• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.81-81
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• 2013

반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

• Clean Technology
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• v.25 no.1
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• pp.56-62
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• 2019

The equilibrium, kinetic and thermodynamic parameters of adsorption of murexide by granular activated carbon were investigated. The experiment was carried out by batch experiment with the variables of the amount of the adsorbent, the initial concentration of the dye, the contact time and the temperature. The isothermal adsorption equilibrium was best applied to the Freundlich equation in the range of 293 ~ 313 K. From the separation factor (${\beta}$) of Freundlich equation, it was found that adsorption of murexide by granular activated carbon could be the appropriate treatment method. The adsorption energy (E) obtained from the Dubinin- Radushkevich equation shows that the adsorption process is a physical adsorption process. From the kinetic analysis of the adsorption process, pseudo second order model is more consistent than pseudo first order model. It was found that the adsorption process proceeded to a spontaneous process and an endothermic process through Gibbs free energy change ($-0.1096{\sim}-10.5348kJ\;mol^{-1}$) and enthalpy change ($+151.29kJ\;mol^{-1}$). In addition, since the Gibbs free energy change decreased with increasing temperature, adsorption reaction of murexide by granular activated carbon increased spontaneously with increasing temperature. The entropy change ($147.62J\;mol^{-1}\;K^{-1}$) represented the increasing of randomness at the solid-solution interface during the adsorption reaction of murexide by activated carbon.

• Journal of Space Technology and Applications
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• v.2 no.2
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• pp.104-120
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• 2022

The Small Scale magNetospheric and Ionospheric Plasma Experiment (SNIPE)'s scientific goal is to observe spatial and temporal variations of the micro-scale plasma structures on the topside ionosphere. The four 6U CubeSats (~10 kg) will be launched into a polar orbit at ~500 km. The distances of each satellite will be controlled from 10 km to more than ~1,000 km by the formation flying algorithm. The SNIPE mission is equipped with identical scientific instruments, Solid-State Telescopes(SST), Magnetometers(Mag), and Langmuir Probes(LP). All the payloads have a high temporal resolution (sampling rates of about 10 Hz). Iridium communication modules provide an opportunity to upload emergency commands to change operational modes when geomagnetic storms occur. SNIPE's observations of the dimensions, occurrence rates, amplitudes, and spatiotemporal evolution of polar cap patches, field-aligned currents (FAC), radiation belt microbursts, and equatorial and mid-latitude plasma blobs and bubbles will determine their significance to the solar wind-magnetosphere-ionosphere interaction and quantify their impact on space weather. The formation flying CubeSat constellation, the SNIPE mission, will be launched by Soyuz-2 at Baikonur Cosmodrome in 2023.

• Journal of the Korean Institute of Gas
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• v.27 no.2
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• pp.39-48
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• 2023

This study presents the experimental results to measure the adsorption amount of methane gas by coal according to the conditions of a coalbed methane (CBM) reservoir. Adsorbed gas to coal seam particles was measured under reservoir conditions (normal pressure ~ 1,200 psi pressure range, temperature range15 ~ 45℃) using coal samples obtained from random mines in Kalimantan Island, North Indonesia. The obtained amount of absolute adsorbed gas was applied to triangular with linear interpolation to calculate the maximum amount of adsorbed gas according to temperature and pressure change, at which no experiment was performed. As a result, it was revealed that the amount of adsorbed gas to coal particles increased as the pressure increased and temperature decreased, but the increase of the amount of adsorbed gas decreased at more than an appropriate depth(1,000 ft). In the cleat permeability and cleat porosity for each depth of the coal bed considering the effective stress, the cleat permeability was 28.86 ~ 46.81 md, and the cleat porosity was 0.83 ~ 0.98%. This means that the gas productivity varies significantly with the depth because the reduction of the permeability according to the depth in the coal seam is significant. Therefore, a coalbed depth should be considered essential when designing the spacing of production wells in a coalbed methane reservoir in further study.

• Journal of the Korean Institute of Gas
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• v.27 no.3
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• pp.98-107
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• 2023

This study presents a well spacing design for coalbed methane(CBM) reservoirs using the experimental results of methane gas adsorption measurement of coal samples obtained from North Kalimantan Island, Indonesia. The gas productivity analysis shows that the cumulative gas production increases as the Langmuir volume increases. This indicates that the maximum gas adsorption directly affects the gas production. In addition, the maximum gas production increases with the increase of reservoir permeability, and the dewatering period is shortened. In particular, the cumulative gas production increases as the production influence area increases. However, when comparing productivity per unit well, the maximum cumulative gas production is found between 2,000 ft of depth and 80-160 acres of the influence area. When reservoir depth and production influence area are considered simultaneously, the results of the appropriate well depth and spacing calculations show that gas productivity is highest between 600-2,000 ft. In this case, it is appropriate to design well spacing in the range of 80-160 acres. Therefore, well spacing design considering coalbed depth in undeveloped CBM reservoirs can be accomplished using gas sorption test results from coal samples.

• Proceedings of the Korean Environmental Sciences Society Conference
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• 1998.10a
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• pp.2-4
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• 1998

Proliferation of Nocardia amarae cells in activated sludge has often been associated with the generation of nuisance foams. Despite intense research activities in recent years to examine the causes and control of Nocardia foaming in activated sludge, the foaming continued to persist throughout the activated sludge treatment plants in United States. In addition to causing various operational problems to treatment processes, the presence of Nocardia may have secondary effects on the fate of heavy metals that are not well known. For example, for treatment plants facing more stringent metal removal requirements, potential metal removal by Nocardia cells in foaming activated sludge would be a welcome secondary effect. In contrast, with new viosolid disposal regulations in place (Code o( Federal Regulation No. 503), higher concentration of metals in biosolids from foaming activated sludge could create management problems. The goal of this research was to investigate the metal sorption property of Nocardia amarae cells grown in batch reactors and in chemostat reactors. Specific surface area and metal sorption characteristics of N. amarae cells harvested at various growth stages were compared. Three metals examined in this study were copper, cadmium and nickel. Nocardia amarae strain (SRWTP isolate) used in this study was obtained from the University of California at Berkeley. The pure culture was grown in 4L batch reactor containing mineral salt medium with sodium acetate as the sole carbon source. In order to quantify the sorption of heavy metal ions to N amarae cell surfaces, cells from the batch reactor were harvested, washed, and suspended in 30mL centrifuge tubes. Metal sorption studies were conducted at pH 7.0 and ionlc strength of 10-2M. The sorption Isotherm showed that the cells harvested from the stationary and endogenous growth phase exhibited significantly higher metal sorption capacity than the cells from the exponential phase. The sequence of preferential uptake of metals by N. amarae cells was Cu>Cd>Ni. The specific surFace area of Nocardia cells was determined by a dye adsorption method. N.amarae cells growing at ewponential phase had significantly less specific surface area than that of stationary phase, indicating that the lower metal sorption capacity of Nocardia cells growing at exponential phase may be due to the lower specific surface area. The growth conditions of Nocardia cells in continuous culture affect their cell surface properties, thereby governing the adsorption capacity of heavy metal. The comparison of dye sorption isotherms for Nocardia cells growing at various growth rates revealed that the cell surface area increased with increasing sludge age, indicating that the cell surface area is highly dependent on the steady-state growth rate. The highest specific surface area of 199m21g was obtained from N.amarae cell harvested at 0.33 day-1 of growth rate. This result suggests that growth condition not only alters the structure of Nocardia cell wall but also affects the surface area, thus yielding more binding sites of metal removal. After reaching the steady-state condition at dilution rate, metal adsorption isotherms were used to determine the equilibrium distributions of metals between aqueous and Nocardia cell surfaces. The metal sorption capacity of Nocardia biomass harvested from 0.33 day-1 of growth rate was significantly higher than that of cells harvested from 0.5- and 1-day-1 operation, indicatng that N.amarae cells with a lower growth rate have higher sorpion capacity. This result was in close agreement with the trend observed from the batch study. To evaluate the effect of Nocardia cells on the metal binding capacity of activated sludge, specific surface area and metal sorption capacity of the mixture of Nocardia pure cultures and activated sludge biomass were determined by a series of batch experiments. The higher levels of Nocardia cells in the Nocardia-activated sludge samples resulted in the higher specific surface area, explaining the higher metal sorption sites by the mixed luquor samples containing greater amounts on Nocardia cells. The effect of Nocardia cells on the metal sorption capacity of activated sludge was evaluated by spiking an activated sludge sample with various amounts of pre culture Nocardia cells. The results of the Langmuir isotherm model fitted to the metal sorption by various mixtures of Nocardia and activated sludge indicated that the mixture containing higher Nocardia levels had higher metal adsorption capacity than the mixture containing lower Nocardia levels. At Nocardia levels above 100mg/g VSS, the metal sorption capacity of activate sludge increased proportionally with the amount of Noeardia cells present in the mixed liquor, indicating that the presence of Nocardia may increase the viosorption capacity of activated sludge.

• Korean Journal of Environmental Agriculture
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• v.22 no.2
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• pp.148-152
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• 2003

The phosphorus(P) adsorption capacities of various filter media were investigated in relation to the size and types of fitter media to screen the optimum condition. The objective of this study was to evaluate the constructed wetland longevity by improving P adsorption capacity. The maximum P adsorption capacities of filter media A($4{\sim}10\;mm$), B($2{\sim}4\;mm$) and C($0.1{\sim}2\;mm$) were 8, 10 and 22 mg/kg, respectively, showing those increased as the filter media size decreased. Among the experimental media, the optimum filter media size was $0.1{\sim}2\;mm$. When the filter Medium was supplemented with organic materials which were piled up and decayed in the constructed wetland, the P adsorption capacity was significantly enhanced Under the conditions of optimum fitter media size, the respective Maximum P adsorption capacities of filter media C when supplemented with Ca, Mg, Al and Fe were higher than that of filter media C. However the addition of Ca, Mg, Al and Fe to constructed wetland were not recommended because of the possibility of their secondary pollution. The maximum P adsorption capacity of filter media C was 22 mg/kg, but this was increased to 36 mg/kg when filter media C was supplemented with 2% oyster shell.

• Membrane Journal
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• v.6 no.3
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• pp.157-165
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• 1996

Polysulfone(PS) membranes were prepared from homogeneous PS solutions by the phase inversion technique. When propionic acid(PA) was added into a casting solution of n-methylpyrrolidone(NMP) and PS, precipitation rate of the solution film was accelerated. This kind of acceleration was consistent, even though a precipitating nonsolvent was changed from water to isopropanol. These phenomena were caused by decrease of nonsolvent tolerance in the casting solution due to addition of PA. PS powder was prepared by precipitation of a 3wt% solution in dimethylformamide(DMF) using ethanol as nonsolvent. Gas adsorption analysis of the powder showed that the capillary condensation sites were found in the powder structure. Membranes prepared from PS solution(15wt%) in NMP had the following characteristics of gas adsorption and water permeation. In gas adsorption analysis, the membrane precipitated using isopropanol showed low uptake of nitrogen gas and the capillary condensation sites were not found. On the contrary, a significant amount of the capillary condensation sites was found in the membrane coagulated by water, which was related to increase of nitrogen uptake. tn the membrane prepared froin the solution including PA, an increase of the Henry's law sites and the Langmuir sites was not found clearly. However, the capillary condensation sites were significantly increased, and the water transport also increased.

• Applied Biological Chemistry
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• v.28 no.2
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• pp.68-75
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• 1985

Laboratory experiments were conducted to investigate the effect of compost and humic acid treatment on adsorption of Cd, Zn, and Cu in soils. Three soils differing in physical and chemical properties used in this experiments were Bonyrang (Typic Udifluvents) SL, Gangseo (Aquatic Eutrochrepts) L, and Gyorae (Typic Distrandepts) SiL. Adsorption of Cd, Zn, ana Cu on the soils followed Langmuir isotherm up to 75 ppm of initial concentration. The adsorption maxima of Cd, Zn, and Cu for the Bonryang soil, the lowest in pH, organic matter content, and CEC, were the lowest of the three soils. Although the Gyorae soil derived from volcanic ash was the highest in organic matter content and CEC, the adsorption maxima of heavy metals for the Gyorae soil were lower than those for the Gangseo soil of which organic content and CEC were intermidiate. The adsorption maxima/CEC ratios for the Bonryang, the Gangseo, the Gyorae soils were found to be in the range of $23{\sim}27%,\;28{\sim}57%$, and $11{\sim}14%$ respectively The bonding energy constants of Cd, Zn, and Cu for the soils were in the order of Gangseo>Bonryang>Gyorae soils. The adsorption maxima of Cd, Zu, and Cu for the Bonryang soil increased with compost treatment by $100{\sim}210%,\;90{\sim}230%$, and $130{\sim}290%$ respectively, while little difference was observed when the soil was treated with humic acid Bonding energy constants of Cd, Zn, and Cu for the Bonryang soil increased significantly with compost treatment, and showed insignificant correlation with humic acid treatment.

• The Korean Journal of Physiology
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• v.7 no.2
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• pp.1-8
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• 1973

Though it has been reported by Clements et al. and Avery et al. that the activity of the pulmonary surfactant can be altered by the temperature changes, a conclusive evidence of the effects of temperature on the surfactant system of the lung is yet to come. In the present study, an attempt was made to observe possible effects of a few different degrees of temperature on the activity of the pulmonary surfactant of the rabbit in vivo and in vitro. The rabbit was sacrificed by blood shedding and both lungs were completely removed. The lung washings, obtained by gently lavaging the left lung with saline, was placed at 1) 4C for 1, 5, 10, 15, 30 and 40 days, and 2) 20C for 1, 2, 3, 4, 5 and 7 days for in vitro experiment. For in vivo experiment, the rabbit was placed at 4C for 4, 8, 12 and 24 hours, and the lung lavage was prepared as described above in the in vitro experiment. Tension-area (T-A) diagram of the lung lavage was recorded automatically by a modified. Langmuir-Wilhelmy balance with a synchronized recording system. The surface tensions thus obtained were compared with those of the normal rabbit, and the results are summarized as follows: 1. The maximal surface tension, minimal surface tension and stability index of the normal rabbit lung lavage were $52.5{\pm}2.3\;dynes/cm,\;4.9{\pm}2.3\;dynes/cm$ and 1.65, respectively. 2. In the group where the lung lavage was placed at 4C in vitro, the maximal and minimal surface tensions, and stability index did not show any noticeable changes comparing with the normal values up to 30 days. On the 40th day of the experiment, a tendency of a slight increase in the surface tensions was observed but the change was not significant. 3. When the lung lavage was placed at 20 C in vitro, the maximal surface tension did not show any appreciable change comparing with the normal except on the 7 th day with a slight increase. The minimal surface tension showed an increased value from the 2nd day, and on the 5 th and 7 th experimental day, markedly increased value was observed. The stability index, on the other hand. showed a marked decrease throughout the entire experiment with the value of 0.71 and 0.53 on the 5th and 7 th day, respectively. 4. In the group where the rabbit was placed at 4 C in vivo, the maximal surface tensions and stability index of the lung lavage showed little change from the normal. The minimal surface tension at 12 experimental hour showed a slight increase, but it returned to the normal value at 24 hour.