Proceedings of the Korean Vacuum Society Conference
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2012.08a
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pp.80-81
/
2012
Recently, one of the critical issues in the etching processes of the nanoscale devices is to achieve ultra-high aspect ratio contact (UHARC) profile without anomalous behaviors such as sidewall bowing, and twisting profile. To achieve this goal, the fluorocarbon plasmas with major advantage of the sidewall passivation have been used commonly with numerous additives to obtain the ideal etch profiles. However, they still suffer from formidable challenges such as tight limits of sidewall bowing and controlling the randomly distorted features in nanoscale etching profile. Furthermore, the absence of the available plasma simulation tools has made it difficult to develop revolutionary technologies to overcome these process limitations, including novel plasma chemistries, and plasma sources. As an effort to address these issues, we performed a fluorocarbon surface kinetic modeling based on the experimental plasma diagnostic data for silicon dioxide etching process under inductively coupled C4F6/Ar/O2 plasmas. For this work, the SiO2 etch rates were investigated with bulk plasma diagnostics tools such as Langmuir probe, cutoff probe and Quadruple Mass Spectrometer (QMS). The surface chemistries of the etched samples were measured by X-ray Photoelectron Spectrometer. To measure plasma parameters, the self-cleaned RF Langmuir probe was used for polymer deposition environment on the probe tip and double-checked by the cutoff probe which was known to be a precise plasma diagnostic tool for the electron density measurement. In addition, neutral and ion fluxes from bulk plasma were monitored with appearance methods using QMS signal. Based on these experimental data, we proposed a phenomenological, and realistic two-layer surface reaction model of SiO2 etch process under the overlying polymer passivation layer, considering material balance of deposition and etching through steady-state fluorocarbon layer. The predicted surface reaction modeling results showed good agreement with the experimental data. With the above studies of plasma surface reaction, we have developed a 3D topography simulator using the multi-layer level set algorithm and new memory saving technique, which is suitable in 3D UHARC etch simulation. Ballistic transports of neutral and ion species inside feature profile was considered by deterministic and Monte Carlo methods, respectively. In case of ultra-high aspect ratio contact hole etching, it is already well-known that the huge computational burden is required for realistic consideration of these ballistic transports. To address this issue, the related computational codes were efficiently parallelized for GPU (Graphic Processing Unit) computing, so that the total computation time could be improved more than few hundred times compared to the serial version. Finally, the 3D topography simulator was integrated with ballistic transport module and etch reaction model. Realistic etch-profile simulations with consideration of the sidewall polymer passivation layer were demonstrated.
This experiment is a comparative study of influence on the seedling in individual pH treatment of culture soil I. T-R ratio and growth 1. T-R ratio has almost similar tendency in its range according to tree species, but in individual treatment there were lots of differences. In the strong acidic and the strong alkali conditions T-R ratio was small. This means the seedling body is out of balance. 2. Where the resistance to H-ion was stronger, the growth of root-system, that is, the resistance of fine root was comparatively better. 3. The growth of root system was greatly influenced by pH, and in the condition of pH3, pH8, pH9, the growth was especially worse. 4. Ginkgo biloba, Pinus rigida and Pinus banksiana kept on growing in the strong acidic condition. 5. The growth season has higher pH of culture soil than the dormant season, and tree species which have strong resistance of acidic had better growth and had stronger resistance of draught in the acidic condition of culture soil ; especially, Pinus rigida and Pinus banksiana were worse in the alkali condition. II Seedling pH 1. According to the tree species, there were differences in seedling pH, and tree species, considred to be strong in resistance of draught, had been high in seedling pH. 2. Seedling pH of the growth season was higher than that of the dormant season. 3. Seedling pH was not significant in pH treatment of the culture soil.
The issue of acid precipitation and related environmental problems in East Asia has been emerging. To evaluate the acidity and chemical characteristics of rainwater in Korea, its chemical properties during cultivation season from April to October were investigated at Taean in 2007. Also, to estimate the contribution of ions on its acidity, ion composition characteristics and neutralization effects by cation ions were determined. The ion balance between cations and anions values showed high correlation. The mean values of pH and EC were 4.9 and $32.9{\mu}S\;cm^{-1}$, respectively. The EC of rainwater showed seasonal characteristic, which was $91.4{\mu}S\;cm^{-1}$ with relatively low rainfall compared with other monitoring periods. $Na^+$ was the main cation followed by $NH_4{^+}$ > $Ca^{2+}$ > $H^{+}$ > $Mg^{2+}$ > $K^+$. Among these ions, $Na^{+}$ and $NH_4{^+}$ covered over 70% of total cations. In the case of anion, the order was $SO_4{^{2-}}$ > $NO_3{^-}$ > $Cl^{-}$. The mean value of sulfate, which is main anion component in the samples was $152.1{\mu}eq\;L^{-1}$. Also, 90% of soluble sulfate in rainwater was $nss-SO_4{^{2-}}$(non-sea salt sulfate). With fractional acidity and theoretical acidity of rainwater samples, $NH_4{^+}$ and $Ca^{2+}$ contributed greatly in neutralizing the rain acidity.
Bu, Jun Oh;Song, Jung Min;Shin, Su Hyun;Kim, Won Hyung;Kang, Chang Hee
Analytical Science and Technology
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v.29
no.1
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pp.19-28
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2016
The objective of this study was to determine the acidification of precipitation in the Jeju area. Precipitation samples were collected from the Jeju area from 2009-2014, and the major ionic species were analyzed. In the regression analysis, through a comparison of ion balance, electric conductivity, and acid fraction, the correlation coefficients showed a good linear relationship within the range of 0.927~0.983. The volume-weighted means of the pH and electric conductivity were 4.9 and 22.7 µS/cm, respectively. The ionic strength of precipitation was 0.27±0.38 mM, indicating about 35.9 % of total precipitation within the pure precipitation criteria. The volume-weighted mean concentrations (ìeq/L) of the ionic species in the precipitation were in the order of Na+ > Cl− > nss-SO42− > NO3− > NH4+ > Mg2+ > H+ > nss-Ca2+ > PO43− > K+ > HCOO− > CH3COO− > NO2− > F− > HCO3− > CH3SO3− . The acidification contributions by sulfuric and nitric acids were 54.5 % and 36.5 %, respectively. Meanwhile the acidification contributions by formic and acetic acids were 4.8 % and 4.2 %, respectively. Thus, it was found that the acidification of the precipitation in the Jeju area was mainly due to the inorganic acids. The neutralization factors by NH3 and CaCO3 were also 33 % and 20 %, respectively.
Bu, Jun-Oh;Song, Jung-Min;Park, Sook-Young;Kang, Hee-Ju;Kang, Chang-Hee
Analytical Science and Technology
/
v.33
no.1
/
pp.33-41
/
2020
Wet precipitation samples were collected in Jeju City and Mt. Halla-1100 site (a site at an altitude of 1100 m on Mt. Halla) during 2011-2013, and their major ionic species were analyzed to examine the chemical composition and characteristics. A comparison of ion balance, electric conductivity, and acid fraction of precipitation revealed correlation coefficients in the range of r = 0.950~0.991, thereby implying the high quality of analytical data. Volume-weighted mean pH and electric conductivity corresponded to 4.86 and 25.5 µS/cm for Jeju City, and 4.98 and 15.1 µS/cm for Mt. Halla-1100 site, respectively. Ionic strengths of the wet precipitation in Jeju City and Mt. Halla-1100 site corresponded 0.3 ± 0.5 and 0.2 ± 0.2 mM, respectively, thereby indicating that more than 30 % of total precipitation was within a pure precipitation criteria. The precipitation with a pH range of 4.5 - 5.0 corresponded to 40.8 % in Jeju City, while the precipitation with a pH range of 5.0 - 5.5 corresponded to 56.9 % in Mt. Halla-1100 site, thereby indicating slightly more weak acidity than that in Jeju city. The volume-weighted mean concentration (µeq/L) of ionic species was in the order of Na+ > Cl- > nss-SO42- > NO3- > Mg2+ > NH4+ > H+ > nss-Ca2+ > PO43- > K+ > CH3COO- > HCOO- > NO2- > F- > HCO3- > CH3SO3- at Jeju City area, while it corresponded to Na+ > Cl- > nss-SO42- > NO3- > NH4+ > H+ > Mg2+ > nss-Ca2+ > PO43- > CH3COO- > K+ > HCOO- > NO2- > F- > HCO3- > CH3SO3- at Mt. Halla-1100 site. The compositions of sea salts (Na+, Cl-, Mg2+) and secondary pollutants (NH4+, nss-SO42-, NO3-) corresponded to 66.1 % and 21.8 %, respectively, in Jeju City and, 49.9 % and 31.5 %, respectively, in Mt. Halla-1100 site. The acidity contributions in Jeju City and Mt. Halla-1100 site by inorganic acids, i.e., sulfuric acid and nitric acid, corresponded to 93.9 % and 91.4 %, respectively, and the acidity contributions by organic acids corresponded to 6.1 % and 8.6 %, respectively. The neutralization factors in Jeju City and Mt. Halla1100 site by ammonia corresponded to 29.8 % and 30.1 %, respectively, whereas the neutralization factors by calcium carbonate corresponded to 20.5 % and 25.2 %, respectively. From the clustered back trajectory analysis, the concentrations of most ionic components were higher when the airflow pathways were moved from the continent to Jeju area.
To estimate buffer capacity and sensitivity of forest ecosystem to acid rain in Taejon, ionic components of throughfall, stemflow, soil leachate, and open rain in Pinus rigida and Quercus variabilis forest were analysed. The spatial sensitivity based on parent rock and forest type was given by IDRISI of GIS which created imagery conversion from soil and vegetation map. Parent rocks and soils were classified into acidic, sedimentary, metamorphic rock and then subdivided based on $SiO_2$ content. Average pH of vegetation leachate was higher in throughfall but lower in stemflow than open rain and higher in Quercus variabilis forest than in Pinus rigida forest. The flow of $SO{_4}^{2-}$, $NO_3{^-}$ and $Cl^-$ through vegetation leaching(throughfall plus stemflow) into soil were 7.2, 4.3, and 2.5 times, respectively, higher in Pinus rigida forest and 4.4, 2, and 2.5 times, respectively, higher in Quercus variabilis forest than in open field. But the concentration of exchangeable cations was 4.1 times higher in Pinus rigida forest and 4.6 times higher in Quercus variabilis forest than in open field. Average pH of soil leachate was lower than that of throughfall, but higher than that of stemflow. The concentration of exchangeable canons and $Al^{3+}$ in soil leachate were more in Pinus rigida forest than in Quercus variabilis forest and increase signficantly with the increase of acidic deposits. Pinus forest had more deposition and canopy interception of acidic pollutants and more nutrient loss than Quercus forest, and Quercus forest had more cation exchange and proton consumption and than consequently had less nutrient loss and better buffer capacity than Pinus forest. The 69% of forest soils was distributed on acidic rock, 25% of it on metamorphic rock, and 6% of it on intermediate and basic rock. Acidic rock residuals which had low very canon exchange capacity and high sensitivity to acid rain occupied a half of total forest land in Taejon area. Therefore forests in Taejon showed high vulnerability to acid rain and will receive much more stress with the increase of acid rain precursors.
Three crystal structures of dehydrated partially $Co^{2+}-exchanged$ zeolite A treated with 0.6 Torr of K at $300^{\circ}C$ (for 12 hrs, 6 hrs, and 2 hrs) vapor have been determined by single-crystal X-ray diffraction techniques in the cubic space group Pm3m at 21(1)$^{\circ}C(a=12.181(1)\;{\AA},\;a=12.184(1)\;{\AA},\;and\;a=12.215(1)\;{\AA})\;respectively)$. Their structures were refined to the final error indices, R(weight) of 0.090 with 10 reflections, 0.091 with 82 reflections, and 0.090 with 80 reflections, respectively, for which $1>\sigma(I)$. In each structure, all four $Co^{2+}$ and four $Na^+$ ions to be reduced by K atoms. The cobalt and sodium atoms produced are no longer found in the zeolite. K species are found at five different crystallographic sites: three $K^+$ ions lie at the planes of 8-rings, filling that position, ca. 11.5 K^+$ ions lie on threefold axes, ca. 4.0 in the large cavity and ca. 4.0 in the sodalite cavity, and ca. 0.5 $K^+$ ion is found near a 4-ring. ca. three $K^0$ atoms are found deep into the large cavity on threefold axes. In these structures, crystallographic results show that cationic tetrahedral $K_4$ (and/or triangular $K_3$) clusters have formed in the sodalites of zeolite A. The $K_4$ and/or $K_3$ clusters coordinate trigonally to three oxygens of a six-oxygen ring. The partially reduced ions of these clusters interact primarily with oxygen atoms of the zeolite structure rather than with each other. ca. 14.5K species are found per unit cell, more than the twelve $K^+$ ions needed to balance the anionic charge of zeolite framework, indicating that sorption of $K^0$ has occurred. The three $K^0$ atoms in the large cavity are closely associated with three out of four $K^+$ ions in the large cavity to form $K_7^{4+}$ clusters. The $K_7^{4+}$ cluster not interacts primarily with framework oxygens.
The crystal structures of $Cd_{6-}A$ evacuated at $2{\times}10^{-6}$ torr and $750^{\circ}C$ (a = 12.204(1) $\AA$) and dehydrated $Cd_{6-}A$ reacted with 0.1 torr of Cs vapor at $250^{\circ}C$ for 12 hours (a = 12.279(1) $\AA$) have been determined by single crystal X-ray diffraction techniques in the cubic space group Pm3m at $21(1)^{\circ}C.$ Their structures were refined to final error indices, $R_1=$ 0.081 and $R_2=$ 0.091 with 151 reflections and $R_1=$ 0.095 and $R_2=$ 0.089 with 82 reflections, respectively, for which I > $3\sigma(I).$ In vacuum dehydrated $Cd_{6-}A$, six $Cd^{2+}$ ions occupy threefold-axis positions near 6-ring, recessed 0.460(3) $\AA$ into the sodalite cavity from the (111) plane at O(3) : Cd-O(3) = 2.18(2) $\AA$ and O(3)-Cd-O(3) = $115.7(4)^{\circ}.$ Upon treating it with 0.1 torr of Cs vapor at $250^{\circ}C$, all 6 $Cd^{2+}$ ions in dehydrated $Cd_{6-}A$ are reduced by Cs vapor and Cs species are found at 4 crystallographic sites : 3.0 $Cs^+$ ions lie at the centers of the 8-rings at sites of $D_{4h}$ symmetry; ca. 9.0 Cs+ ions lie on the threefold axes of unit cell, ca. 7 in the large cavity and ca. 2 in the sodalite cavity; ca. 0.5 $Cs^+$ ion is found near a 4-ring. In this structure, ca. 12.5 Cs species are found per unit cell, more than the twelve $Cs^+$ ions needed to balance the anionic charge of zeolite framework, indicating that sorption of Cs0 has occurred. The occupancies observed are simply explained by two unit cell arrangements, $Cs_{12}-A$ and $Cs_{13}-A$. About 50% of unit cells may have two $Cs^+$ ions in sodalite unit near opposite 6-rings, six in the large cavity near 6-ring and one in the large cavity near a 4-ring. The remaining 50% of unit cells may have two Cs species in the sodalite unit which are closely associated with two out of 8 $Cs^+$ ions in the large cavity to form linear $(Cs_4)^{3+}$ clusters. These clusters lie on threefold axes and extend through the centers of sodalite units. In all unit cells, three $Cs^+$ ions fill equipoints of symmetry $D_{4h}$ at the centers of 8-rings.
Park, Ji-Su;Do, Jung-Ah;Lee, Han Sol;Park, Shin-min;Cho, Sung Min;Shin, Hye-Sun;Jang, Dong Eun;Cho, Myong-Shik;Jung, Yong-hyun;Lee, Kangbong
Journal of Food Hygiene and Safety
/
v.34
no.1
/
pp.22-29
/
2019
Validamycin A is an aminoglycoside fungicide produced by Streptomyces hygroscopicus that inhibits trehalase. The purpose of this study was to develop a method for detecting validamycin A in agricultural samples to establish MRL values for use in Korea. The validamycin A residues in samples were extracted using methanol/water (50/50, v/v) and purified with a hydrophilic-lipophilic balance (HLB) cartridges. The analyte was quantified and confirmed by liquid chromatograph-tandem mass spectrometer (LC-MS/MS) in positive ion mode using multiple reaction monitoring (MRM). Matrix-matched calibration curves were linear over the calibration ranges (0.005~0.5 ng) into a blank extract with $R^2$ > 0.99. The limits of detection and quantification were 0.005 and 0.01 mg/kg, respectively. For validation validamycin A, recovery studies were carried out three different concentration levels (LOQ, $LOQ{\times}10$, $LOQ{\times}50$, n = 5) with five replicates at each level. The average recovery range was from 72.5~118.3%, with relative standard deviation (RSD) less than 10.3%. All values were consistent with the criteria ranges requested in the Codex guidelines (CAC/GL 40-1993, 2003) and the NIFDS (National Institute of Food and Drug Safety) guideline (2016). Therefore, the proposed analytical method is accurate, effective and sensitive for validamycin A determination in agricultural commodities.
To evaluate the digestibility and absorbability of proteins, and the rates of energy and nitrogen(N) metabolism of the Korean native goats, studies were carried out with open type respiration apparatus based on the nitrogen-carbon method. The results on the nitrogen retention and the metabolic rate of energy, which was obtained with one male (10-month-old) and one female (24-month-old) goats, both weighing ${\simeq}20kg$, are summarized as follows. 1. When the goats were fed ad libitum the medium quality orchard grass hay, they consumed hay about 0.66 to 0.92% of body weight per day. The hay intake was remained the same even when high quality hay was provided. This amount of hay intake was relatively lower than that of dairy goat and sheep. It was believed to be partly due to the change in feeding enviroment. When fed with hay and soybean meal together, the goats ate hay about 1.06% and soybean meal about 0.60% of body weight, corresponding to 1.66% of body weight as fed basis. 2. The $CO_2$ gas produced from the goat in the open type respiration chamber and absorbed with KOH solution was estimated to be 99~117g/day. The difference in feed intake did not influence the $CO_2$ production; however, these seems to be a linea relationship between body weight and $CO_2$ production. 3. When fed orchard grass hay only, the goats showed protein digestibility of 24~41%. The protein digestibility incresed to 58.2% when fed hay and soybean meal together. A negative nitrogen balance(-0.16g N/day) was observed with goats fed 11.53g N originated from 212g hay and 150g soybean meal. Converting that nitrogen ingested to a crude protein, the amount of crude protein intake by the goats per day was 77.9g compared to 40~45g N known to be required in a day by goat weighing 20kg, indicating that the extra protein ingested was metabolized to provide energy. 4. When the male and female goats comsumed 624 kcal gross energy and 824 kcal gross energy by consuming 158g and 213g of hay, respectively, the digestible energy intake was calculated to be 260kcal for the male and 199kcal for the female goat. The daily heat production of male and female goats were 338kcal and 334kcal, respectively, when fed hay only. However, the female goat fed 212g hay and 150g soybean meal produced about 591kcal per day. Consequently, the energy requirment of the Korean native goats weighing ${\simeq}20kg$ was concluded to be $${\geq_-}$$600kcal net energy per day. 5. The fasting heat product ion of a male goat weighing 27.7kg was 412kcal per day when fasted for 2~3 days. When fasted for 3~4 days, the value decresed to 240kcal. The enviromental temperatures during the expreimental period were ranged from 19 to $34.5^{\circ}C$. The goats seemed to be panting when the chamber temperature rose to $32^{\circ}C$ or above. 6. When fed low levels of dietary protein, serum protein levels of the goats were decresed slightly ($${\leq_-}$$10%); however, urea content in the serum was observed to decrese to a great extent (3X).
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