• Proceedings of the KSME Conference
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• 2001.11b
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• pp.59-64
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• 2001

The fluid flow, mass transfer and film thickness variation during a wafer spin coating process are numerically studied. Governing equations for the cylindrical coordinates are simplified using the similarity transformation and solved efficiently using the finite difference method. Concentration dependent viscosity and the binary diffusivity of the coating liquid are used in the analysis. The time variational velocity components of the coating liquid and the film thickness are analyzed according to the various spin speed. When the evaporation is considered, the flow decease in the early times due to the increase of the viscosity and the resultant flow resistance. Effects of the two film thinning mechanism, the flow-out and evaporation are also considered in the analysis.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.05a
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• pp.115-118
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• 2008

Many theoretical and experimental studies have been conducted to investigate elements of the hydrodynamic process, such as variations in liquid film thickness or air core diameter. From these studies, some theoretical relationships have been established through an approximated analytical solution of flow hydrodynamics in a swirl nozzle. However, experimental studies on elements such as internal flow have not produced conclusive results. In this study, the variations and stability of the internal flow were examined by visualizing the air core and measuring the liquid film thickness.

• Journal of the Korean Society of Propulsion Engineers
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• v.12 no.6
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• pp.30-37
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• 2008

Many theoretical and experimental studies have been conducted to investigate elements of swirl injector hydrodynamics, such as variations in liquid film thickness or air core diameter. From these studies, some theoretical relationships have been established through an approximate analytical solution of flow hydrodynamics in a swirl nozzle. However, experimental studies on elements such as the stability of internal flow have not produced conclusive results. In this study, the stability of the internal flow under tangential entry conditions was examined by visualizing the formation of the air core in the swirl chamber and measuring the liquid film thickness in the orifice.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.25 no.11
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• pp.1483-1491
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• 2001

Enhancement of pulsed-laser ablation by an artificially deposited liquid film is presented. Measurements of ablation rate, ablation threshold, and surface topography arc performed. Correlation between material ablation and photoacoustic effect is examined by the optical beam deflection method. The dependence of ablation rate on liquid-film thickness and chemical composition is also examined. The results indicate that photomechanical effect in the phase explosion of liquid is responsible for the enhanced ablation. The low critical temperature of liquid induces explosive vaporization with localized photoacoustic excitation in the superheat limit and increases the ablation efficiency. Experiments were carried out utilizing a Q-swiched Nd:YAG laser at near-threshold laser fluences with negligible plasma effect (up to ∼100 MW/cm$^2$).

• Journal of ILASS-Korea
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• v.7 no.4
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• pp.1-8
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• 2002

This paper investigates the spray angle and the outline shape of the liquid sheet discharged from a simplex swirl nozzle. A theoretical model was proposed and the corresponding experimental data were presented for comparison. Axial and tangential velocities and thickness of the liquid sheet at the nozzle exit were also predicted. The liquid sheet thickness at nozzle exit, as well as the discharge coefficient, turned out to be a sole function of the swirl Reynolds number. However, the axial and tangential velocities at nozzle exit and the spray angle could not be expressed only with the swirl Reynolds number. The predicted outline shape and spray angle of the liquid sheet agreed reasonably with the measured data.

• Journal of the Korean Vacuum Society
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• v.8 no.3A
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• pp.231-237
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• 1999

$SrBi_{22.4}Ta_2O_9$ (SBT) thin films of 70~150 nm thickness were prepared on platinized silicon substrates by Liquid Source Misted Chemical Deposition (LSMCD) process, and their microstructure, feroelectric and leakage current characteristics were investigated. By annealing at $800^{\circ}C$ for 1 hour in oxygen ambient, SBT films were fully crystallized to the Bi layered perovskite structure without preferred orientation. The grain size of the LSMCD- derived SBT films was about 100nm, and was not varied with the film thickness. $2P_r$ and $E_c$ of the SBT films increased with decreasing the film thickness, and the 70nm-thick SBT film exhibited $2P_r$ of 17.8 $\mu$C/$\textrm{cm}^2$ and $E_c$ of 74kV/cm at applied voltage of 5V. Within the film thickness range of 70~150nm, the relative dielectric permittivity of the LSMCD-derived SBT film decreased with decreasing the film thickness. Leakage current densities lower than $10^{-7}\textrm{A/cm}^2$ at 5V were observed in the SBT films thicker than 125nm.

• Journal of the Semiconductor & Display Technology
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• v.2 no.1
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• pp.25-29
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• 2003

The fluid flow, mass transfer, heat transfer and film thickness variation during the spin coating process are numerically studied. The model is said to be I-dimensional because radial variations in film thickness, concentration and temperature are ignored. The finite difference method is employed to solve the equations that are simplified using the similarity transformation. In early time, the film thinning is due to the radial convective outflow. However that slows during the first seconds of spinning so the film thinning due to evaporation of solvent becomes sole. The time varing film thickness is analyzed according to the wafer spin speed, the various solvent fraction in the coating liquid, and the various solvent vapor fraction in the bulk of the overlying gas during the spin coating is estimated.

• Journal of the Korean Graphic Arts Communication Society
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• v.23 no.2
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• pp.129-141
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• 2005

The liquid film behavior between two rotating rollers has been analyzed for many years. Their contributions were, however, limited almost within the areas of polymer laminar flow in there. When the slip contact of two rotating rollers is used as a role of vehicle to distribute the liquid discharged on to each roller after splitting from the nip, there was few available relationship to control the roller speed and to design system. On this work it was possible to get out a certain relationship between the discharged film thickness ratio and the roller surface seeds without any help of pressure limit at the splitting point. The hydrodynamic analyzation of Newtonian liquid behavior around the point was well proved on some manipulative experiment. The thickness ratio increases along with the roll surface speed ratio increases. And the discharged volume flow rate ratio on each roller surface varies with square of the speed ratio. Both of these relationship have a decision factor also made up by the speed ratio.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.11
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• pp.1169-1176
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• 2011

Liquid film flows are classified into waveless laminar, wavy laminar, and turbulent flows depending on the Reynolds number or the flow stability. Since the wavy motions of the film flows are so intricate and nonlinear, studies on them have largely been experimental. Most numerical approaches have been limited to the waveless flow regime. The various free surface-tracking schemes adopted for this problem were used to more accurately estimate the average film thickness, rather than to capture the unsteady wavy motion. In this study, the wavy motions in laminar wavy liquid film flows with Reynolds numbers of 200-1000 were simulated with various numerical schemes based on the volume of fluid (VOF) method for interface tracking. The results from each numerical scheme were compared with the experimental results in terms of the average film thickness, the wave velocity, and the wave amplitude.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2017.05a
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• pp.251-253
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• 2017

Numerical study of air-blast type injector for low emission aircraft engines was conducted. Volume-of-fluids approach was used to track interface of fuel and air. Primary atomization of fuel stream was visualized, and thickness and mean velocity at the injector exit was calculated. Liquid fuel injected from fuel slots joined together as a thin film on preflimer surface, and interacted with swirling air. As instability on the fuel surface increased, separation of fuel as ligaments and droplets occured. The film thickness and velocity were used to as fuel injection boundary condition for reactive flow simulation. Primary reaction zone was formed in vicinity of the fuel nozzle, creating a stable flame inside the combustor.