• 한국전기전자재료학회논문지
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• 제22권3호
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• pp.230-234
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• 2009

Hydrogen and Oxygen plasma treatments have been done on sonochemical grow ZnO nanorods by varying treatment temperature and time, The changes(position and intensity) in ultraviolet(UV) peaks and green peaks of photoluminescence(PL) spectroscopy have been measured, Experimental results showed; i) in the case of hydrogen plasma treatment, the blue shift of UV peak and the increase of PL intensity of the UV peak were observed as the increase of the process time and temperature, ii) in the case of oxygen plasma treatment, the red shift of green peak was observed and the ratio of $I_{Green}/I_{UV}$ was also increased, as the increase of the process time and the temperature.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2013년도 제46회 KOSCO SYMPOSIUM 초록집
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• pp.99-101
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• 2013

The equivalence ratio is measured by LIBS(Laser-induced Breakdown spectroscopy) in hydrocarbon flame and high temperature (${\sim}3200^{\circ}C$) oxyhydrogen flame, where a stoichiometric mixture of hydrogen and oxygen is produced from water through electrolysis. The ratio of the hydrogen and oxygen (H/O) atomic lines intensities is used for quantitatively determining the quivalence ratio. laser energy is evaluated for determining the optimal condition for plasma diagnostics. The minimum laser energy for generating plasma in a laminar premixed hydrocarbon flame was about 70 mJ, whereas oxyhydrogen flame. consequently the irradiated spot of a lower density in high temperature oxyhydrogen flame gave rise to bigger plasma in size, thus limiting the spatial resolution of the LIBS measurement.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.249-249
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• 2010

The effect of forming a passivation layer was investigated in superconformal Cu gap-filling of the nano-scale trench with atomic-layer deposited (ALD)-Ru glue layer. It was discovered that the nucleation and growth of Cu during metal-organic chemical vapor deposition (MOCVD) were affected by hydrogen plasma treatments. Specifically, as the plasma pretreatment time increased, Cu nucleation was suppressed proportionally. XPS and Thermal Desorption Spectroscopy indicated that hydrogen atoms passivate the Ru surface, which leads to suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. For gap-fill property, sub 60-nm ALD Ru trenches without the plasma pretreatment was blocked by overgrown Cu after the Cu deposition. With the plasma pretreatment, superconformal gap filling of the nano-scale trenches was achieved due to the suppression of Cu nucleation near the entrances of the trenches. Even the plasma pretreatment with bottom bias leads to the superconformal gap-filling.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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• pp.563-566
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• 2002

We investigated to decrease the leakage current of SiNx film by employing $N_2$ plasma treatment. The insulator layers were prepared by two step process; the $N_2$ plasma treatment and then PECVD SiNx deposition with $SiH_4$, $N_2$ gases. To prove the influence of the $N_2$ plasma treatment, the Si substrate was exposed to the plasma, which was generated in Ne gas ambient. Without plasma treatment SiNx film grow at the rate of 7. 03 nm/min, has a refractive index n = 1.77 and hydrogen content of $2.16{\times}10^{22}cm^{-3}$ for $N_2/SiH_4$ gas flow ratio of 20. The obtained films were analyzed in terms of deposition rates, refractive index, hydrogen concentration, and electrical properties. By employing $N_2$ plasma treatment, interface traps such as mobile charges and injected charges were removed, hysteresis of capacitance-voltage (C-V) disappeared. We observed plasma treated sample were decreased the leakage current density reduces by 2 orders with respect to the sample having no plasma treatment.

• 한국표면공학회지
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• 제40권6호
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• pp.250-253
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• 2007

Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of SKD 11 steel. Plasma nitrocarburizing was conducted for 12 h at $520^{\circ}C$ in the nitrogen, hydrogen and methane atmosphere to produce the $\varepsilon-Fe_{2-3}(N,C)$ phase. It was found that the compound layer produced by plasma nitrocarburising was predominantly composed of $\varepsilon-phase$, with a small proportion of $\gamma'-Fe_4(N,C)$ phase. The thickness of the compound layer was about $5{\mu}m$ and the diffusion layer was about $150{\mu}m$ in thickness, respectively. Plasma post oxidation was performed on the nitrocarburized samples with various oxygen/hydrogen ratio at constant temperature of $500^{\circ}C$ for 1 hour. The very thin magnetite($Fe_3O_4$) layer $1-2{\mu}m$ in thickness on top of the compound layer was obtained by plasma post oxidation. It was confirmed that the corrosion characteristics of the nitrocarburized compound layer could be further improved by the application of the superficial magnetite layer.

• 한국재료학회지
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• 제3권6호
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• pp.565-574
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• 1993

Ar/Ar-$H_{2}$ 플라즈마법으로 고순도 Nb금속을 환원 정련하였다. 또한, Ar-(20%)$H_{2}$플라즈마에서의 용융Nb금속과 수소간의 반응을 해석하였다. Ar플라즈마 환원에서는 $C/Nb_{2}O_{5}$=5.00의 비에서 99.5wt%의 금속 Nb을 얻었으며, 니오븀 산화물의 열분해에 의한 O/Sub 2/의 손실은 발생하지 않았다. Ar-(20%)$H_{2}$ 플라즈마에서는 $C/Nb_{2}O_{5}$=4.80의 비에서 99.8wt%의 금속 Nb을 제조하였다. 주된 탈산반응은 H, $H_{2}$와의 반응이었으며,$NbO_{x}$의 증발에 의한 탈산은 발생하지 않았으나, "splash"효과에 의해 Nb의 질량손실이 발생함을 관찰하였다. 탈산반응은 1차 반응속도론에 따랐으며, 탈산의 반응속도 상수(k')는 $7.8 \times 10_{-7}$(m/sec)였다. Ar-(20%)$H_{2}$ 플라즈마법에서 Nb금속 내의 수소 용해도는 60ppm으로 분자상태 수소의 용해도인 40ppm 보다 높았으며, 포화되는 시간은 60초 이내였다. 이를 다시 Ar 플라즈마로 처리함으로써 수소 함량을 10ppm 이하로 감소시킬 수 있었다.소시킬 수 있었다.

• 한국주조공학회지
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• 제15권2호
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• pp.175-183
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• 1995

It is difficult to remove such interstitial impurities as sulfur, oxygen, hydrogen and carbon in Fe-Ni alloys. Thermodynamic and kinetic studies were carried out on the behavior of hydrogen gas, oxygen gas, Si, Al and slag, and the reaction time by the $Ar/Ar-H_2$ plasma and electron beam melting. After the addition of Al, Si, they were melted by Ar plasma with reaction time changed. 80%Ni-Fe alloys showed a better deoxidation than 36%Ni-Fe alloys. At $Ar-H_2$ plasma melting, the deoxidation was significant. In the case of the electron beam melting, the residual oxygen was higher than in Ar plasma melting because electron beam melting temperature was lower than that of Ar plasma. For the decaburization, it was melted by $Ar-O_2$ plasma melting, which could remove effectively carbon by activated oxygen in plasma. We added slag to Fe-Ni alloys for the desulfurization. As the result of this experiments, the amount of residual sulfur was not changed according to the slag ratio and reaction time.

• 한국가스학회지
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• 제5권1호
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• pp.15-20
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• 2001

저온 마이크로웨이브 플라즈마와 촉매반응에 의한 메탄올 활성화하여 C2+ 화합물과 수소로 전환하는 반응을 고찰하였다. 금속 촉매인 Fe, Ni과 귀금속 촉매인 Pt, Pd 계열의 촉매로 본 실험을 수행하였다 메탄의 유속이 $20ml\;min^{-1}$일때 플라즈마의 출력이 증가할수록 C2+ 생성물은 29에서 $42\%$로 증가하였으며 동시에 메탄의 커플링 반응에서 발생하는 수소는 0.6에서 0.65 몰분율을 나타내었다. 촉매는 플라즈마 영역 후단에 위치하였을 때, C2+ 생성물이 일정한 수율을 나타내는 반면 에틸렌과 아세틸렌의 선택도는 향상되었다. 플라즈마 반응후 ECR 전기장과 Pd-Ni 이원촉매를 위치했을 때 최고의 C2+ 수율은 $64\%$로 관찰되었다.

• 한국표면공학회지
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• 제29권6호
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• pp.695-702
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• 1996

Plasma spraying process was employed to produce HA coating on Ti6A14V alloy for the development of a dental implant. The goal of this research was to find optimum spraying conditions for HA coating on Ti6Al4V. This study was thus designed carefully to evaluate how spraying parameters affect various physical properties of a HA coating layer, such as phase composition and bond strength. In plasma spraying, spraying parameters such as hydrogen flow rates and spraying distances were varied systematically to change the degree of the melting of starting HA powder in plasma jet. It was revealed that the deposition efficiency increased with increasing a hydrogen flow rate, and the bond strength between the HA-coated layer and Ti-alloy substrate increased with hydrogen flow rate, but decreased with spraying distance. Therefore, the hydrogen flow rate and the spraying distance should be carefully controlled to obtain the reasonable bond strength simultaneously.

• 한국분말재료학회지
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• 제14권1호
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• pp.63-69
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• 2007

The present study was focused on the synthesis of a zirconium-based alloyed nanopowder by the plasma arc discharge process. The chemical composition, phase structure, particle size and hydrogen sorption property of the synthesized powders under various synthesis conditions were analyzed using XRF, XRD, SEM, XPS and the ASTM-F798 method. The chemical composition of the synthesized Zr-V-Fe-based powders approached that of the raw material with an increasing hydrogen fraction in the powder synthesis atmosphere. The synthesized $Zr_{55}V_{29}Fe_{16}$ powder consist of a mixed phase structure of the $Zr,\;ZrH_2,\;FeV\;and\;Zr(V_{1-x}Fe_{x})_2$ phases. This powder has an average particle size of about 20 nm. The synthesized $Zr_{55}V_{29}Fe_{16}$ nanopowder showed getter characteristics, even though it had a lower hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder. However, the synthesized Zr nanopowder with an average particle size of 20 nm showed higher hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder.