• Title/Summary/Keyword: lift-off

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A Study on the Removal of Cu Impurity on Si Substrate and Mechanism Using Remote Hydrogen Plasma (리모트 수소 플라즈마를 이용한 Si 기판 위의 Cu 불순물 제거)

  • Lee, Jong-Mu;Jeon, Hyeong-Tak;Park, Myeong-Gu;An, Tae-Hang
    • Korean Journal of Materials Research
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    • v.6 no.8
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    • pp.817-824
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    • 1996
  • Removal of Cu impurities on Si substrates using remote H-plasma was investigated. Si substrates were intentionally contaminated by 1ppm ${CuCI}_{2}$, standard chemical solution. To determine the optimal process condition, remote H-plasma cleaning was conducted varying the parameters of rf power, cleaning time and remoteness(the distance between the center of plasma and the surface of Si substrate). After remote H-plasma cleaning was conducted, Si surfaces were analysed by TXRF(total x-ray reflection fluorescence) and AFM(atomic force microscope). The concentration of Cu impurity was reduced by more than a factor of 10 and its RMS roughness was improved by more than 30% after remote H-plasma cleaning. TXRF analysis results show that remote H-plasma cleaning is effective in eliminating Cu impurity on Si surface when it is performed under the optimal process condition. AFM analysis results also verifies that remote H-plasma cleaning makes no damage to the Si surface. The deposition mechanism of Cu impurity may be explained by the redox potential(oxidation-reduction reaction potential) theory. Based on the XPS analysis results we could draw a conclusion that Cu impurities on the Si substrate are removed together with the oxide by a "lift-off" mechanism when the chemical oxide( which forms when Cu ions are adsorbed on the Si surface) is etched off by reactive hydrogen atoms.gen atoms.

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Study on Heat-Loss-Induced Self-Excitation in Laminar Lifted Jet Flames (층류제트 부상화염에서 열손실에 의한 자기진동에 관한 연구)

  • Yoon, Sung-Hwan;Park, Jeong;Kwon, Oh-Boong;Kim, Jeong-Soo;Bae, Dae-Seok;Yun, Jin-Han;Keel, San-In
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.3
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    • pp.309-319
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    • 2011
  • We experimentally investigated lifted propane jet flames diluted with nitrogen to obtain flame-stability maps based on heat-loss-induced self-excitation. We found that heat-loss-induced self-excitations are caused by conductive heat loss from premixed flame branches to trailing diffusion flames as well as soot radiation. The conductive-heat-loss-induced self-excitation at frequencies less than 0.1 Hz is explained well by a suggested mechanism, whereas the oscillation of the soot region induces a self-excitation of lift-off height of the order of 0.1 Hz. The suggested mechanism is also verified from additive experiments in a room at constant temperature and humidity. The heat-loss-induced self-excitation is explained by the Strouhal numbers as a function of the relevant parameters.

A Study about Current Putting on a Shroud (현행(現行) 수의(壽衣) 착의법(着衣法) 관(關) 연구(硏究))

  • Nam, Min-Ye;Baik, Young-Ja
    • Journal of Fashion Business
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    • v.3 no.2
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    • pp.85-90
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    • 1999
  • A shroud is clothes for giving a dead person a bath and being finely dressed:though our routine clothes have been western, putting on a shroud has been kept comparatively well as a tradition of a conventional ceremony garments. This study is about the current using of dressing a shroud, and for presenting foundations of a way about dressing a shroud in order to make the most of this by everyone, therefore this research will be worthwhile to preserve the traditional custom of giving a dead person a bath and being finely dressed. 1. We must confirm the death of a person before we do Su-Si for controlling rightly a corse. Su-Si is ways of changing a clean clothes after bathing the dead person, tieing up hands, feet and ankles with a string, filling up a mouth, a nose and ears with a wad of cotton, laying down the dead person with his head toward east, and setting up a screen after covering the dead person with a bed sheet. 2. Here are processes of putting on a shroud. After the day of death, first of all, you must untie the string to control rightly a corpse, take off the clothes, and give a dead man a bath. You trim the dead person's fingernails and toenails, put them in O-nang, then put his hands and feet in five pouches, finally put feet in korean socks and wrap with Ak-su. You put a underwear in a overwear in order to put on the clothes easily, and then put on an upper garments after putting on trousers. And put on Sb-sin After you wash the dead person's face and his hair, you put gems and raw rice in his mouth, wrap head with cotton fabrics, and put hairs into five pouches, then put on a headgear which is filled with five pouches. 3. You tie up with hem cloth the dead person dressed a shroud after wrapping with Dae-ryum-km and So-ryumkm. 4. After you encoffin the dead person, you weave coffin strings with cotton fabrics in order to lift up the coffin easily, and lay down a red fabrics having white letters about the dead person's name or social position onto the coffin, then cover the coffin with a coffin cover : finally you leave the coffin at the former place and set up screen.

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Analysis of Surface Plasmon Resonance on Periodic Metal Hole Array by Diffraction Orders

  • Hwang, Jeong-U;Yun, Su-Jin;Gang, Sang-U;No, Sam-Gyu;Lee, Sang-Jun;Urbas, Augustine;Ku, Zahyun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.176-177
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    • 2013
  • Surface plasmon polaritons (SPPs) have attracted the attention of scientists and engineers involved in a wide area of research, microscopy, diagnostics and sensing. SPPs are waves that propagate along the surface of a conductor, usually metals. These are essentially light waves that are trapped on the surface because of their interaction with the free electrons of conductor. In this interaction, the free electrons respond collectively by oscillating in resonance with the light wave. The resonant interaction between the surface charge oscillation and the electromagnetic field of the light constitutes the SPPs and gives rise to its unique properties. In this papers, we studied theoretical and experimental extraordinary transmittance (T) and reflectance (R) of 2 dimensional metal hole array (2D-MHA) on GaAs in consideration of the diffraction orders. The 2d-MHAs was fabricated using ultra-violet photolithography, electron-beam evaporation and standard lift-off process with pitches ranging from 1.8 to $3.2{\mu}m$ and diameter of half of pitch, and was deposited 5-nm thick layer of titanium (Ti) as an adhesion layer and 50-nm thick layer of gold (Au) on the semiinsulating GaAs substrate. We employed both the commercial software (CST Microwave Studio: Computer Simulation Technology GmbH, Darmstadt, Germany) based on a finite integration technique (FIT) and a rigorous coupled wave analysis (RCWA) to calculate transmittance and reflectance. The transmittance was measured at a normal incident, and the reflectance was measured at variable incident angle of range between $30^{\circ}{\sim}80^{\circ}$ with a Nicolet Fourier transmission infrared (FTIR) spectrometer with a KBr beam splitter and a MCT detector. For MHAs of pitch (P), the peaks ${\lambda}$ max in the normal incidence transmittance spectra can be indentified approximately from SP dispersion relation, that is frequency-dependent SP wave vector (ksp). Shown in Fig. 1 is the transmission of P=2.2 um sample at normal incidence. We attribute the observation to be a result of FTIR system may be able to collect the transmitted light with higher diffraction order than 0th order. This is confirmed by calculations: for the MHAs, diffraction efficiency in (0, 0) diffracted orders is lower than in the (${\pm}x$, ${\pm}y$) diffracted orders. To further investigate the result, we calculated the angular dependent transmission of P=2.2 um sample (Fig. 2). The incident angle varies from 30o to 70o with a 10o increment. We also found the splitting character on reflectance measurement. The splitting effect is considered a results of SPPs assisted diffraction process by oblique incidence.

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Treatment of velopharyngeal insufficiency in a patient with a submucous cleft palate using a speech aid: the more treatment options, the better the treatment results

  • Park, Yun-Ha;Jo, Hyun-Jun;Hong, In-Seok;Leem, Dae-Ho;Baek, Jin-A;Ko, Seung-O
    • Maxillofacial Plastic and Reconstructive Surgery
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    • v.41
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    • pp.19.1-19.6
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    • 2019
  • Background: The submucous cleft palate (SMCP) is a type of cleft palate that may result in velopharyngeal insufficiency (VPI). Palate muscles completely separate oral and nasal cavities by closing off the velopharynx during functional processes such as speech or swallow. Also, hypernasality may arise from anatomical or neurological abnormalities in these functions. Treatments of this issue involve a combination of surgical intervention, speech aid, and speech therapy. This case report demonstrates successfully treated VPI resulted from SMCP without any surgical intervention but solely with speech aid appliance and speech therapy. Case presentation: A 13-year-old female patient with a speech disorder from velopharyngeal insufficiency that was caused by a submucous cleft palate visited to our OMFS clinic. In the intraoral examination, the patient had a short soft palate and bifid uvula. And the muscles in the palate did not contract properly during oral speech. She had no surgical history such as primary palatoplasty or pharyngoplasty except for tonsillectomy. And there were no other medical histories. Objective speech assessment using nasometer was performed. We diagnosed that the patient had a SMCP. The patient has shown a decrease in speech intelligibility, which resulted from hypernasality. We decided to treat the patient with speech aid (palatal lift) along with speech therapy. During the 7-month treatment, hypernasality measured by a nasometer decreased and speech intelligibility became normal. Conclusions: Surgery remains the first treatment option for patients with velopharyngeal insufficiencies from submucous cleft palates. However, there were few reports about objective speech evaluation pre- or post-operation. Moreover, there has been no report of non-surgical treatment in the recent studies. From this perspective, this report of objective improvement of speech intelligibility of VPI patient with SMCP by non-surgical treatment has a significant meaning. Speech aid can be considered as one of treatment options for management of SMCP.

저온 공정 온도에서 $Al_2O_3$ 게이트 절연물질을 사용한 InGaZnO thin film transistors

  • 우창호;안철현;김영이;조형균
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.11-11
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    • 2010
  • Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

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Development of Profile Technique for Steam Generator Tubes in Nuclear Power Plants Using $8{\times}1$ Multi-Array Eddy Current Probe ($8{\times}1$ 다중코일 와전류탐촉자를 이용한 원전 증기발생기 전열관 단면형상검사 기법 개발)

  • Nam, Min-Woo;Lee, Hee-Jong;Kim, Cheol-Gi
    • Journal of the Korean Society for Nondestructive Testing
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    • v.28 no.2
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    • pp.184-190
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    • 2008
  • Various ECT techniques have been applied basically to assess the integrity of steam generator tithing in nuclear power plant. Among these techniques, the bobbin probe technique is applied generally to examine the volumetric flaws such as a crack-like defect and wear which is generally occurred on steam generator tubing, and additionally MRPC probe is used to examine closely tile top of tubesheet and bending regions due to the high possibility of cracking. Dent and bulge also may be formed on tube during installation process and operation of steam generator, but the dent and bulge indications greater than specific size criteria are recorded on examination report because these indications are not considered as flaw. These indications can be easily detected with bobbin probe and approximately sized with profile bobbin probe, but the size and shape can not be accurately verified. Accordingly, in this study, the $8{\times}1$ multi-array EC probe was designed to increase the measurement accuracy of the sectional profiling EC testing of tube. As a result, we would like to propose the application of $8{\times}1$ multi-array EC probe for the measurement of size and shape of profile change on steam generator tube in OPR-1000 nuclear power plant.

Study on methods of minimizing the reverse logistics in e-Commerce - Focused on the B2C - (전자상거래의 역물류 최소화를 위한 효율적 관리 방안 - B2C 거래를 중심으로 -)

  • Im, Yong-Taek;Seo, Seon-Ae
    • Journal of Korea Port Economic Association
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    • v.24 no.3
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    • pp.147-165
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    • 2008
  • Since 2000, e-commerce has been increased continuously in its quantity and quality. The growth of e-commerce has resulted in some diversities of distribution channels, and its characteristics of not-spot trading and limited market scale has urged the on-line market to play a role of assistance to off-line market. e-Commerce causes not only the flow of forward logistics, but also that of reverse logistics with every purchasing, which is a very critical factor to hesitate for consumers to purchase the products as well as increase the price of the products. Concern about the reverse logistics by sellers and buyers influences the level of price and purchasing activity of consumers. This study firstly is to lift the awareness of the efficient control of reverse logistics with reviewing the recent change of logistics environment and phenomena of reverse logistics. Secondly we find the factors generating the reverse logistics and look into its questions, and thirdly offer not only the ways to minimize the phenomena of reverse logistics, but also a efficient control system for reverse logistics. We additionally aim to contribute to prevent the price of the products from rising and raise the customers' satisfaction through minimizing the phase of reverse logistics.

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A Study on the Entertaining Expressions in the Spaced for Entertainment - With a Focus on the Club Environment - (엔터테이먼트 공간에 나타나는 유희적 표현에 관한 연구 - 클럽 공간을 중심으로 -)

  • Kim, Hye-Hyun;Yoon, Gab-Geun;Mun, Hyok;Seo, Su-Mi
    • Korean Institute of Interior Design Journal
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    • v.20 no.5
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    • pp.42-50
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    • 2011
  • In the 21st century, people began to pay more attention on the culture, and the chances for them to participate in the cultural lives also increased. The spaces for entertainments can also be deemed as the center of the cultural contents. The entertainment is, in consideration of its definition by the literal meaning and the origin of the word itself, 'an act that entertains, or any artificial creation that is designed to give entertainment with a view to relieve the subjects from the burdens they have as they live.'Of the modem entertainment spaces, the one with the most profound visual manifestation of the entertainment element is the club. The purpose of this study is to examine the influence from the entertaining element manifested in the club spaces. Only until a few years back, the club spaces were deemed with negative impressions that comes with the more negative side of the entertaining world. But, recently such negative impressions are lift off considerably, and the club spaces are regarded with positive impressions as to be the kind of place where the young people can enjoy performances and other kind of culture in healthy atmosphere. In Chapter 2, we will examine the entertainment and the nature of the pleasure it gives, as well as the correlation between the entertaining environments and the pleasure they give. In chapter 3, the entertaining elements within such contexts are classified into the experience, form, color, objects, and the lightings and examine the characteristics of each of them. Also, the influences of these elements to the entertaining environment will be reviewed. In the case study in chapter 4, 9 overseas and domestic club spaces that were introduced in 'Interior World' magazines, that is, in the issues that are focused on 'Entertainment,'such as Issue 59, 68, and 79. As a result of the analysis, the influences of the entertaining, or pleasing, elements were discovered. The particular expression characteristics of the pleasing designs in the club spaces are, namely, the form elements, material elements, color elements, objects elements, and the lighting elements. As the society changes and the cultural level goes up, the club spaces are required to adopt more changes. Therefore, the pleasing elements of the space should receive further emphasis. These elements will act as a trend in the space and make the people appreciate the space more refreshing.

Modelling Pasture-based Automatic Milking System Herds: System Fitness of Grazeable Home-grown Forages, Land Areas and Walking Distances

  • Islam, M.R.;Garcia, S.C.;Clark, C.E.F.;Kerrisk, K.L.
    • Asian-Australasian Journal of Animal Sciences
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    • v.28 no.6
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    • pp.903-910
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    • 2015
  • To maintain a predominantly pasture-based system, the large herd milked by automatic milking rotary would be required to walk significant distances. Walking distances of greater than 1-km are associated with an increased incidence of undesirably long milking intervals and reduced milk yield. Complementary forages can be incorporated into pasture-based systems to lift total home grown feed in a given area, thus potentially 'concentrating' feed closer to the dairy. The aim of this modelling study was to investigate the total land area required and associated walking distance for large automatic milking system (AMS) herds when incorporating complementary forage rotations (CFR) into the system. Thirty-six scenarios consisting of 3 AMS herds (400, 600, 800 cows), 2 levels of pasture utilisation (current AMS utilisation of 15.0 t dry matter [DM]/ha, termed as moderate; optimum pasture utilisation of 19.7 t DM/ha, termed as high) and 6 rates of replacement of each of these pastures by grazeable CFR (0%, 10%, 20%, 30%, 40%, 50%) were investigated. Results showed that AMS cows were required to walk greater than 1-km when the farm area was greater than 86 ha. Insufficient pasture could be produced within a 1 km distance (i.e. 86 ha land) with home-grown feed (HGF) providing 43%, 29%, and 22% of the metabolisable energy (ME) required by 400, 600, and 800 cows, respectively from pastures. Introduction of pasture (moderate): CFR in AMS at a ratio of 80:20 can feed a 400 cow AMS herd, and can supply 42% and 31% of the ME requirements for 600 and 800 cows, respectively with pasture (moderate): CFR at 50:50 levels. In contrast to moderate pasture, 400 cows can be managed on high pasture utilisation (provided 57% of the total ME requirements). However, similar to the scenarios conducted with moderate pasture, there was insufficient feed produced within 1-km distance of the dairy for 600 or 800 cows. An 800 cow herd required 140 and 130 ha on moderate and high pasture-based AMS system, respectively with the introduction of pasture: CFR at a ratio of 50:50. Given the impact of increasing land area past 86 ha on walking distance, cow numbers could be increased by purchasing feed from off the milking platform and/or using the land outside 1-km distance for conserved feed. However, this warrants further investigations into risk analyses of different management options including development of an innovative system to manage large herds in an AMS farming system.