• 제목/요약/키워드: laser ablation

검색결과 531건 처리시간 0.026초

솔-젤 스핀 코팅에 의해 증착된 텅스텐 산화물 박막의 반응 온도에 따른 전기변색특성 연구 (The electrochromic properties of tungsten oxide thin films coated by a sol-gel spin coating under different reactive temperature)

  • 심희상;나윤채;조인화;성영은
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.128-128
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    • 2003
  • Electrochromism (EC) is defined as a phenomenon in which a change in color takes place in the presence of an applied voltage. Because of their low power consumption, high coloration efficiency, EC devices have a variety of potential applications in smart windows, mirror, and optical switching devices. An EC devices generally consist of a transparent conducting layer, electrochromic cathodic and anodic coloring materials and an ion conducting electrolyte. EC has been widely studied in transition metal oxides(e.g., WO$_3$, NiO, V$_2$O$\sub$5/) Among these materials, WO$_3$ is a most interesting material for cathodic coloration materials due to its lush coloration efficiency (CE), large dynamic range, cyclic reversibility, and low cost material. WO$_3$ films have been prepared by a variety of methods including vacuum evaporation, chemical vapor deposition, electrodeposition process, sol-gel synthesis, sputtering, and laser ablation. Sol-gel process is widely used for oxide film at low temperature in atmosphere and requires lower capital investment to deposit large area coating compared to vacuum deposition process.

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GaN 단결정에 의해 제조된 $Ga_2O_3$ 나노물질의 구조 (The structure of $Ga_2O_3$ nanomaterials synthesized by the GaN single crystal)

  • 박상언;조채룡;김종필;정세영
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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    • pp.120-120
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    • 2003
  • The metallic oxide nanomaterials including ZnO, Ga$_2$O$_3$, TiO$_2$, and SnO$_2$ have been synthesized by a number of methods including laser ablation, arc discharge, thermal annealing procedure, catalytic growth processes, and vapor transport. We have been interested in preparing the nanomaterials of Ga$_2$O$_3$, which is a wide band gap semiconductor (E$_{g}$ =4.9 eV) and used as insulating oxide layer for all gallium-based semiconductor. Ga$_2$O$_3$ is stable at high temperature and a transparent oxide, which has potential application in optoelectronic devices. The Ga$_2$O$_3$ nanoparticles and nanobelts were produced using GaN single crystals, which were grown by flux method inside SUS$^{TM}$ cell using a Na flux and exhibit plate-like morphologies with 4 ~ 5 mm in size. In these experiments, the conventional electric furnace was used. GaN single crystals were pulverized in form of powder for the growth of Ga$_2$O$_3$ nanomaterials. The structure, morphology and composition of the products were studied mainly by X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), and high-resolution transmission electron microscopy (HRTEM).).

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마이크로-필터 상에 소결 처리된 금속 나노입자 코팅에 의한 나노구조 기공층 멤브레인 필터 개발 (Development of Membrane Filters with Nanostructured Porous Layer by Coating of Metal Nanoparticles Sintered onto a Micro-Filter)

  • 이동근;박석주;박영옥;류정인
    • 대한기계학회논문집A
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    • 제32권8호
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    • pp.617-623
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    • 2008
  • The membrane filter adhered with nanostructured porous layer was made by heat treatment after deposition of nanoparticle-agglomerates sintered in aerosol phase onto a conventional micron-fibrous metal filter as a substrate filter. The Sintered-Nanoparticle-Agglomerates-coated NanoStructured porous layer Membrane Filter (SNA-NSMF), whose the filtration performance was improved compared with the conventional metal membrane filters, was developed by adhesion of nanoparticle-agglomerates of dendrite structure sintered onto the micron-fibrous metal filter. The size of nanoparticle-agglomerates of dendrite structure decreased with increasing the sintering temperature because nanoparticle-agglomerates shrank. When shrinking nanoparticle-agglomerates were deposited and treated with heat onto the conventional micron-fibrous metal filter, pore size of nanostructured porous layer decreased. Therefore, pressure drops of SNA-NSMFs increased from 0.3 to 0.516 kPa and filtration efficiencies remarkably increased from 95.612 to 99.9993%.

전기집진 기제를 조합시킨 DPF용 금속 폼 필터의 여과 특성 (Filtration Characteristics of Metal Foam Filters for DPF Combined with Electrostatic Precipitation Mechanism)

  • 박석주;이동근;김진현;조규백;김홍석;정용일
    • 한국자동차공학회논문집
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    • 제15권2호
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    • pp.151-158
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    • 2007
  • Filtration studies, using simulated test nanoparticles or diesel nanoparticles, have been performed about Inconel foam filters for DPF combined with electrostatic precipitation. The simulated test particles were synthesized by laser ablation in the nitrogen atmosphere at the standard condition. The diesel particles were exhausted from the diesel engine driven on the condition of idle or load mode. Filtration efficiency of the metal foam filter is very low because most of particles are penetrated through the large pores of filter. However, the efficiency was considerably improved by applying the electric field to the filter and/or charging the nanoparticles. Nevertheless, the pressure drop of filter hardly increased because the filter-pores were not clogged by deposited particles and kept open.

RF-MSP에 의한 LiCoO$_2$박막전극의 형성에 관한 연구 (The Study of formation of LiCoO$_2$thin film electrode by RF-MSP)

  • 김상필;이우근;김익수;하홍주;박정후;조정수
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
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    • pp.167-170
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    • 1995
  • LiCoO$_2$is a electrode material of Li ion Cell which is expected as the cell with a very high electric charge density. The recent study is mainly to focused on a high power secondary cell. If very thin Li ion Cell can be made in the scale of IC substrate it can be a electric souse in IC chip , micro machine or very thin electrical display etc. LiCoO$_2$thin film can be made by CVD, Laser ablation, E-Beam, ton Beam process, sputtering etc. But to make the material with a high quality for a cell is difficult as the electrode in cell have the fitable ratio in components and a lattice structure of bulk etc. In this study, LiCoO$_2$is made by R.F magnetron sputtering with the variance of substrate temperature and oxygen partial pressure etc. In the substrate temperature of 600$^{\circ}C$ and the oxygen rate of 10%, we can acquire the good thin film LiCoO$_2$compared wish a bulk material.

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New Mechanism of Thin Film Growth by Charged Clusters

  • Hwang, Nong-Moon;Kim, Doh-Yeon
    • 한국결정성장학회:학술대회논문집
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    • 한국결정성장학회 1999년도 PROCEEDINGS OF 99 INTERNATIONAL CONFERENCE OF THE KACG AND 6TH KOREA·JAPAN EMG SYMPOSIUM (ELECTRONIC MATERIALS GROWTH SYMPOSIUM), HANYANG UNIVERSITY, SEOUL, 06월 09일 JUNE 1999
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    • pp.115-127
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    • 1999
  • The charged clusters or particles, which contain hundreds to thousands of atoms or even more, are suggested to form in the gas phase in the thin film processes such as CVD, thermal evaporation, laser ablation, and flame deposition. All of these processes are also used in the gas phase synthesis of the nanoparticles. Ion-induced or photo-induced nucleation is the main mechanism for the formation of these nanoclusters or nanoparticles inthe gas phase. Charged clusters can make a dense film because of its self-organizing characteristics while neutral ones make a porous skeletal structure because of its Brownian coagulation. The charged cluster model can successfully explain the unusual phenomenon of simultaneous deposition and etching taking place in diamond and silicon CVD processes. It also provides a new interpretation on the selective deposition on a conducting material in the CVDd process. The epitaxial sticking of the charged clusters on the growing surface is gettign difficult as the cluster size increases, resulting in the nanostructure such as cauliflowr or granular structures.

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사출성형 특성을 고려한 2인치 도광판의 광효율 향상에 관한 연구 (A Study on the Improvement of Optical Efficiency for The 2 inch LGP Considering Injection Molding Characteristics)

  • 도영수;황철진;윤경환
    • 소성∙가공
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    • 제17권5호
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    • pp.322-327
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    • 2008
  • LGP is a key component of LCD back light unit because it determines brightness and sharpness of the display image. Usually, it has optical patterns fabricated on the bottom surface. These optical patterns convert point or line sources placed in the side of LGP to plane source at the top surface by changing the propagating direction of the incident light. In the present paper the LiGA-reflow method was applied to fabricate the LGP mold. Furthermore, the optical simulation considering the replication ratio of pattern height was applied to the pattern design. The optical simulation through systematic correction scheme was adopted to find the optimum distribution of pattern density. Finally, the stamper fabricated by this method was installed in the mold and LGP was produced by injection molding. As a result of luminance measurement for the final product, the average luminance and luminance uniformity was measured 3,180 nit and 84%, respectively. Consequently, the mold fabrication method using the LiGA-reflow and optical simulation(CAE) can save the expense and time compared with the existing fabrication methods(laser ablation and chemical etching).

A Superconducting $Y_1Ba_2Cu_3O_{7-\delta}$ Square Spiral Microstrip Antenna

  • Jung, Sung-H.;Song, Ki-Y.
    • Progress in Superconductivity
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    • 제2권1호
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    • pp.51-55
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    • 2000
  • A $Y_1Ba_2Cu_3O_{7-\delta}$ square spiral microstrip antenna (YBCO antenna) was epitaxially grown on a $LaAlO_3$ substrate by laser ablation. Also fabricated was a gold square spiral microstrip antenna (gold antenna) having the same structure as that of the YBCO antenna in order to compare the properties of both antennas. Both the YBCO antenna and the gold antenna were operated in Ku (12-18 GHz) band, and their properties such as the return loss, SWR, power gain, and radiation patterns were investigated at 77 K. The return loss below -10 dB was obtained in two frequency ranges, i.e., 14.05-14.90 GHz, and 16-18 GHz for the YBCO antenna at 77 K (YBCO superconducting antenna), and in the frequency range of 15.05-17.60 GHz for the gold antenna at 77 K. The SWR bandwidths are 0.85 GHz and 2 GHz for the YBCO superconducting antenna, and 2.55 GHz for the gold antenna at 77 K. The gain improvement of the superconducting YBCO antenna over the gold antenna at 77 K was about 10 dB in the frequency range of 16 GHz to 18 GHz. The radiation patterns show the YBCO superconducting antenna has the omni-directional property of a spiral antenna.

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탄소 음이온 빔에 의해 증착된 DLC 필름의 특성 평가

  • 김인교;김용환;이덕연;최동준;한동원;백홍구
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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    • pp.59-59
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    • 1999
  • DLC(diamond-like carbon)필름은 다이아몬드와 유사한 강도, 낮은 마차계수, 높은 Optical band gap, NEA(negative electron affinity)등의 우수한 특성을 가지고 있어, 내마모 코팅이나 정보저장 매체의 윤활 코팅, FED(field emission display)의 전계방출소자등 다양한 분야에의 응용이 연구되고 있다. DLC 필름은 PECVD(plasma enhanced chemical vapor deposition), IBAD(ion beam assisted deposition), Laser ablation, Cathodic vacuum arc등의 process를 이용하여 증착되고 있다. 특히 이러한 필름의 물성은 입사되는 이온의 에너지에 의해 좌우되는데, Lifshitz 등의 연구에 의하여 hyperthermal species를 이용한 DLC 필름의 성장은 초기에 subsurface로의 shallow implantation이 일어난 후 높은 sp3 fraction을 갖는 필름이 연속적으로 성장한다는 subplantation model이 제시 되었다. 본 연구에서는 기판과 subplantation 영역이 이후 계속하여 증착되는 순수 DLC 필름의 특성 변호에 미치는 영향에 대하여 관심을 가지고 실험을 행하였다. 본 실험에서는 상기 제시되어 있는 방법보다도 더욱 정확하고도 독립적으로 탄소 음이온의 에너지와 flux를 조절할 수 있는 Cs+ ion beam sputtering system을 이용하여 탄소 음이온의 에너지를 40eV에서 200eV까지 변화시키며 필름을 증착하였다. Si(100) 웨이퍼를 기판으로 사용하였고 증착 압력은 5$\times$10-7torr 였으며 인위적인 기판의 가열은 하지 않았다. 또한 Ion beam deposited DLC film의 growth process를 연구하기 위하여 200eV의 탄소 음이온을 시간(증착두께)을 변수로 하여 증착하였고, 이 때에는 Kaufman type의 gas ion beam을 이용하여 500eV의 Ar+ ion으로 pre-sputering을 행하였다. 탄소 음이온의 에너지와 증착두께에 따라 증착된 film 내의 sp3/sp2 ratio 의 변화를 XPS plasmon loss 와 Raman spectra를 이용하여 분석하였다. 또한 증착두께에 따른 interlayer의 결합상태를 관찰하기 위하여 AES와 XPS 분석을 보조로 행하였다.

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레이저에 의한 모의 진공차단기 내 구리입자들의 거동 계측 (Measurement of behaviour of Cu particles in simulated VCB using laser)

  • 최준영;전용우;하장호;김정배;박원주;이광식
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2000년도 추계학술대회 논문집 학회본부 C
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    • pp.543-546
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    • 2000
  • 본 논문에서는, 모의 진공차단기 내에서의 구리 증기입자의 공간적 및 시간적 밀도분포를 레이저유기형광법 (LIF)에 의해 계측하였다. 레이저 트리거 방전에 의해 생성된 어블레이션(ablation) 플라즈마에서의 구리입자를 324.75nm의 Nd:YAG 레이저를 이용하여 여기시키고, 이때 여기준위에서 기저준위로 천이할 때의 형광신호(510.55nm)를 분광기 및 광전자증배관을 이용하여 계측하였다. 음극점으로부터 넓은 각도를 가지고 전자가 튀어나오며, 넓은 범위에 걸쳐 전자나 이온이 존재하는 것을 알 수 있었다. 또한 음극으로부터 8mm ( x=0, y=8mm 진 위치에서 가장 강한 신호와, 2mm ( x=0, y=2mm 가장 약한 신호를 얻을 수 있었다.

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