• 한국정밀공학회지
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• 제19권11호
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• pp.211-220
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• 2002

Optical disk drives read information by replacing a laser beam on the disk track. As information has become larger, the more accurate position control of a laser beam is necessary. In this paper, we report the analysis and fabrication of the micro mirror for optical disk drivers. A coupled simulation of gas flow and structural displacement of the micro mirror using the Finite-Element-Method is applied to this. The mirror was fabricated by using MEMS technology. Especially, the process using the lapping and polishing step after the bonding of the mirror and electrode plates was employed for the Process reliability. The mirror size was 2.5mm${\times}$3mm and it needed about 35V for displacement of 3.2 ${\mu}$.

• 한국정밀공학회지
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• 제17권2호
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• pp.161-168
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• 2000

In this paper, machining characteristics of glass for HDD media are researched. Nowadays HDD media are used globally as a data storage device. In generally, it is machined by the lapping. But the lapping process time is long and the productivity is low. In this reason, 1 examined the possibility of ELID grinding of glass fur HDD media. If the machining process of HDD media can be changed to ELID grinding, a product cost will be largely saved. The machines used in this experiment were a special rotary type grinder and a normal rotary grinder. The one has an air bearing spindle, the other has not. Experimental results show the possibility of highly efficient grinding and mirror surface can be achieved by the ELID grinding.

• 한국우주과학회:학술대회논문집(한국우주과학회보)
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• 한국우주과학회 2004년도 한국우주과학회보 제13권1호
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• pp.33-33
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• 2004

Traditional bound abrasive grinding leaves the machine marks and subsurface damages ranging from 1 to few tens microns ms in height. These are removed typically by subsequent craftmen-based loose abrasive lapping, polishing and figuring. Using the multi-variable regression technique, we established a new automated grinding process control method for the removal of loose abrasive lapping from the traditional fabrication process. (omitted)

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.425-428
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• 1997

Effectiveness of corrective machining algorithm is verified experimentally in this paper by performing corrective lapping work to single side and double sides hydrostatic tables. Lapping is applied as machining method. Machining information is calculated from measured motion errors by applying the algorithm, without information on rail profile. It is possible to acquire 0.13pm of linear motion error, 1.40arcsec of angular motion error in the case of single side table, and 0.07pm of linear motion error, 1.42arcsec of angular motion error in the case of double sides table. The experiment is performed by the unskilled person after he experienced a little of preliminary machining. Experimental results show that corrective machining algorithm is very effective, and anyone can improve the accuracy of hydrostatic table by using the algorithm.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.82-85
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• 2003

The sapphire wafers for blue light emitting devices were manufactured by the implementation of the surface machining technology based on micro-tribology. This process has been performed by Micro-lapping process. The sapphire crystalline wafers were characterized by DCXD(Double Crystal X-ray Diffraction). The sample quality of crystalline sapphire wafer at surface has a FWHM(Full Width at Half Maximum) of 250 arcsec. This value at the sapphire wafer surfaces indicated 0.12${\mu}{\textrm}{m}$ sizes. Surfaces of sapphire wafers were mechanically affected by residual stress and surface default. Also Surfaces roughness of sapphire wafers were measured 2.1 by AFM(Atom Force Microscope).

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2000년도 춘계학술대회논문집
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• pp.155-158
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• 2000

Flow defect of a piston-pin for automobile parts is investigated in this study. In cold forging of piston-pin Lapping defect a kind of flow defect appears by the dead metal zone. This appearance evidently happens in products with a thin piercing thickness for the dimension accuracy and the decrease of material loss. The best method that can prevent flow defect is removing dead metal zone. The finite element simulations are applied to analyze the flow defect. This study proposed processes for preventing flow defect by removing dead metal zone. Then the results are compared with the experiments for verification. These FE simulation results are in good agreement with the experimental ones.

• 한국정밀공학회지
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• 제18권11호
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• pp.132-137
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• 2001

Application of ceramics, carbide, ferrite has grown considerably due to their mechanical properties such as high degree hardness, chemical stability, super wear resistance. Despite these characters, the use of advanced material has not increased because of poor machinability. The application of metal bonded wheel was proposed. But it is difficult that metal bond wheel can be dressed. Recently, to solve this problem, the technology of in-process electrolytic dressing is developed. This method need wheel for electrolytic dressing, power supply and electrolyte. The aim of this study is development of CIB-D wheel for electrolytic and its evaluation of electrolytic characteristics, and achieve ultra-precision lapping of carbide, optic glass.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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• pp.33-33
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• 2004

래핑은 상하정반 사이에 공작물과 공작물을 지지할 수 있는 캐리어를 삽입하여 유성치차운동 방식으로 가공하는 것으로, 오래 전부터 산업전반에 걸쳐 널리 사용되어 왔다. 래핑의 특징은 한번에 많은 수의 공작물을 가공할 수 있어 가공능률이 우수하고, 높은 형상 정밀도를 확보할 수 있을 뿐만 아니라 가공부의 표면 거칠기가 양호하고 가공 변질층이 작다는 이점을 가지고 있다. 특히 박판 형상의 가공물이나 경도에 비해 강도가 취약한 경취성 재질의 가공물을 정밀하고 효과적으로 가공할 수 있기 때문에 최근에는 정밀 기계산업 분야 이외에도 광통신 산업, 반도체 산업, 디스플레이 산업 등에서 그 활용이 점차 증가하고 있는 추세이다.(중략)

• 한국결정성장학회지
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• 제10권5호
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• pp.350-355
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• 2000

수평 Bridgeman방식으로 성장된 C축 방향의 사파이어 결정기판을 연마 가공하였으며, 또한 유기금속 기상화학 증착 방법으로 사파이어 기판 위에 GaN 박막을 증착하였다. 사파이어 인고트를 성장하여 2인치 사파이어 기판으로 이용하였으며 웨이퍼 절편장치 및 연마장치를 개발하였다. 이러한 다단계의 연마 가공은 기판 표면을 경면화하였다. 표면 평탄도 및 조도는 원자힘현미경으로 측정하였다. 개발된 사파이어 기판위에 성장된 GaN 박막의 특성 및 청색광소자로의 응용 가능성을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 추계학술대회 논문요약집
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• pp.83-83
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• 2003