• Proceedings of the KSME Conference
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• 2004.11a
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.42-50
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• 2005

This paper presents an ultra precision machining system using a high sensitive force sensing module to measure machining forces and penetration displacement in a tip-based nanopatterning. The force sensing module utilizes a leaf spring mechanism and a capacitive displacement sensor and it has been designed to provide a measuring range from 80 ${\mu}N$ to 8 N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by X-Y scanning motion stage with 5 nm resolution. In nano indentation experiments and patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned samples were measured by AFM. Experimental results demonstrated that the developed system can be used as an effective device in nano indentation and nanopatterning operation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1109-1112
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• 2004

This paper presents a high sensitive force sensing module to measure machining forces for a tip-based nanopatterning instrument. The force sensing module utilizing a leaf spring mechanism and a capacitive displacement sensor has been designed to provide a measuring range from 80$\mu$N to 8N. This force sensing module is mounted on a PZT driven in-feed motion stage with 1 nm resolution. The sample can be moved by a X-Y scanning motion stage with 5 nm resolution. In the patterning experiments, the machining forces were controlled and monitored by the force sensing module. Then, the patterned sample was measured by AFM. Experimental results demonstrated that the developed force sensing module can be used as an effective sensing device in the nanopatterning operation.

• Journal of the Korean Society for Precision Engineering
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• v.9 no.1
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• pp.75-81
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• 1992

In this paper, an impact vibration absorber that reduces the high vibration amplitude of a vibrating system is studied. This absorber consists of a free mass allowed to impact on to the secondary leaf spring so that the vibration energy is dissipated by converaion into noise and heat. The experimental parameters are weight of the free mass and impat clearance. According to the measured results, the high vibration in resonance region is reduced more effectively by the impact clearance ratio than by the mass ratio.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.610-614
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• 1996

As the run out error and misalignment of ball screw connected directly to guide table largely affect the motion accuracy of guideway, floating coupling that releases the table from screw nut except feed and rotational direction is needed todecrease its influences. The purpose of this study is to propose a practical model floating coupling of ball serew for high precision feeding system. The straightness, dynanic characteristics and micro step response of hydrostatic guideway, mounted with three types of coupling fixed type, leaf spring type and hydrostatic type, are tested and compared. From the resuts of experiments, it is proved that a hydrostatic type floating coupling is superior to other couplings and is available to high precision feeding system with ball screw.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.494-497
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• 2003

A rotating device driven by an Inchworm motor was designed and fabricated to be used as an angie standard system. 1. PZT was adopted as a driving source, while the movement of PZT was guided by the leaf spring employing the elastic transformation of metals. 2. The device could rotate in a 360-degree arc. continuously Performance test of the device showed about 0.02 sec. of the minimum revolution angle and 1/15 rpm of the maimum revolution speed. 3. To improve its performance requires further studies on realizing a shifting device with faster response time, on increasing the output current (capacity) of the power amplifier used to drive PZT, on the dynamic motion of clamping. and on determining the optimum clamping condition

• Journal of Advanced Marine Engineering and Technology
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• v.18 no.1
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• pp.23-31
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• 1994

The present works are the experimental results of the study to develope a damping flexible coupling which has a high performance of control for the torsional vibrations of power shafts in a large machinery. The damping flexible coupling is manufactured and is compared for dynamic characteristics with other type coupling which is the Geislinger coupling. The static coefficient of stiffness and the damping coefficient allows the control of excitation frequency through a cam driver. The experimental results obtained from the two couplings are compared with the theoretically results.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.12
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• pp.109-119
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• 1995

A driveline incorporating universal joints when driving through an angle can excite various components in a vehicle with second order excitation of torsional and bending vibrations, being transmitted either audibly(noise), or physically(vibration). For a certain range of vehicle dpeed noises can be radiated from the cab wall, in which resonances occur by the excitations transmitted from the driveline as a vibration source. In this paper, the excitation mechanism of cab noises is studied especially for the vehicle speed range of 65 .approx. 75 km/h through the simulation for torsional vibrations of the driveline and for bending vibrations of the cab of an 11 Ton grade Cargo Truck, and verified additionally by vibration and noise measurements. As a result, it is found that the uncomfortable noises in the cab are caused mainly by the abrupt increase of the joint angle of driveline near the axle differential resulted from the excessive clearance alignment of the leaf spring gate.

• Proceedings of the KSME Conference
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• 2000.04a
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• pp.731-736
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• 2000

An optimal design method is adopted for a spacer grid in nuclear power plant. It is made of punched sheet metal process, functioning as springs and dimples supporting fuel rods. For stress analysis of the assembled fuel rod support, a typical cell out of the repeated pattern in the assembly is modeled using 4-node shell elements. A commercial code, ABAQUS, is used for detailed analysis of contacting phenomena with friction. For the optimization, design varibles are taken from geometric parameters representing the shape of the bent leaf spring part and mating contact region with fuel rod. Objective function is considered in relation to mechanical functions and durability. Maximum yon Mises stress is considered in relation to constrained contact stress.