• 한국정밀공학회지
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• 제30권1호
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• pp.128-133
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• 2013

Si Nanowire (Si-NW) arrays were fabricated by top-down method. A relatively simple method is suggested to fabricate suspended silicon nanowire arrays. This method allows for the production of suspended silicon nanowire arrays using anisotropic wet etching and conventional MEMS method of SOI (Silicon-On-Insulator) wafer. The dimensions of the fabricated nanowire arrays with the proposed method were evaluated and their effects on the Field Effect Transistor (FET) characteristics were discussed. Current-voltage (I-V) characteristics of the device with nanowire arrays were measured using a probe station and a semiconductor analyzer. The electrical properties of the device were characterized through leakage current, dielectric property, and threshold voltage. The results implied that the electrical characteristics of the fabricated device show the potential of being ion-selective field effect transistors (ISFETs) sensors.

• Journal of Biosystems Engineering
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• 제36권5호
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• pp.326-333
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• 2011

The need for rapid on-site monitoring of hydroponic macronutrients has led to the use of ion-selective electrodes, because of their advantages over spectrophotometric methods, including simple methodology, direct measurement of analyte, sensitivity over a wide concentration range, and low cost. Stability and repeatability of response can be a concern when using multiple ion-selective electrodes to measure concentrations in a series of samples because accuracy might be limited by drifts in electrode potential. A computer-based measurement system could improve accuracy and precision because of both consistent control of sample preparation and easy calibration of sensors. Our goal was to investigate the applicability of a cobalt-based electrode used in conjunction with a laboratory-made automated test stand for quantitative determination of ${PO_4}^-$ in hydroponic solution. Six hydroponic solutions were prepared by diluting highly concentrated paprika hydroponicsolution to provide a concentration range of 1 to 300 ppm $PO_4$-P. A calibration curve relating electrode response to phosphate in paprika hydroponic solution titrated to pH 4 with 0.025M KHP was developed based on the Nikolskii-Eisenman equation with a coefficient of determination ($R^2$) of 0.94. The laboratory-made test stand consisting of three cobalt-based electrodes measured phosphate concentrations similar to those obtained with standard laboratory methods (a regression slope of 0.98 with $R^2$ = 0.80). However, the y intercept was relatively high, 30 ppm, probably due to the relatively large amount of variation present among multiple measurements of the same sample. Further studies on the high variation in EMFs obtained with cobalt electrodes during replicate measurements were required for P estimations comparable to those obtained with standard laboratory instruments.

• 센서학회지
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• 제6권3호
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• pp.207-213
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• 1997

$H^{+}$ 이온에 선택적으로 감응하는 field effect transistor(pH-ISFET)를 바탕소자로 하고, 그 gate 주위에 Ag/AgCl 기준전극을 형성한 다음, 이를 둘러싼 수화젤(hydrogel)막 및 기체투과막의 이중막 구조를 가진 용존이산화탄소($CO_{2(aq)}$) 센서소자를 사진식각(photolithography)법으로 제작하였다. PVA-SbQ 혹은 PVP-PVAc/감광제 형의 광가교형 감광액은 수화젤막 형성에 적합하지 않았으나, 2-hydroxyethyl methacrylate(HEMA) 및 acrylamide를 포함하는 광중합형 감광액을 사용할 경우에는 사진식각법에 의한 수화젤막이 좋은 해상도로 얻어졌다. 기체투과막은 urethane acrylate계 UV-oligomer를 주성분으로 한 감광액을 써서 사진식각법으로 수화젤막위에 형성할 수 있었다. 또한 수화젤막 및 기체투과막을 사진식각법으로 형성할 때 N,N,N',N'-tetramethyl ethplenediamine(TED) 을 $O_{2}$ quencher로서 감광액 중에 도입함으로써 UV 노광시에 polyester film을 부착하는 번거로운 공정을 생략할 수 있음을 알았다. 이렇게 제조된 $pCO_{2}$ 센서는 수용액 중에서 $10^{-3}{\sim}10^{0}\;mol/{\ell}$의 $CO_{2}$ 농도변화에 대하여 직선적인 검정곡선(calibration curve)을 얻을 수 있었다.