• IE interfaces
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• v.23 no.3
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• pp.229-238
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• 2010

Virtual metrology (VM), a critical component of semiconductor manufacturing, is an efficient way of assessing the quality of wafers not actually measured. This is done based on a model between equipment sensor data (obtained for all wafers) and the quality characteristics of wafers actually measured. This paper considers principal component regression (PCR), partial least squares regression (PLSR), kernel PCR (KPCR), and kernel PLSR (KPLSR) as VM models. For each regression model, two cases are considered. One utilizes all explanatory variables in developing a model, and the other selects significant variables using the genetic algorithm (GA). The prediction performances of 8 regression models are compared for the short- and long-term etch process data. It is found among others that the GA-KPLSR model performs best for both types of data. Especially, its prediction ability is within the requirement for the short-term data implying that it can be used to implement VM for real etch processes.

• Journal of Biosystems Engineering
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• v.23 no.1
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• pp.49-56
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• 1998

The objectives of this study were to develop models to predict the contents of moisture and protein of single kernel of brown rice based on visible/NIR (near-infrared) spectroscopic technique. The reflectance spectra of rice were obtained in the range of the wavelength 400 to 2,500 nm with 2 nm intervals. Multiple linear regression(MLR) and partial least squares (PLS) were used to develop the models. The MLR model using the first derivative spectra(10 nm of gap) with Standard Normal Variate and Detrending (SNV and Drt.) preprocessing showed the best results to predict moisture content of the sin린e kernel brown rice. To predict the protein content of a single kernel of brown ricer the PLS model used the raw spectra with multiplicative scatter correction(MSC) preprocessing over the wavelength of 1,100~1,500 nm.

• Journal of Animal Environmental Science
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• v.20 no.3
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• pp.117-124
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• 2014

The objectives were to assess the use of near-infrared reflectance spectroscopy (NIRS) as a tool for estimating nutrient compositions of corn kernel, and to apply an NIRS-based indium gallium arsenide array detector to the system for collecting spectra and analyzing calibration equations using equipments designed for field application. Partial Least Squares Regression (PLSR) was employed to develop calibration equations based on representative data sets. The kennard-stone algorithm was applied to induce a calibration set and a validation set. As a result, the method for structuring a calibration set significantly affected prediction accuracy. The prediction of chemical composition of corn kernel resulted in the following (kennard-stone algorithm: relative) moisture ($R^2=0.82$, RMSEP=0.183), crude protein ($R^2=0.80$, RMSEP=0.142), crude fat ($R^2=0.84$, RMSEP=0.098), crude fiber ($R^2=0.74$, RMSEP=0.098), and crude ash ($R^2=0.81$, RMSEP=0.048). Result of this experiment showed the potential of NIRS to predict the chemical composition of corn kernel.