• Journal of the Korean Society for Precision Engineering
• /
• v.16 no.2 s.95
• /
• pp.145-152
• /
• 1999

This paper presents the principle and experimental results of a non-contact surface roughness measurement by means of screen projected pattern of lase beam reflected from a polished surface. In the reflected laser beam pattern especially from a fine surface like ground or polished one, light intensity varies from the center fo the image to its boundary as the Gaussian distribution. The standard deviation of a light intensity distribution is assumed to be a good non-contact estimator for measuring the surface roughnes, because the light reflectivity is known to be well related with the surface roughness. This method doesn't need to discriminate between the specularly reflected light and the diffusely reflected one, whereas the scattered laser intensity method must do. Nor it needs to adjust the change of light intensity caused by environmental lights or specimen materials. Reflected laser beam pattern narrowly spreads out in the vertical direction to tiny scratches on the polished surface due to abrasives. The deeper the scratch the more the dispersion, which means the rougher surface. The standard deviation of the pattern is nearly in proportion to the surface roughness. Measurement errors by this method are shown to be below 10 percent compared with those obtained by a common contact method. The inclination of measuring unit from the normal axis causes the measurement errors up to 10 percent for an angle of 4 degree. Therefore the proposed method can be used as an on-the-machine quick roughness estimator within 10 percent measurement error.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.677-678
• /
• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.06a
• /
• pp.1083-1086
• /
• 2005

Light scattering measurement system that can evaluate light scattering characteristic from defects on silicon wafer surface has been developed. The system uses $Ar^+$ laser as an illumination source, and a highly sensitive photomultiplier tube (PMT) for detecting scattered light from defects. Unlike with conventional measurement system, our system has ability to measure scattered light pattern from wide range of scattering angles with changeable incidence condition. It is shown that our developed system is effective to discriminate the types and sizes of defects from basic experimental results using a microscatch and a PSL sphere.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.10a
• /
• pp.136-136
• /
• 2003

• Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
• /
• 2001.06a
• /
• pp.1627-1627
• /
• 2001

In this study, a newly constructed optical measurement system, whose main components were a parametric tunable laser and a near infrared photoelectric multiplier, was applied to detection of the information for the inside of Satsuma mandarin using time-of-flight near infrared spectroscopy (TOF-NIRS). The combined effects on the time resolved profile of sample diameter, sugar content, the wavelength of the laser beam, and the detection position of transmitted light were investigated in detail. The samples used were Satsuma mandarin (Citrus unshu $M^{ARC}$.) (location: Wakayama, Japan) having the diameters of 50-84 mm. The sugar content measured by a refractometer varied from 9.9 to 16.3 Brix%. Equator of sample was irradiated vertically with the pulsed laser, and transmitted output power was measured on the restricted position of the equator using the optical fiber cable. The sampling time and the number of averaging the output power were 100 ns and 100 times, respectively. The variation of the attenuance of peak maxima At, the time delay of peak maxima t and the variation of full width at half maximum w were strongly dependent on the detection position and the wavelength of the laser beam. At, t and w increased gradually as the sample diameter increased to be much absorbed and vigorously scattered. On the other hand, each optical parameter had a tendency to increase as the sugar content increased. Such behavior was remarkable when the transmitted light was detected at the side face of a sample. When we apply TOF-NIRS to detection of the information for the inside of fruit with high moisture content like Satsuma mandarin, it is very important to give attention to the difference in the scattered light within tissues and the semi-straightly propagated light. Furthermore, we tried to express the resulting phenomena by using a model samples composed of water, sucrose, and milk. The variation of the time resolved profile is strongly governed by the combination of the light absorption component, scattering medium, and refractive index.

• Proceedings of the Korean Society of Near Infrared Spectroscopy Conference
• /
• 2001.06a
• /
• pp.1626-1626
• /
• 2001

In this study, a newly constructed optical measurement system, whose main components were a parametric tunable laser and a near infrared photoelectric multiplier, was applied to detection of the information for the inside of Satsuma mandarin using time-of-flight near infrared spectroscopy (TOF-NIRS). The combined effects on the time resolved profile of sample diameter, sugar content, the wavelength of the laser beam, and the detection position of transmitted light were investigated in detail. The samples used were Satsuma mandarin (Citrus unshu $M_{ARC}$.) (location: Wakayama, Japan) having the diameters of 50-84 mm. The sugar content measured by a refractometer varied from 9.9 to 16.3 Brix%. Equator of sample was irradiated vertically with the pulsed laser, and transmitted output power was measured on the restricted position of the equator using the optical fiber cable. The sampling time and the number of averaging the output power were 100 ns and 100 times, respectively. The variation of the attenuance of peak maxima At, the time delay of peak maxima $\Delta$t and the variation of full width at half maximum Δw were strongly dependent on the detection position and the wavelength of the laser beam. At, $\Delta$t and $\Delta$w increased gradually as the sample diameter increased to be much absorbed and vigorously scattered. On the other hand, each optical parameter had a tendency to increase as the sugar content increased. Such behavior was remarkable when the transmitted light was detected at the side face of a sample. When we apply TOF-NIRS to detection of the information for the inside of fruit with high moisture content like Satsuma mandarin, it is very important to give attention to the difference in the scattered light within tissues and the semi-straightly propagated light. Furthermore, we tried to express the resulting phenomena by using a model samples composed of water, sucrose, and milk. The variation of the time resolved profile is strongly governed by the combination of the light absorption component, scattering medium, and refractive index.

• Proceedings of the KSME Conference
• /
• 2007.05b
• /
• pp.3162-3167
• /
• 2007

The OPS (Optical Particle Sensor) using light scattering from the particles (real-time measurement without physical contact to the particles) can be used for cleanroom or atmospheric environment monitoring. For particles smaller than 300 nm, the detection efficiency becomes lower as scattered light decreases with particle size. To obtain higher detection efficiency with small particles, the flow field in particle chamber and the detection volume should be designed optimally to achieve maximum scattered light from the particles. In this study, a commercial computational fluid dynamics software FLUENT was used to simulate the gas flow field and particle trajectories with various optical chamber designs for 300 nm PSL particle. For estimation of laser viewing volume, we used a commercial computational optical design program ZEMAX. The results will be a great help in the development of OPS which can measure small particles with higher detection efficiency.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.263-266
• /
• 2002

An optical method for surface roughness estimation based on statistical analysis of the light intensity of a scattered laser beam pattern. The method is very simple but has a disadvantage that no more information than the averaged roughness is estimated. In this study a new try was conducted to derive more advanced surface information from the details of the light intensity distribution. Some periodic ripples among the light intensity distribution being assumed to relate with scratch left on the machined surface, a corresponding surface profile is estimated from the ripples using FFT and IFFT algorithm. IFFT technique is used to extract some dominant signal components among the intensity distribution. Compared to the measured profiles by a stylus type surf-tester, the profiles obtained through the proposed method are probably acceptable in a sense of the profile shape. Calibration of the amplitude needs more works in the future.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.5 no.1
• /
• pp.33-42
• /
• 1996

The high coherence of laser beam has made it possible to observe interference effects even in the light scattered from rough surfaces. That's why, when object with a scattering surface is illuminated with laser light, we do see a speckled appearance due to random interference. This sort of unique property of laser speckle has bruht into existence the new noncontaciting techniques such as speckle metrology method of measuring deformation, displacement, and vibration etc of objects with high optical sensitivity. The measurable range of speckle metrology especially used to measure in -plane information, however, is limited by some factors, the so-called strain, rotation tilt of surface and out of displacement perpendicular to the plane of analysis This restrictions severly limits the measurable range of speckle metrology by causing the decorrelation of speckle patterns. It is the purpose of this paper to give a survey on the measurable limitation of speckle photography method that is one of speckle metrology. Namely we will discuss the mutual relationships and problems of each limitations adding the restriction on the largest and smallest displacement measurable with speckle methods.

• Korean Journal of Optics and Photonics
• /
• v.20 no.1
• /
• pp.6-15
• /
• 2009

A mobile phone camera consisting of two aspheric lenses is designed, and stray light distribution on the image plane is analyzed. We assume that most of the incident light is absorbed on the inner surfaces of the lens barrel and spacers, only a small fraction of the light is scattered uniformly. Assuming that 10% of the incident light is scattered on the barrel and spacers, the maximum value of stray light is 7.1% of the ideal image intensity. The result of analysis shows that stray light originated mostly from internal reflection on the ribs. The contributions of scattering by the barrel and spacers are relatively small. To reduce the internal reflection, thin absorbing plates are inserted between lenses, and the shapes of spacers are modified. After the redesigning of the lens barrel, the maximum value of stray light is reduced to 1.1% of the ideal image intensity.