• Journal of the Korean Society for Precision Engineering
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• v.30 no.1
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• pp.128-133
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• 2013

Si Nanowire (Si-NW) arrays were fabricated by top-down method. A relatively simple method is suggested to fabricate suspended silicon nanowire arrays. This method allows for the production of suspended silicon nanowire arrays using anisotropic wet etching and conventional MEMS method of SOI (Silicon-On-Insulator) wafer. The dimensions of the fabricated nanowire arrays with the proposed method were evaluated and their effects on the Field Effect Transistor (FET) characteristics were discussed. Current-voltage (I-V) characteristics of the device with nanowire arrays were measured using a probe station and a semiconductor analyzer. The electrical properties of the device were characterized through leakage current, dielectric property, and threshold voltage. The results implied that the electrical characteristics of the fabricated device show the potential of being ion-selective field effect transistors (ISFETs) sensors.

• Journal of Biosystems Engineering
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• v.36 no.5
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• pp.326-333
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• 2011

The need for rapid on-site monitoring of hydroponic macronutrients has led to the use of ion-selective electrodes, because of their advantages over spectrophotometric methods, including simple methodology, direct measurement of analyte, sensitivity over a wide concentration range, and low cost. Stability and repeatability of response can be a concern when using multiple ion-selective electrodes to measure concentrations in a series of samples because accuracy might be limited by drifts in electrode potential. A computer-based measurement system could improve accuracy and precision because of both consistent control of sample preparation and easy calibration of sensors. Our goal was to investigate the applicability of a cobalt-based electrode used in conjunction with a laboratory-made automated test stand for quantitative determination of ${PO_4}^-$ in hydroponic solution. Six hydroponic solutions were prepared by diluting highly concentrated paprika hydroponicsolution to provide a concentration range of 1 to 300 ppm $PO_4$-P. A calibration curve relating electrode response to phosphate in paprika hydroponic solution titrated to pH 4 with 0.025M KHP was developed based on the Nikolskii-Eisenman equation with a coefficient of determination ($R^2$) of 0.94. The laboratory-made test stand consisting of three cobalt-based electrodes measured phosphate concentrations similar to those obtained with standard laboratory methods (a regression slope of 0.98 with $R^2$ = 0.80). However, the y intercept was relatively high, 30 ppm, probably due to the relatively large amount of variation present among multiple measurements of the same sample. Further studies on the high variation in EMFs obtained with cobalt electrodes during replicate measurements were required for P estimations comparable to those obtained with standard laboratory instruments.

• Journal of Sensor Science and Technology
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• v.6 no.3
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• pp.207-213
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• 1997

A field effect transistor(FET) type dissolved carbon dioxide($pCO_{2}$) sensor with a double layer structure of hydrogel membrane and $CO_{2}$ gas permeable membrane was fabricated by utilizing a $H^{+}$ ion selective field effect transistor(pH-ISFET) with Ag/AgCl reference electrode as a base chip. Formation of hydrogel membrane with photo-crosslinkable PVA-SbQ or PVP-PVAc/photosensitizer system was not suitable with the photolithographic process. Furthermore, hydrogel membrane on pH-ISFET base chip could be fabricated by photolithographic method with the aid of N,N,N',N'-tetramethyl othylenediarnine(TED) as $O_{2}$ quencher without using polyester film as a $O_{2}$ blanket during UV irradiation process. Photosensitive urethane acrylate type oligomer was used as gas permeable membrane on top of hydrogel layer. The FET type $pCO_{2}$ sensor fabricated by photolithographic method showed good linearity (linear calibration curve) in the range of $10^{-3}{\sim}10^{0}\;mol/{\ell}$ of dissolved $CO_{2}$ in aqueous solution with high sensitivity.