• Title/Summary/Keyword: ion cluster

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Mass Spectrometric Study of Carbon Cluster Formation in Laser Ablation of Graphite at 355 nm

  • Koo, Young-Mi;Choi, Young-Ku;Lee, Kee-Hag;Jung, Kwang-Woo
    • Bulletin of the Korean Chemical Society
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    • v.23 no.2
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    • pp.309-314
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    • 2002
  • The ablation dynamics and cluster formation of $C_n^+$ ions ejected from 355 nm laser ablation of a graphite target in vacuum are investigated using a reflectron time-of-flight (RTOF) mass spectrometer. At low laser fluence, odd-numbered cluster ions with $3{\leq}n{\leq}15$ are predominantly produced. Increasing the laser fluence shifts the maximum size distribution towards small cluster ions, implying the fragmentation of larger clusters within the hot plume. The temporal evolution of $C_n^+$ ions was measured by varying the delay time of the ion extraction pulse with respect to the laser irradiation, providing significant information on the characteristics of the ablated plume. Above a laser fluence of $0.2J/cm^2$ , large cluster ions ($n{\geq}30$) are produced at relatively long delay times, indicating that atoms or small carbon clusters aggregate during plume propagation. The dependence of the intensity of ablated $C_n^+$ ions on delay time after laser irradiation shows that the most probable velocity of each cluster ion decreases with cluster size.

Molecular dynamics simulation of ultra-low energy ion implantation for GSI device technology development (GSI소자 개발을 위한 극 저 에너지 이온 주입에 대한 분자 역학 시뮬레이션)

  • 강정원;손명식;황호정
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.3
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    • pp.18-27
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    • 1998
  • Molecular dynamicsinvestigations of ion implantation considering point defect generation were performed with ion energies in the range of ~1keV, Simulation starts perfect diamond cubic lattice site. Stillinger-Weber potential and ZBL potential were used to calculate forces between atoms. We have simulated slowing-down of ion velocity, ion trajectory and coupled-coing between ion and silicon. We also discussed distribution of point defect using rdial distribution function. We found that interstitial produced by ion bombardment mainly formed interstitial cluster.

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Study of CO2+(CO2)n Cluster in a Paul Ion Trap

  • Karimi, L.;Sadat Kiai, S.M.;babazaheh, A.R.;Elahi, M.;Shafaei, S.R.
    • Mass Spectrometry Letters
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    • v.10 no.1
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    • pp.27-31
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    • 2019
  • In this article, the properties of ${CO_2}^+(CO_2)_n$ clusters in a Paul ion trap have been investigated using mass-selective instability mode which conducted by chosen precursor ions, mainly $Ar^+$ and ${CO_2}^+$ produced by a mixture of Ar and $CO_2$. Exposure of ${CO_2}^+$ ions to $CO_2$ molecules, lead to the formation of ${CO_2}^+(CO_2)_n$ clusters. Here, Ar gas react as a buffer gas and lead to form ${CO_2}^+(CO_2)_n$ cluster by collisional effect.

SIMS Depth Profiling Analysis of Cl in $TiCl_4$ Based TiN Film by Using $ClCs_2^+$ Cluster Ions

  • Gong, Su-Jin;Park, Sang-Won;Kim, Jong-Hun;Go, Jung-Gyu;Park, Yun-Baek;Kim, Ho-Jeong;Kim, Chang-Yeol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.161-161
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    • 2012
  • 질화티타늄(Titanium Nitride, TiN)은 화학적 안정성이 우수하고, N/Ti 원소 비율에 따라 열전도성 및 전기전도성이 변화하는 특성을 가지고 있어서 Metal Insulator Silicon (MIS) 나 Metal Insulator Metal (MIM) capacitor의 metal electrode 물질로 적용되고 있다. $TiCl_4$$NH_3$ gas를 이용하여 $500^{\circ}C$ 이상의 고온 조건에서 Chemical Vapor Deposition (CVD) 법으로 TiN 박막을 증착하는 방식이 가장 널리 사용되고 있으나, TiN 박막 내의 Chlorine (Cl) 원소가 SiO2 두께와 누설전류 밀도를 증가시키는 요인으로 작용하므로 Cl의 거동 및 함량 제어를 통한 전기적인 특성의 향상 평가가 요구되고 있다[1-3]. 본 실험에서는 $SiO_2$ 위에 TiN을 적층 한 구조에서 magnetic sector type의 Secondary Ion Mass Spectrometry (SIMS)를 이용하여 Cl 원소의 검출도 개선 방법을 연구하였다. 일반적인 $Cs^+$ 이온을 이용하여 $Cl^-$ 이온을 검출할 경우에는 TiN 하부에 $SiO_2$가 존재함에 따른 charging effect와 mass interference가 발생되는 문제점이 관찰되었다. 이를 개선하기 위해 Cl과 Cs 원소가 결합된 $ClCs^+$ cluster ion을 검출하는 방법을 시도하였으나, Cl- 이온 검출 방식에 비해 오히려 낮은 검출도를 나타내었으나 Cl 원소가 속하는 halogen 족 원소의 높은 전자 친화도 특성을 이용한 $ClCs_2^+$ cluster ion을 검출하는 방법[4]을 적용한 경우에는 $ClCs^+$ 방식에 비해 검출도가 3order 개선되는 결과를 확보하였으며, 이 결과를 토대로 Cl dose ($atoms/cm^2$) 와 Rs (ohm/sq) 간의 상관 관계에 대해 고찰하고자 한다.

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Electronic States Calculation of Fe4N by DV-Xα cluster calculation (DV-Xα 클러스터 계산법에 의한 Fe4N의 전자상태계산)

  • Song, Dong-Won;Lee, In-Seop;Bae, Dong-Su
    • Korean Journal of Materials Research
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    • v.12 no.1
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    • pp.44-47
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    • 2002
  • DV(Discrete Variation)-X${\alpha}$ cluster calculation was employed to calculate the electronic states of ${\gamma}'- Fe_4N$ which was one of iron nitride phases synthesized from plasma ion nitriding to improve surface hardness and wear resistance. The result of calculated electron density of states for Fe was similar to the result of band calculation. The cluster used for calculation of electronic states of ${\gamma}'-Fe_4N$ was based on $Fe_{14}N$ cluster which comprises 15 atoms. Finally the electronic states of ${\gamma}'- Fe_4N$ such as net-charge, band order, energy level, electron wave-function, and contour map for electron density were derived by the calculation.

Investigation of New Ionized Cluster Beam Source (새로운 이온화된 클라스터 빔원의 제작과 특성 조사)

  • ;;;;S.G.Kondrnine;E.A. Krallkina
    • Journal of the Korean Vacuum Society
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    • v.5 no.3
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    • pp.251-257
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    • 1996
  • The present paper represents the results of development and first experimental tests of a new ionized cluster beam (ICB) source. The novelty of ICB source lies in the fact that the crucible and ionization parts are spaced in one cylindrical shell but are not divided in an electric circuit. The ICB source adapts permanent magnets to increase the ionization efficiency. The maximum obtained $Cu^+$ ion current denisity is $1.5{\mu}A/\textrm{cm}^2$, therewith the ionization rate amounts 3% under deposition rate is 0.2$\AA$/s and the acceleration voltage is 4 kV, the $Cu^+$ ion beam uniformity is better than 95%.

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Influence of Ammonia Solvation on the Structural Stability of Ethylene Cluster Ions

  • Jung Kwang Woo;Choi Sung-Seen;Jung Kwang Woo;Hang Du-Jeon
    • Bulletin of the Korean Chemical Society
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    • v.13 no.3
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    • pp.306-311
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    • 1992
  • The stable structures of pure ethylene and mixed ethylene-ammonia cluster ions are studied using an electron impact ionization time-of-flight mass spectrometer. Investigations on the relative cluster ion distributions of $(C_2H_4)_n(NH_3)_m^+$ under various experimental conditions suggest that $(C_2H_4)_2(NH_3)_3^+$ and $(C_2H_4)_3(NH_3)_2^+$ ions have the enhanced structural stabilities, which give insight into the feasible structure of solvated ions. For the stable configurations of these ionic species, we report an experimental evidence that both $(C_2H4)_2^+(C_2H_4)_3^+$ clusters as the central cations provide three and two hydrogen-bonding sites, respectively, for the surrounding $NH_3$ molecules. This interpretation is based on the structural stability for ethylene clusters and the intracluster ion-molecular rearrangement of the complex ion under the presence of ammonia solvent molecules.

Improvement of Abrasion and Debris on Styrene-Butadiene-Styrene Block Copolymer with Carboxylated SBR Latex and Zinc Oxide (카르복실화 SBR 라텍스와 산화아연을 이용한 SBS의 내마모성과 데브리스(debris) 개선 연구)

  • Lee, Jin Hyok;Bae, Jong Woo;Kim, Jung Su;Yoon, Yoo-Mi;Jo, Nam-Ju
    • Elastomers and Composites
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    • v.48 no.3
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    • pp.225-231
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    • 2013
  • In this study, we observed the effect of carboxylated SBR latex and zinc oxide on styrene-butadiene-styrene( SBS) composites for improving abrasion and debris. SBS composite, which added only silica, showed poor mechanical properties, NBS abrasion, and debris, caused by strong filler-filler interaction of silica. In case of adding carboxylated SBR latex, mechanical properties, NBS abrasion and debris of SBS composite were improved. Because of carboxyl group of carboxylated SBR latex interacted with silanol group of silica. Both carboxylated SBR latex and zinc oxide were added, SBS composite showed highest mechanical properties, NBS abrasion, and debris by forming ion cluster between carboxylated SBR latex and zinc oxide. By FT-IR analysis, ion clusters were confirmed that observed zinc carboxylated group stretch peak at $1550{\sim}1650cm^{-1}$ range. SBS composite, SC-4, showed excellent mechanical properties ; tensile strength $156kgf/cm^2$, elongation 936%, tear strength 59.4kgf/cm ; and excellent abrasion characteristics ; NBS abrasion 338%. Also, debris of SC-4 was minimized and showed wave-shape in fracture surface.