• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.56-60
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• 1996

This paper presents the initial results of development of a inertial navigation grade silicon pendulous accelerometer. This effort focused on developing a bulk-micromachined silicon pendulum and designing a PI-servo controller. Performance data presented in this paper includes threshold, bias short term stability and nonlinearity of scale factor. This accelerometer developed is demonstrated the feasibility of meeting one-nautical-mile-per-hour accuracy.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.58-66
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• 2005

Inertial-grade vertical-type and lateral-type differential resonant accelerometers (DRXLs) are designed, fabricated using one process and tested for navigational applications. The accelerometers consist of an out-of-plane (for z-axis) accelerometer and in-plane (for x, y-axes) accelerometers. The sensing principle of the accelerometer is based on gap-sensitive electrostatic stiffness changing effect. It says that the natural frequency of the accelerometer can be changed according to an electrostatic force on the proof mass of the accelerometer. The out-of-plane resonant accelerometer shows bias stability of $2.5{\mu}g$, sensitivity of 70 Hz/g and bandwidth of 100 Hz at resonant frequency of 12 kHz. The in-plane resonant accelerometer shows bias stability of $5.2{\mu}g$, sensitivity of 128 Hz/g and bandwidth of 110 Hz at resonant frequency of 23.4 kHz. The measured performances of two accelerometers are suitable for an application of inertial navigation.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.8
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• pp.796-803
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• 2011

It is called self-alignment or initial alignment that INS(Inertial Navigation System) is aligned using the measurements from the inertial sensors as an accelerometer and a gyroscope and the inserted reference navigation information in the stop state. The main purpose of self-alignment is to obtain the initial attitude of INS. The accuracy of self-alignment is determined by the performance grade of the used inertial sensors, especially horizontal attitude accuracy by the horizontal accelerometer and vertical attitude accuracy by the E-axis gyroscope. Therefore the uncertain errors in the inertial sensors cause the performance of self-alignment to degrade. In this paper, we analyze theoretically and through a simulation how the errors of inertial sensors in the temperature stabilizing state, one of the uncertain errors, affect the accuracy of self-alignment.

• Journal of Navigation and Port Research
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• v.35 no.10
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• pp.785-791
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• 2011

This paper describes the evaluation and selection of MEMS(Micro-Elect Mechanical System) based inertial sensor to fit to implement the Inertial Measurement Unit(IMU) for a small-sized vessel at sea. At first, the error model and the noise model of the inertial sensors are defined with Euler's equations and then, the inertial sensor evaluation is carried out with Allan Variance techniques and Monte Carlo simulation. As evaluation results for the five sensors, ADIS16405, SAR10Z, SAR100Grade100, LIS344ALH and ADXL103, the combination of gyroscope and accelerometer of ADIS16405 is shown minimum error having around 160 m/s standard deviation of velocity error and around 35 km standard deviation of position error after 600 seconds. Thus, we select the ADIS16405 inertial sensor as a MEMS-based inertial sensor to implement IMU and, the error reducing method is also considered with the search for reference papers.

• International Journal of Control, Automation, and Systems
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• v.5 no.1
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• pp.35-42
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• 2007

This paper presents an INS(Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer(DRXL) manufactured by an epitaxially grown thick poly silicon process. The proposed DRXL system generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change. To facilitate the resonance dynamics of the electromechanical system, the micromachined DRXL device is packaged by using the wafer level vacuum sealing process. To test the DRXL performance, a nonlinear self-oscillation loop is designed based on the extended describing function technique. The oscillation loop is implemented using discrete electronic elements including precision charge amplifier and hard feedback nonlinearity. The performance test of the DRXL system shows that the sensitivity of the accelerometer is 24 Hz/g and its long term bias stability is about 2 mg($1{\sigma}$) with dynamic range of ${\sigma}70g$.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.36 no.7
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• pp.674-679
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• 2008

In this paper, we introduce a new design approach for self-sustained resonant accelerometer, that takes advantage of the automatic gain control (AGC) loop to achieve a stabilized oscillation dynamics. Fundamental idea of this accelerometer is to maintain uniform amplitude of oscillation under input accelerations. Through system modeling and loop transformation considering the envelope of oscillation, the controller is designed to maintain uniform amplitude in oscillation under dynamic input acceleration. The simulation results demonstrate the feasibility of the proposed accelerometer design, which is applicable to control grade inertial measurement system in industrial and civil application fields.

• Journal of the Korean Society of Marine Environment & Safety
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• v.19 no.6
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• pp.666-673
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• 2013

This paper proposes the performance evaluation test of attitude heading reference system (AHRS) suitable for small high speed autonomous underwater vehicle(AUV). Although IMU can provides the detail attitude information, it is sometime not suitable for small AUV with short operation time in view of price and the electrical power consumption. One of alternative for tactical grade IMU is the AHRS based micro-machined electro mechanical system(MEMS) which can overcome many problems that have inhibited the adoption of inertial system for small AUV such as cost and power consumption. A cost effective and small size AHRS which incorporates measurements from 3-axis MEMS gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for AUV and the attitude calculation algorithm is derived based the coordinate transform equation and Kalman filter. The developed AHRS was validated through various performance tests as like the magnetometer calibration, operating experiments using land mobile vehicle and flight motion simulator (FMS). The test of magnetometer calibration shows the developed MEMS AHRS is robust to the external magent field change and the test with land vehicle proves the leveling error of developed MEMS AHRS is below $0.5^{\circ}/hr$. The results of FMS test shows the fact that AHRS provides the measurement with $0.5^{\circ}/hr$ error during 5 minutes operation time. These results of performance evaluation tests showed that the developed AHRS provides attitude information which error of roll and pitch are below $1^{\circ}$ and the error of yaw is below $5^{\circ}$ and satisfies the required specification. It is expected that developed AHRS can provide the precise attitude measurement under sea trial with real AUV.