• Journal of the Korean Institute of Gas
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• v.27 no.1
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• pp.63-69
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• 2023

Although Korea is the world's No. 1 semiconductor producing country, most studies are conducted with risk assessment for simple material risks due to the closedness of the site for industrial protection. In terms of industrial safety, a monitoring system such as a gas detector to determine the leakage of hazardous substances has been established, but research on effectively discharging harmful gastritis substances in case of leakage has only recently begun. Semiconductor manufacturing facilities (gas boxes) where a large amount of flammable materials are handled are currently being safety managed by using a gas detector and blocking the air inlet. It is difficult to dilute in a short time in case of leakage of flammable substances. Therefore, in this study, based on various criteria, the size of the duct according to the size of the gas box is determined and the appropriate size of the air inlet is studied to minimize the exhaust performance requirement without exposing hazardous chemicals to the outside in the event of a flammable leak. We want to do an optimal exhaust design.