• Journal of Environmental Science International
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• v.21 no.12
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• pp.1449-1454
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• 2012

The ion selective microelectrodes (ISME) have been applied to observe the continuous profiles of NO3-N and NH4-N in bulk solutions or biofilms. In order to evaluate the performance and applicability of ion concentration measuring system, the characteristics, such as slope of calibration curve, detection limit and potentiometric selectivity coefficient were investigated. The slopes of calibration curve showed high degree of correspondence for each target ion concentrations. And the detection limits of nitrate and ammonia ion selective microelectrode were 10-4.7 M and 10-4.4 M, respectively. These ion selective microelectrodes were proved that their own performance could be maintained for 16 days after making. NO3-N and NH4-N selective microelectrodes were also adapted to detect the continuous ion profiles of cilia media packed MLE (Modified Ludzack-Ettinger) process. And the monitored nitrate and ammonia ion profiles with the ion selective microelectrode were stable and well corresponded to the results with conventional ion chromatograph. However, the electric potential was unstable until 8 hr because of the unknown noise. The tip shape and performance of the ion selective microelectrode was stably kept over 2 days continuous monitoring.

• Journal of the Semiconductor & Display Technology
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• v.5 no.1 s.14
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• pp.45-49
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• 2006

In this paper, a new method that monitors the quantity of particles using ion-counter in vacuum environment is introduced. In-situ particle monitoring (ISPM) system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. The ion-counter applied by positive voltage detects only positive charged particles. Therefore the particles to be detected should be in known charge state for further data analysis. ion-counter is installed at the exhaust line of process equipment where the pressure loss is structurally low. ISPM system performance has been verified with SMPS (Scanning Mobility Particle Sizer) system. The correlation coefficient is above 0.98 at the particle size range of $20{\sim}300nm$ in diameter with identified charge distribution under $0.1{\sim}10.0$ Torr.

• Applied Science and Convergence Technology
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• v.23 no.6
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• pp.357-365
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• 2014

A non-invasive method for ion energy distribution measurement at a RF biased surface is proposed for monitoring the property of ion bombardments in capacitively coupled plasma sources. To obtain the ion energy distribution, the measured electrode voltage is analyzed based on the circuit model which is developed with the linearized sheath capacitance on the assumption that the RF driven sheath behaves like a simple diode for a bias power whose frequency is much lower than the ion plasma frequency. The method is verified by comparing the ion energy distribution function obtained from the proposed model with the experimental result taken from the ion energy analyzer in a dual cathode capacitively coupled plasma source driven by a 100 MHz source power and a 400 kHz bias power.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.523-523
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• 2012

As the wafer geometric requirements continuously complicated and minutes in tens of nanometers, the expectation of real-time add-on sensors for in-situ plasma process monitoring is rapidly increasing. Various industry applications, utilizing plasma impedance monitor (PIM) and optical emission spectroscopy (OES), on etch end point detection, etch chemistry investigation, health monitoring, fault detection and classification, and advanced process control are good examples. However, process monitoring in semiconductor manufacturing industry requires non-invasiveness. The hypothesis behind the optical monitoring of plasma induced ion current is for the monitoring of plasma induced charging damage in non-invasive optical way. In plasma dielectric via etching, the bombardment of reactive ions on exposed conductor patterns may induce electrical current. Induced electrical charge can further flow down to device level, and accumulated charges in the consecutive plasma processes during back-end metallization can create plasma induced charging damage to shift the threshold voltage of device. As a preliminary research for the hypothesis, we performed two phases experiment to measure the plasma induced current in etch environmental condition. We fabricated electrical test circuits to convert induced current to flickering frequency of LED output, and the flickering frequency was measured by high speed optical plasma monitoring system (OPMS) in 10 kHz. Current-frequency calibration was done in offline by applying stepwise current increase while LED flickering was measured. Once the performance of the test circuits was evaluated, a metal pad for collecting ion bombardment during plasma etch condition was placed inside etch chamber, and the LED output frequency was measured in real-time. It was successful to acquire high speed optical emission data acquisition in 10 kHz. Offline measurement with the test circuitry was satisfactory, and we are continuously investigating the potential of real-time in-situ plasma induce current measurement via OPMS.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.11 no.3
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• pp.212-218
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• 2001

This study was performed to estimate environmental and biological monitoring of workers exposed to methyl bromide through quarantine fumigation. Airborne methyl bromide and it's metabolites were analyzed by gas chromatography and ion chromatography, respectively. The results are as followings; airborne concentration of methyl bromide(TWA) was $2.08{\pm}1.56ppm$(N=8). Dispersion and setting/degas groups were $0.67{\pm}0.12ppm$(N=2) and $2.54{\pm}1.53ppm$(N=6), respectively. Bromide ion concentration in serum was $23.40{\pm}14.91mg/{\ell}$(N=10) in the exposed workers and $4.74{\pm}0.82mg/{\ell}$(N=21) in the non-exposed workers. Bromide ion concentration in urine was $35.56{\pm}26.89mg/{\ell}$(N=11) in exposed group and $6.62{\pm}2.31mg/{\ell}$(N=21) in non-exposed group. Good correlation was observed between concentration of serum and urine ($r^2$=0.890 p<0.01). No significant correlations of other determinants were observed. Calculated from a regressive curve, the biological half lifes of serum and urine were 10.7 and 5.9 days. In these results, biological monitoring of bromide ion of serum and urine provided useful information for evaluating exposure of workers to methyl bromide, so that an availability of bromide ion of biological samples was showed as biological monitoring indices for methyl bromide.

• Journal of Welding and Joining
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• v.18 no.1
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• pp.97-103
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• 2000

Time series analysis results show the SVD is a candidate of on-line monitoring of welding penetration when the covariance matrix of a full penetration is used as a mapping function. As the reconstructed embedding vectors from the chaotic scalar time series are manipulated by the covariance matrix, the mapped tim series lie on a hyper-ellipsoid which the lengths of semi-axes are the squared eigenvalues of the covariance matrix in the case of full penetration. These visualize by two dimensional stroboscope views. The other cases like partial penetration, are different in the sense of sizes and shapes. Here we test two types of time series; the ion current and the X-ray. The ion current is better than the X-ray as an on-line monitoring signal, because the difference of the eigenvalue spectrum of the ion(between the pull penetration and partial penetration) is bigger than those of the X-ray.

• Journal of Electrochemical Science and Technology
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• v.7 no.3
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• pp.241-244
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• 2016

Anodic stripping voltammetry (ASV) is successfully applied in mM level detection of mercury ion in an electroplating bath which is currently used in preparing a cathodic electrolyzer. Glassy carbon electrode is used for the detection and the optimum condition obtained is 10 s deposition at −1.4 V vs. Ag/AgCl and stripping by scanning from −1.4 to +0.4 V vs Ag/AgCl at 50 mV/s. By applying the method, the mercury ion concentration in the electroplating bath could be successfully monitored during the plating.

• Archives of Pharmacal Research
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• v.6 no.1
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• pp.7-16
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• 1983

A methadone-diazepam interaction study in rats was performed in which conjugated metabolites of methadone were analyzed using deuterated biosynthetic internal standards. Diazepam (5mg/kg) was given to rats through a cannulate djugular vein and a subcutaneous dose of methadone (10mg/kg) was given. Bile was collecte through the cannulate dbile duct over a period of 24 hours. The deuterium label of the internal standards was found to be stable under conditions of the prolonged incubation. There was no significant difference in the excretion of the metabolites between the control and the diazepam treated rats. Feasibility of using biosynthetic internal standards with selected ion monitoring was established for the drug metabolism and kinetic studies.

• Applied Chemistry
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• v.16 no.1
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• pp.25-28
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• 2012

A determination method of cyanide ion (CN^-) using nickel complexation reaction by continuous monitoring system. The mechanical parameters and chemical conditions of the complexation reaction were investigated prior to application of continuous monitoring system for determination of cyanide. On the optimized conditions, the calibration curve was linear over the range from 5.0×10^-6 to 1.0×10^-4 M. In this range, 2.40% of the reproducibility (RSD, n=3) was obtained. The limit of detection (3σ/s) was calculated to be 1.8×10^-6 M.

• Proceedings of the KSRS Conference
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• 2008.10a
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• pp.96-99
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• 2008

The MRE (Monitoring Reconfiguration Electronics) board included inside the SCU (Spacecraft Computer Unit) in the COMS (Communication, Ocean and Meteorological Satellite) spacecraft is used to monitor the battery voltage and to detect a battery under voltage (low battery capacity) or a battery overvoltage (overcharge). In case of alarm detection, a reconfiguration is initiated by the MRE board. The MRE configures the overall spacecraft in the survival mode to protect the Li-Ion (lithium ion) battery from overcharge and over discharge. For the EPS (Electrical Power Subsystem) point of view, the survival mode can be trigged from hardware wired thresholds. The aim of this paper to provide and to justify the low and high threshold levels which are associated to the MRE battery voltage monitoring. The MRE trig guarantees minimum battery energy to available for the required 48 hours autonomy duration of the spacecraft after MRE trig in the survival mode.