• Title/Summary/Keyword: intedigitated cantilevers

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Development of $16{\mu}m{\times}16{\mu}m$ Digital Micromirror Array Suitable for Seamless-picture Projection Display System

  • Kim, Dae-Hyun;Jeon, Jin-Wan;Lim, Koeng-Su;Yoon, Jun-Bo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1159-1162
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    • 2007
  • We have developed $16{\mu}m{\times}16{\mu}m$ digital micromirror array suitable for seamless-picture projection display system. This structure can improve the picture quality by making seamlesspicture image when combined with high-fill-factor microlens array to focus lights onto the mirror center. The fabricated micromirror shows excellent dynamic performances including the resonant frequency of 400 kHz.

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