• 제목/요약/키워드: inorganic thin film

검색결과 288건 처리시간 0.026초

Crystallization Behavior of ITO Thin Films with and without External Heating during RF-Magnetron Sputtering

  • Park, Ju-O;Lee, Joon-Hyung;Kim, Jeong-Joo;Cho, Sang-Hee
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.822-825
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    • 2003
  • Indium tin oxide (ITO) thin films were deposited by RF-magnetron sputtering method and the crystallization behavior of the films with no external heating as a function of deposition time was examined. X-ray diffraction results indicated an amorphous state of the film when the deposition time is short about 10 min. When the deposition time was increased over 20 min development of crystallization of the films is observed.

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Hybrid Organic-Inorganic Films Fabricated Using Atomic and Molecular Layer Deposition Techniques

  • George, Steven M.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.75.1-75.1
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    • 2013
  • Atomic layer deposition (ALD) and molecular layer deposition (MLD) are based on sequential, self-limiting surface reactions that produce atomic layer controlled and conformal thin film growth. ALD can deposit inorganic films and MLD can deposit films containing organics. ALD and MLD can be used together to fabricate a wide range of hybrid organic-inorganic alloy films. The relative fraction of inorganic and organic constituents can be defined by controlling the ratio of the ALD and MLD reaction cycles used to grow the film. These hybrid films can be tuned to obtain desirable mechanical, electrical and optical properties. This talk will focus on the growth and properties of metal alkoxide films grown using metal precursors and various organic alcohols that are known as "metalcones". The talk will highlight the tunable mechanical properties of alucone alloys grown using Al2O3 ALD and alucone MLD and the tunable electrical conductivity of zincone alloys grown using ZnO ALD and zincone MLD with DEZ and hydroquinone as the reactants.

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Au/Titania Composite Nanoparticle Arrays with Controlled Size and Spacing by Organic-Inorganic Nanohybridization in Thin Film Block Copolymer Templates

  • Li, Xue;Fu, Jun;Steinhart, Martin;Kim, Dong-Ha;Knoll, Wolfgang
    • Bulletin of the Korean Chemical Society
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    • 제28권6호
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    • pp.1015-1020
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    • 2007
  • A simple approach to prepare arrays of Au/TiO2 composite nanoparticles by using Au-loaded block copolymers as templates combined with a sol-gel process is described. The organic-inorganic hybrid films with closely packed inorganic nanodomains in organic matrix are produced by spin coating the mixtures of polystyrene-block-poly(ethylene oxide) (PS-b-PEO)/HAuCl4 solution and sol-gel precursor solution. After removal of the organic matrix with deep UV irradiation, arrays of Au/TiO2 composite nanoparticles with different compositions or particle sizes can be easily produced. Different photoluminescence (PL) emission spectra from an organic-inorganic hybrid film and arrays of Au/TiO2 composite nanoparticles indicate that TiO2 and Au components exist as separate state in the initial hybrid film and form composite nanoparticles after the removal of the block copolymer matrix.

Effect of Conducting Carbon Layer on AC Thin Film EL Device

  • Park, Lee-Soon;Baek, Jeong-Ju;Park, Jin-Woo;Kim, Dae-Yong;Bae, Sung-Choon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2003년도 International Meeting on Information Display
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    • pp.917-919
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    • 2003
  • The effect of conducting carbon layer on the performance of AC thin film EL display was examined. It was found that incorporation of small amount of carbon nano-tube and conducting additive greatly improve the luminance of the inorganic EL compared to the one with only conducting carbon black.

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Development of Carbon Nanotubes and Polymer Composites Therefrom

  • Jain, P.K.;Mahajan, Y.R.;Sundararajan, G.;Okotrub, A.V.;Yudanov, N.F.;Romanenko, A.I.
    • Carbon letters
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    • 제3권3호
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    • pp.142-145
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    • 2002
  • Multiwall carbon nanotubes (MWNT) were produced using the arc-discharge graphite evaporation technique. Composite films were developed using MWNT dispersed in polystirol polymer. In the present work, various properties of the polymeric thin film containing carbon nanotubes were investigated by optical absorption, electrical resistivity and the same have been discussed.

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Gas Barrier Properties of Nanolaminated Single Inorganic Film Deposited by Neutral Beam Assisted Sputtering Process

  • Jang, Yun-Sung;Lee, You-Jong;Hong, Mun-Pyo
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.465-465
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    • 2012
  • In this study, we developed an Al2O3 nanolaminated single gas barrier layer using a Neutral Beam Assisted Sputtering (NBAS) process. The NBAS process can continuously change crystalline structures from an amorphous phase to a nanocrystal phase with various grain sizes and lead to the formation of a nanolaminated structure in the single inorganic thin film. As a result, the water vapor transmission rates (WVTR) of the nanolaminated Al2O3 thin films by NBAS process have improved more than 40% compared with that of conventional Al2O3 layers by the RF magnetron sputtering process under the same sputtering conditions.

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Initial Growth and Surface Stability of 1,4,5,8,9,11-Hexaazatriphenylene-exanitrile (HATCN) Thin Film on an Organic Layer

  • Kim, Hyo Jung;Lee, Jeong-Hwan;Kim, Jang-Joo;Lee, Hyun Hwi
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.192.2-192.2
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    • 2013
  • Crystalline order and surface stability of 1,4,5,8,9,11-hexaazatriphenylene-hexanitrile (HATCN) thin films on organic surface were investigated using grazing incidence wide angle x-ray scattering and x-ray reflectivity measurements. In the initial growth regime (less than 20 nm), HATCN molecules were stacked to low crystalline order with substantial amorphous phase. Meanwhile, a thicker film with 50 nm thickness showed high crystalline order of hexagonal phase with three different orientational domains. The domain distribution was quantitatively obtained as a function of tilted angle. By an organic-inorganic interface formation of IZO/HATCN thin film from an indium zinc oxide (IZO) electrode deposition, the surface stability of HATCN film was investigated and the sharp interface was confirmed by the x-ray reflectivity measurement.

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Liquid Crystal Alignment Effect on the Inorganic Thin Film by Sputtering and using Ultraviolet Exposure Mothod

  • Hwang, Jeoung-Yeon;Kang, Hyung-Ku;Seo, Dae-Shik;Oh, Byeong-Yun;Ham, Moon-Ho;Myoungr, Jae-Min
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.460-463
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    • 2005
  • We studied the nematic liquid crystal (NLC) alignment capability by the Ultraviolet (UV) alignment method on a a-C:H thin -film , and investigated electro-optical performances of the UV aligned twisted nematic (TN)- liquid crystal display (LCD) with the UV exposure on a-C:H thin film surface. A good LC alignment by UV irradiation on a a-C:H thin -film surface was achieved. Monodomain alignment of the UV aligned TN-LCD can be observed. The good electro-optical (EO)characteristics of the UV aligned TN-LCD was observed with oblique UV exposure on the a-C:H thin film surface for 1min.

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