 75% 이상의 소취성을 나타내는 기능성 PET 섬유의 제조가 가능하였다.

• Tuberculosis and Respiratory Diseases
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• 제69권4호
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• pp.243-249
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• 2010

Background: Chronic obstructive pulmonary disease (COPD) is one of the leading causes of disability and mortality worldwide. The aim of this study was to evaluate the risk factors associated with recurrent hospital admissions for exacerbation of COPD in Korea. Methods: A retrospective study of 77 consecutive patients hospitalized for exacerbation of COPD at Pusan National University Hospital during the time period January 2005 to May 2008 was performed. The information was collected from the hospitalization period: clinical information, spirometric measures, and laboratory variables. In addition, socioeconomic characteristics, co-morbidity, anxiety, and depression were reviewed. Frequent readmission was defined as 2 or more hospitalizations in the year following discharge. Results: During the 1-year period after discharge, 42 patients (54.6%) reported one hospital admission and 35 patients (45.4%) reported 2 or more hospital readmissions. Among the 35 frequent readmission patients, 4 had more than 10 readmissions. Univariate analysis showed that a body mass index (BMI) <$18.5kg/m^2$, duration >36 months, forced expiratory volume in 1 second ($FEV_1$) <50% predicted, arterial $CO_2$ partial pressure ($PaCO_2$) >40 mm Hg, and arterial oxygen saturation ($SaO_2$) <95% at discharge were associated significantly with frequent readmissions. The multivariate analysis revealed that BMI <$18.5kg/m^2$, $PaCO_2$ >40 mm Hg at discharge were independently associated with frequent readmissions for exacerbation of COPD. Conclusion: Frequent readmissions for exacerbation of COPD were associated with low BMI and hypercapnia at discharge.

• 한국환경과학회지
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• 제15권7호
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• pp.669-676
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• 2006

PAHs are major pollutants that are widely distributed in soil and groundwater environment, so that may be regarded as carcinogens. We investigated the degradation kinetics of PAH in aqueous solution when low pressure UV energy and ultrasonic irradiation were applied. Phenanthrene and pyrene were used as model compounds. The degrees of degradation of these compounds with time were analyzed with a GC/MSD (SIM-mode). UV photolysis experiments showed that phenanthrene was reduced by 90 -67% at initial concentrations of 1 ppm to 8ppm whilst it decreased to 50% at 10 ppm. Under the same conditions pyrene was degraded up to about 75% at lower initial concentrations but the reduction efficiency dropped to a level of 34 to 29% at the higher concentrations above 8 ppm. The reaction orders for phenanthrene and pyrene were found to be zero-th and ca. -0.4th order, respectively, thus implying that the reported assumption of pseudo 1st order reaction for some PAHs would be no longer valid. PAH degradation was roughly proportional to the intensity of UV (number of lamps), exhibiting maximum 92.5% of the degradation efficiency. The solution pH was lowered to 4.4 from 6.4 during the experiments partially because the carbons decomposed by the energy reacted with oxygen radicals to produce carbon dioxides. Ultrasonic irradiation on phenanthrene solutions gave relatively poor results which matched to 50 to 70% of degradation efficiency even at 2 ppm of initial concentration. Phenanthrene was found to be degraded more efficiently than pyrene for the two energy sources. Ultrasound also followed the same reaction kinetics as UV energy on PAH degradation.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권8호
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• pp.438-444
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• 2000

We report the effects of etch process parameters on the ohmic contact formation in the plasma etching of GaN. Planar inductively coupled plasma system with $CH_4/H_2/Ar$gas chemistry has been used as etch reactor. The contact resistance and the specific contact resistance have been investigated using transfer length method as a function of RF bias power and %Ar gas concentration in total flow rate. AES(Auger electron spectroscopy) analysis revealed that the etched GaN has nonstoichiometric Ga rich surface and was contaminated by carbon and oxygen. Especially large amount of carbon was detected at the sample etched for high bias power (or voltage) condition, where severe degradation of contact resistance was occurred. We achieved the low ohmic contact of $2.4{\times}10^{-3} {\Omega}cm^2$ specific contact resistance at the input power 400 W, RF bias power 150 W, and working pressure 10mTorr with 10 sccm $CH_4$, 15 sccm H2, 5 sccm Ar gas composition.

• Clinical and Experimental Pediatrics
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• 제61권10호
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• pp.315-321
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• 2018

Purpose: To investigate the effectiveness of transient intubation for surfactant administration and extubated to nasal continuous positive pressure (INSURE) for treatment of respiratory distress syndrome (RDS) and to identify the factors associated with INSURE failure in extremely premature infants. Methods: Eighty-four infants with gestational age less than 28 weeks treated with surfactant administration for RDS for 8 years were included. Perinatal and neonatal characteristics were retrospectively reviewed, and major pulmonary outcomes such as duration of mechanical ventilation (MV) and bronchopulmonary dysplasia (BPD) plus death at 36-week postmenstrual age (PMA) were compared between INSURE (n=48) and prolonged MV groups (n=36). The factors associated with INSURE failure were determined. Results: Duration of MV and the occurrence of BPD at 36-week PMA were significantly lower in INSURE group than in prolonged MV group (P<0.05), but BPD plus death at 36-week PMA was not significantly different between the 2 groups. In a multivariate analysis, a reduced duration of MV was only significantly associated with INSURE (P=0.001). During the study period, duration of MV significantly decreased over time with an increasing rate of INSURE application (P<0.05), and BPD plus death at 36-week PMA also tended to decrease over time. A low arterial-alveolar oxygen tension ratio (a/APO2 ratio) was a significant predictor for INSURE failure (P=0.001). Conclusion: INSURE was the noninvasive ventilation strategy in the treatment of RDS to reduce MV duration in extremely premature infants with gestational age less than 28 weeks.